Patents by Inventor Timothy McWilliams

Timothy McWilliams has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for low temperature silicon nitride deposition
    Publication number: 20050145177
    Abstract: Numerous embodiments of a method and apparatus for low temperature silicon nitride deposition are disclosed. In one embodiment, a halogen substituted silicon hydride and a nitrogen-containing precursor are added to a chamber. An operating temperature of the chamber is set below 550 ° C. and a silicon nitride layer is deposited on a substrate.
    Type: Application
    Filed: December 30, 2003
    Publication date: July 7, 2005
    Inventors: Michael McSwiney, Timothy McWilliams