Abstract: A semiconductor device and a method of forming the same is disclosed. The semiconductor device includes a substrate, a first well region disposed within the substrate, a second well region disposed adjacent to the first well region and within the substrate, and an array of well regions disposed within the first well region. The first well region includes a first type of dopants, the second well region includes a second type of dopants that is different from the first type of dopants, and the array of well regions include the second type of dopants. The semiconductor device further includes a metal silicide layer disposed on the array of well regions and within the substrate, a metal silicide nitride layer disposed on the metal silicide layer and within the substrate, and a contact structure disposed on the metal silicide nitride layer.

Abstract: Methods and devices are provided for focusing and/or sorting activated T cells. The device comprises a microfluidic channel comprising a plurality of electrodes arranged to provide dielectrophoretic (DEP) forces that are perpendicular to forces from hydrodynamic flows along the channel. The device may be configured to apply voltages to a plurality of electrodes in a first upper region of the microfluidic channel to focus the cells into a single flow, and to apply different voltages to a plurality of electrodes in a second downstream region of the microfluidic channel to sort cells based on size. The output of the microfluidic channel may diverge into multiple channels, wherein cells of various sorted sizes are directed into the appropriate output channel.

Abstract: Methods and devices are provided for focusing and/or sorting activated T cells. The device comprises a microfluidic channel comprising a plurality of electrodes arranged to provide dielectrophoretic (DEP) forces that are perpendicular to forces from hydrodynamic flows along the channel. The device may be configured to apply voltages to a plurality of electrodes in a first upper region of the microfluidic channel to focus the cells into a single flow, and to apply different voltages to a plurality of electrodes in a second downstream region of the microfluidic channel to sort cells based on size. The output of the microfluidic channel may diverge into multiple channels, wherein cells of various sorted sizes are directed into the appropriate output channel.

Abstract: In certain embodiments this invention provides a pulsed-laser triggered microfluidic switching mechanism that can achieve a switching time of 70 ?s. This switching speed is two orders of magnitude shorter than that of the fastest switching mechanism utilized in previous ?FACS.

Abstract: This invention provides novel tools for surgery on single cells. In certain embodiments the tools comprise a microcapillary having at and/or near the tip a metal coating or a plurality of nanoparticles that can be heated by application of electromagnetic energy. In certain embodiments substrates are provided that facilitate the introduction of agents into cells. The substrates typically comprise a surface bearing a film or particles or nanoparticles that can be heated by application of electromagnetic energy.

Abstract: In certain embodiments this invention provides a pulsed-laser triggered microfluidic switching mechanism that can achieve a switching time of 70 ?s. This switching speed is two orders of magnitude shorter than that of the fastest switching mechanism utilized in previous ?FACS.