Abstract: An RF based, gridless plasma source comprising an RF coupler, an ionization chamber comprising a flow inlet, an upstream manifold, a flow exit, and a reasonably RF transparent gas containment tube that allows RF power to couple to the plasma inside the ionization chamber, and a choke restriction downstream; and a method of using the plasma source comprising a step of tailoring an energy distribution of extracted plasma.

Abstract: A plasma source comprising an RF coupling system, magnets or coils that generate magnetic fields, a gas injection system, and a vacuum tight RF transparent gas containment tube, wherein said RF coupling system comprises an RF coupler and said plasma source further comprises a choke point wherein the ratio of the field strength at said choke point to the field strength at said RF coupler is greater than two.

Abstract: Apparatus and methods for integrated circuit (IC) design, including management of the configuration, design parameters, and functionality of a design in which custom instructions or other design elements may be controlled by the designer. In one exemplary embodiment, a computer program rendered in an object-oriented language implementing the aforementioned methods for designing user-customized digital processors is disclosed. Design iteration, component encapsulation, use of human-readable file formats, extensible dynamic GUIs and tool sets, and other features are employed to enhance the functionality and accessibility of the program. Components within the design environment comprise encapsulated objects which contain information relating to interfaces with other components in the design, hierarchy, and other facets of the design process.

Abstract: Apparatus and methods for integrated circuit (IC) design, including management of the configuration, design parameters, and functionality of a design in which custom instructions or other design elements may be controlled by the designer. In one exemplary embodiment, a computer program rendered in an object-oriented language implementing the aforementioned methods for designing user-customized digital processors is disclosed. Design iteration, component encapsulation, use of human-readable file formats, extensible dynamic GUIs and tool sets, and other features are employed to enhance the functionality and accessibility of the program. Components within the design environment comprise encapsulated objects which contain information relating to interfaces with other components in the design, hierarchy, and other facets of the design process.