Abstract: We have invented an improved apparatus for electronically measuring fluid flow. The apparatus includes a radiation detection means for indicating the position of a flow indicator in a chamber of a variable area flowmeter and has a reliability, versatility and functional accuracy not obtainable with known variable area flowmeters. The invention may also include a variable area flowmeter with the flow indicator in a tapered fluid flow chamber with a wall and a long axis, the chamber having a front side, a back side, and an operational length substantially parallel to the long axis. The invention has no moving parts and is not intrusive so mechanical malfunction and unwanted leaks can not occur. Useful embodiments include, for example, compact self contained apparatus useful for fitting around existing flowmeters, systems that include flowmeters and systems able to work with some fluids that are visually opaque.

Abstract: A liner (102) for an arc chamber (100) of an ion implanter. The arc chamber (100) comprises a liner (102) on the inner surface (104) of the arc chamber (100) that extends the life of the arc chamber (100). The liner (102) comprises a one piece portion (102a) that covers the bottom and long sidewalls of the arc chamber (100) and two end plates (102b) for covering the end walls of the arc chamber (100). When the liner (102) wears out it is replaced at a significantly reduced cost compared to replacing the entire arc chamber (100).

Abstract: A device for detecting and locating substrates in a cassette including a homogeneous columnar radiation source adjacent to and radiating the edges of the substrates, rod-shaped directional lenses transmitting and replicating the substrate edges in their field of view and directing the transmitted reflected radiation and image of the field of view onto sensing pixels activated to produce indications of the presence and location of the substrates in the cassette.