Abstract: The present invention provides a wafer pedestal for holding a semiconductor wafer that includes a pedestal body of essentially a metal disc and at least three insulating spacers that are situated on a top surface of the pedestal body for supporting and insulating a silicon wafer on and from the pedestal body. A wafer may be suitably supported by the insulating plugs such that no concentrated electric field will form on the wafer surface at or near the insulating plugs to cause arcing and furthermore, the wafer is supported sufficiently away from the pedestal body such that any subsequent film depositions does not adhere the wafer to the pedestal body.