Patents by Inventor Ting-Chen Hsu

Ting-Chen Hsu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240047552
    Abstract: The present disclosure provides an embodiment of a method. The method includes patterning a substrate to form trenches; etching the substrate, thereby modifying the trenches with round tips; forming a stack including conductive layers and dielectric layers in the trenches, wherein the conductive layers and the dielectric layers alternate with one another within the stack; forming an insulating compressive film in the first trenches, thereby sealing voids in the trenches; and forming conductive plugs connected to the conductive layers, respectively.
    Type: Application
    Filed: May 17, 2023
    Publication date: February 8, 2024
    Inventors: Fu-Chiang Kuo, Hsin-Liang Chen, Hsin-Li Cheng, Ting-Chen Hsu
  • Publication number: 20240014254
    Abstract: Various embodiments of the present application are directed towards an integrated chip (IC). The IC comprises a trench capacitor overlying a substrate. The trench capacitor comprises a plurality of capacitor electrode structures, a plurality of warping reduction structures, and a plurality of capacitor dielectric structures. The plurality of capacitor electrode structures, the plurality of warping reduction structures, and the plurality of capacitor dielectric structures are alternatingly stacked and define a trench segment that extends vertically into the substrate. The plurality of capacitor electrode structures comprise a metal component and a nitrogen component. The plurality of warping reduction structures comprise the metal component, the nitrogen component, and an oxygen component.
    Type: Application
    Filed: July 11, 2022
    Publication date: January 11, 2024
    Inventors: Ting-Chen Hsu, Hsin-Li Cheng, Jyun-Ying Lin, Yingkit Felix Tsui, Shu-Hui Su, Shi-Min Wu
  • Publication number: 20230378251
    Abstract: Various embodiments of the present disclosure are directed towards an integrated chip including a capacitor over a substrate. The capacitor includes a plurality of conductive layers and a plurality of dielectric layers. The plurality of conductive layers and dielectric layers define a base structure and a first protrusion structure extending downward from the base structure towards a bottom surface of the substrate. The first protrusion structure comprises one or more surfaces defining a first cavity. A top of the first cavity is disposed below the base structure.
    Type: Application
    Filed: July 31, 2023
    Publication date: November 23, 2023
    Inventors: Hsin-Li Cheng, Jyun-Ying Lin, Alexander Kalnitsky, Shih-Fen Huang, Shu-Hui Su, Ting-Chen Hsu, Tuo-Hsin Chien, Felix Ying-Kit Tsui, Shi-Min Wu, Yu-Chi Chang
  • Patent number: 11769792
    Abstract: Various embodiments of the present disclosure are directed towards an integrated circuit (IC) including a substrate comprising sidewalls that define a trench. A capacitor comprising a plurality of conductive layers and a plurality of dielectric layers that define a trench segment is disposed within the trench. A width of the trench segment continuously increases from a front-side surface of the substrate in a direction towards a bottom surface of the trench.
    Type: Grant
    Filed: July 8, 2021
    Date of Patent: September 26, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hsin-Li Cheng, Jyun-Ying Lin, Alexander Kalnitsky, Shih-Fen Huang, Shu-Hui Su, Ting-Chen Hsu, Tuo-Hsin Chien, Felix Ying-Kit Tsui, Shi-Min Wu, Yu-Chi Chang
  • Publication number: 20210378381
    Abstract: The present disclosure relates to treatment of a nail surface with non-thermal (cold) plasma prior to application of an energy cured nail coating. Non-thermal plasma (NTP) generators and electronic components which power and control the NTP generators may be incorporated into a current industry standard UV, LED or combined UV/LED curing lamp to provide a NTP curing lamp. The NTP curing lamp conveniently provides plasma pretreatment and curing of the energy cured nail coating using the same apparatus. Plasma pretreatment of the nail surface prior to application of the energy cured nail coating provides better adhesion of the energy cured nail coating to the nail surface than is achieved without the pretreatment.
    Type: Application
    Filed: October 18, 2019
    Publication date: December 9, 2021
    Inventors: Ting-Chen Hsu, Sandra Haigh
  • Publication number: 20210343881
    Abstract: Various embodiments of the present disclosure are directed towards an integrated circuit (IC) including a substrate comprising sidewalls that define a trench. A capacitor comprising a plurality of conductive layers and a plurality of dielectric layers that define a trench segment is disposed within the trench. A width of the trench segment continuously increases from a front-side surface of the substrate in a direction towards a bottom surface of the trench.
    Type: Application
    Filed: July 8, 2021
    Publication date: November 4, 2021
    Inventors: Hsin-Li Cheng, Jyun-Ying Lin, Alexander Kalnitsky, Shih-Fen Huang, Shu-Hui Su, Ting-Chen Hsu, Tuo-Hsin Chien, Felix Ying-Kit Tsui, Shi-Min Wu, Yu-Chi Chang
  • Patent number: 11063157
    Abstract: Various embodiments of the present disclosure are directed towards an integrated circuit (IC) including a pillar structure abutting a trench capacitor. A substrate has sidewalls that define a trench. The trench extends into a front-side surface of the substrate. The trench capacitor includes a plurality of capacitor electrode layers and a plurality of capacitor dielectric layers that respectively line the trench and define a cavity within the substrate. The pillar structure is disposed within the substrate. The pillar structure has a first width and a second width less than the first width. The first width is aligned with the front-side surface of the substrate and the second width is aligned with a first point disposed beneath the front-side surface.
    Type: Grant
    Filed: December 27, 2019
    Date of Patent: July 13, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hsin-Li Cheng, Jyun-Ying Lin, Alexander Kalnitsky, Shih-Fen Huang, Shu-Hui Su, Ting-Chen Hsu, Tuo-Hsin Chien, Felix Ying-Kit Tsui, Shi-Min Wu, Yu-Chi Chang
  • Publication number: 20210202761
    Abstract: Various embodiments of the present disclosure are directed towards an integrated circuit (IC) including a pillar structure abutting a trench capacitor. A substrate has sidewalls that define a trench. The trench extends into a front-side surface of the substrate. The trench capacitor includes a plurality of capacitor electrode layers and a plurality of capacitor dielectric layers that respectively line the trench and define a cavity within the substrate. The pillar structure is disposed within the substrate. The pillar structure has a first width and a second width less than the first width. The first width is aligned with the front-side surface of the substrate and the second width is aligned with a first point disposed beneath the front-side surface.
    Type: Application
    Filed: December 27, 2019
    Publication date: July 1, 2021
    Inventors: Hsin-Li Cheng, Jyun-Ying Lin, Alexander Kalnitsky, Shih-Fen Huang, Shu-Hui Su, Ting-Chen Hsu, Tuo-Hsin Chien, Felix Ying-Kit Tsui, Shi-Min Wu, Yu-Chi Chang
  • Patent number: 10693019
    Abstract: Various embodiments of the present application are directed towards a trench capacitor with a high capacitance density. In some embodiments, the trench capacitor overlies the substrate and fills a trench defined by the substrate. The trench capacitor comprises a lower capacitor electrode, a capacitor dielectric layer, and an upper capacitor electrode. The capacitor dielectric layer overlies the lower capacitor electrode and lines the trench. The upper capacitor electrode overlies the capacitor dielectric layer and lines the trench over the capacitor dielectric layer. The capacitor dielectric layer comprises a high ? dielectric material. By using a high ? material for the dielectric layer, the trench capacitor may have a high capacitance density suitable for use with high performance mobile devices.
    Type: Grant
    Filed: August 27, 2018
    Date of Patent: June 23, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hsin-Li Cheng, Jyun-Ying Lin, Jing-Hwang Yang, Ting-Chen Hsu, Felix Ying-Kit Tsui, Yen-Wen Chen
  • Publication number: 20200066922
    Abstract: Various embodiments of the present application are directed towards a trench capacitor with a high capacitance density. In some embodiments, the trench capacitor overlies the substrate and fills a trench defined by the substrate. The trench capacitor comprises a lower capacitor electrode, a capacitor dielectric layer, and an upper capacitor electrode. The capacitor dielectric layer overlies the lower capacitor electrode and lines the trench. The upper capacitor electrode overlies the capacitor dielectric layer and lines the trench over the capacitor dielectric layer. The capacitor dielectric layer comprises a high ? dielectric material. By using a high ? material for the dielectric layer, the trench capacitor may have a high capacitance density suitable for use with high performance mobile devices.
    Type: Application
    Filed: August 27, 2018
    Publication date: February 27, 2020
    Inventors: Hsin-Li Cheng, Jyun-Ying Lin, Jing-Hwang Yang, Ting-Chen Hsu, Felix Ying-Kit Tsui, Yen-Wen Chen
  • Patent number: 9373627
    Abstract: A method includes forming Shallow Trench Isolation (STI) regions to separate a first active region and a second active region of a semiconductor substrate from each other, etching a portion of the STI regions that contacts a sidewall of the second active region to form a recess, and implanting a top surface layer and a side surface layer of the second active region to form an implantation region. The side surface layer of the second active region extends from the sidewall of the second active region into the second active region. An upper portion of the top surface layer and an upper portion of the side surface layer are oxidized to form a capacitor insulator. A floating gate is formed to extend over the first active region and the second active region. The floating gate includes a portion extending into the recess.
    Type: Grant
    Filed: January 19, 2015
    Date of Patent: June 21, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ching-Hung Fu, Chun-Yao Ko, Tuo-Hsin Chien, Ting-Chen Hsu
  • Publication number: 20150349620
    Abstract: A horizontally rotating driving apparatus is connected with a longitudinal rotating shaft and includes a frame, a rotating unit, multiple electromagnetic units and multiple sensor switch units. The frame is mounted on the rotating shaft and has an inner space formed inside the frame. The rotating unit is located in the inner space of the frame and is horizontally and rotatably mounted on the rotating shaft to form a rotation path. The electromagnetic units are disposed in the inner space of the frame and are arranged along the rotation path of the rotating unit. The sensor switch units are mounted in the frame and are disposed in the inner space of the frame at identical intervals. When one of the magnetic portions passes the sensor switch units, the sensor switch units sequentially control the electromagnetic units to start or to stop generating magnetic force and rotate the rotating unit.
    Type: Application
    Filed: November 20, 2014
    Publication date: December 3, 2015
    Inventors: YI-PING HSU, CHIA-MING HSU, TING-CHEN HSU, YU-LIEN HSU CHU, KUN-TIEN WU, CHI-YUAN WU, YING-ZHUN WU
  • Publication number: 20150340932
    Abstract: A gravity-assisted rotating driving apparatus is connected with a horizontal rotating shaft and includes a frame, a pendulum unit, at least one electromagnetic unit, and at least one sensor switch unit. The frame is mounted on the rotating shaft and has an inner space formed inside the frame. The pendulum unit is located in the inner space of the frame and is rotatably mounted on the rotating shaft to form a rotation path. The at least one electromagnetic unit is disposed in the inner space and is arranged along the rotation path. The at least one sensor switch unit is mounted in the frame and is disposed in the inner space. When the pendulum unit passes the adjacent sensor switch unit, the corresponding sensor switch unit controls the corresponding electromagnetic unit to start or stop generating magnetic force and to rotate the pendulum unit.
    Type: Application
    Filed: November 19, 2014
    Publication date: November 26, 2015
    Inventors: Yi-Ping HSU, Chia-Ming HSU, Ting-Chen HSU, Yu-Lien HSU CHU, Kun-Tien WU, Chi-Yuan WU, Ying-Zhun WU
  • Publication number: 20150140752
    Abstract: A method includes forming Shallow Trench Isolation (STI) regions to separate a first active region and a second active region of a semiconductor substrate from each other, etching a portion of the STI regions that contacts a sidewall of the second active region to form a recess, and implanting a top surface layer and a side surface layer of the second active region to form an implantation region. The side surface layer of the second active region extends from the sidewall of the second active region into the second active region. An upper portion of the top surface layer and an upper portion of the side surface layer are oxidized to form a capacitor insulator. A floating gate is formed to extend over the first active region and the second active region. The floating gate includes a portion extending into the recess.
    Type: Application
    Filed: January 19, 2015
    Publication date: May 21, 2015
    Inventors: Ching-Hung Fu, Chun-Yao Ko, Tuo-Hsin Chien, Ting-Chen Hsu
  • Patent number: 8962439
    Abstract: A method of programming a memory cell includes causing a current to flow through a first silicide-containing portion and a second silicide-containing portion of the memory cell; and causing, by the current, an electron-migration effect to form an extended silicide-containing portion within the gap such that the memory cell is converted from a first state into a second state. The memory cell includes a silicon-containing line continuously extending between a first region and a second region; the first silicide-containing portion over the silicon-containing line and adjacent to the first region; and the second silicide-containing portion over the silicon-containing line and adjacent to the second region. The first silicide-containing portion and the second silicide-containing portion are separated by a gap if the memory cell is at the first state. The extended silicide-containing portion extends from the second silicide-containing portion towards the first silicide-containing portion.
    Type: Grant
    Filed: June 11, 2014
    Date of Patent: February 24, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jyun-Ying Lin, Chun-Yao Ko, Ting-Chen Hsu
  • Patent number: 8952442
    Abstract: A method includes forming Shallow Trench Isolation (STI) regions to separate a first active region and a second active region of a semiconductor substrate from each other, etching a portion of the STI regions that contacts a sidewall of the second active region to form a recess, and implanting a top surface layer and a side surface layer of the second active region to form an implantation region. The side surface layer of the second active region extends from the sidewall of the second active region into the second active region. An upper portion of the top surface layer and an upper portion of the side surface layer are oxidized to form a capacitor insulator. A floating gate is formed to extend over the first active region and the second active region. The floating gate includes a portion extending into the recess.
    Type: Grant
    Filed: June 26, 2014
    Date of Patent: February 10, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ching-Hung Fu, Chun-Yao Ko, Tuo-Hsin Chien, Ting-Chen Hsu
  • Publication number: 20140346655
    Abstract: A method of programming a memory cell includes causing a current to flow through a first silicide-containing portion and a second silicide-containing portion of the memory cell; and causing, by the current, an electron-migration effect to form an extended silicide-containing portion within the gap such that the memory cell is converted from a first state into a second state. The memory cell includes a silicon-containing line continuously extending between a first region and a second region; the first silicide-containing portion over the silicon-containing line and adjacent to the first region; and the second silicide-containing portion over the silicon-containing line and adjacent to the second region. The first silicide-containing portion and the second silicide-containing portion are separated by a gap if the memory cell is at the first state. The extended silicide-containing portion extends from the second silicide-containing portion towards the first silicide-containing portion.
    Type: Application
    Filed: June 11, 2014
    Publication date: November 27, 2014
    Inventors: Jyun-Ying LIN, Chun-Yao KO, Ting-Chen HSU
  • Publication number: 20140308798
    Abstract: A method includes forming Shallow Trench Isolation (STI) regions to separate a first active region and a second active region of a semiconductor substrate from each other, etching a portion of the STI regions that contacts a sidewall of the second active region to form a recess, and implanting a top surface layer and a side surface layer of the second active region to form an implantation region. The side surface layer of the second active region extends from the sidewall of the second active region into the second active region. An upper portion of the top surface layer and an upper portion of the side surface layer are oxidized to form a capacitor insulator. A floating gate is formed to extend over the first active region and the second active region. The floating gate includes a portion extending into the recess.
    Type: Application
    Filed: June 26, 2014
    Publication date: October 16, 2014
    Inventors: Ching-Hung Fu, Chun-Yao Ko, Tuo-Hsin Chien, Ting-Chen Hsu
  • Patent number: 8853079
    Abstract: A method of forming a device includes forming a silicon-containing line continuously extending between a first node and a second node. A first silicide-containing portion and a second silicide-containing portion are formed over the silicon-containing line. The first silicide-containing portion is separated from the second silicide-containing portion by a predetermined distance, and the predetermined distance is substantially equal to or less than a length of the silicon-containing line.
    Type: Grant
    Filed: January 10, 2014
    Date of Patent: October 7, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jyun-Ying Lin, Chun-Yao Ko, Ting-Chen Hsu
  • Patent number: 8772854
    Abstract: A device includes an active region and a coupling capacitor. The capacitor includes a first floating gate as an upper capacitor plate of the coupling capacitor, and a doped semiconductor region as a lower capacitor plate of the coupling capacitor. The doped semiconductor region includes a surface portion at a surface of the active region, and a sidewall portion lower than a bottom surface of the surface portion. The sidewall portion is on a sidewall of the active region. A capacitor insulator is disposed between the upper capacitor plate and the lower capacitor plate. The capacitor insulator includes an upper portion, and a sidewall portion lower than a bottom surface of the upper portion.
    Type: Grant
    Filed: April 2, 2012
    Date of Patent: July 8, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ching-Hung Fu, Chun-Yao Ko, Tuo-Hsin Chien, Ting-Chen Hsu