Abstract: A sponge sleeve installation appliance for installing a sponge sleeve onto a roller has an elongated socket body including a sleeve portion and a tapered portion. The sleeve portion has an outer circular diameter slightly larger than an inner diameter of the sponge sleeve which when not deformed defines an interior space for accommodating at least part of the roller inserted from a bottom of the sleeve portion. The tapered portion has a cone shape with a bottom connected to a top of the sleeve portion which protrudes and tapers off from the sleeve portion in a longitudinal direction of the sleeve portion.

Abstract: A cleaning device for cleaning the dirt is disclosed. The cleaning device includes a container for receiving the cleaning material therein, a permeating element disposed in the container for introducing the cleaning material, and a cleaning head mounted on one end of the container and connecting with the permeating element for cleaning the dirt.

Abstract: A sponge sleeve installation appliance for installing a sponge sleeve on a roller is disclosed. The appliance comprises a longitudinal socket body and a base. The longitudinal socket body includes a sleeve portion and a tapered portion, both being longitudinally continued. The sleeve portion is of an outer circular diameter slightly larger than the inner diameter of the sponge sleeve of an unexpanded status and internally defines a receiving space permitting the insertion of the roller from one end of the sleeve portion and accommodating at least part of the roller. With the above simple structure, the sponge sleeve can be easily slipped onto the roller.

Abstract: A preventive maintenance method and apparatus for quickly and precisely replacing a backing-film of a CMP machine is provided. In comparison with a conventional backing-film, the backing-film according to the present invention is pre-drilled by laser in order to bypass the restriction set by a conventional manual drilling process on the backing-film. In addition, a PM apparatus for the backing-film comprises an aligning panel having a plural first pins in order to quickly check whether drilled holes of the backing-film are aligned with the corresponding air holes or not. Therefore, the CMP machine down time due to the PM can be reduced.

Abstract: A preventive maintenance method and apparatus for quickly and precisely replacing a backing-film of a CMP machine is provided. In comparison with a conventional backing-film, the backing-film according to the present invention is pre-drilled by laser in order to bypass the restriction set by a conventional manual drilling process on the backing-film. In addition, a PM apparatus for the backing-film comprises an aligning panel having a plural first pins in order to quickly check whether drilled holes of the backing-film are aligned with the corresponding air holes or not. Therefore, the CMP machine down time due to the PM can be reduced.