Patents by Inventor Timothy J. Brosnihhan

Timothy J. Brosnihhan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Bonded wafer optical MEMS process
    Patent number: 7083997
    Abstract: A microelectromechanical system is fabricated from a substrate having a handle layer, a silicon sacrificial layer and a device layer. A micromechanical structure is etched in the device layer and the underlying silicon sacrificial layer is etched away to release the micromechanical structure for movement. One particular micromechanical structure described is a micromirror.
    Type: Grant
    Filed: August 3, 2001
    Date of Patent: August 1, 2006
    Assignee: Analog Devices, Inc.
    Inventors: Timothy J. Brosnihhan, Michael W. Judy
  • Bonded wafer optical MEMS process
    Publication number: 20020117728
    Abstract: A microelectromechanical system is fabricated from a substrate having a handle layer, a silicon sacrificial layer and a device layer. A micromechanical structure is etched in the device layer and the underlying silicon sacrificial layer is etched away to release the micromechanical structure for movement. One particular micromechanical structure described is a micromirror.
    Type: Application
    Filed: August 3, 2001
    Publication date: August 29, 2002
    Inventors: Timothy J. Brosnihhan, Michael W. Judy