Abstract: The invention relates to a vacuum system, comprising a vacuum pump, preferably turbomolecular pump, and at least one vacuum chamber, wherein the vacuum pump comprises: at least a first and a second inlet and a common outlet; at least a first and a second pumping stage, each pumping stage comprising at least one rotor element being arranged on a common rotor shaft, wherein the first inlet is connected to an upstream end of the first pumping stage and the second inlet is connected to an upstream end of the second pumping stage; a direction element for preventing a gas flow from a downstream end of the first pumping stage to the second inlet; a conduit having a conduit inlet and a conduit outlet, wherein the conduit inlet is connected to the downstream end of the first pumping stage and the conduit outlet is connected to a location downstream of the second pumping stage; wherein the first inlet and the second inlet of the pump are connected to the same vacuum chamber.

Abstract: The invention relates to a vacuum system, comprising a vacuum pump, preferably turbomolecular pump, and at least one vacuum chamber, wherein the vacuum pump comprises: at least a first and a second inlet and a common outlet; at least a first and a second pumping stage, each pumping stage comprising at least one rotor element being arranged on a common rotor shaft, wherein the first inlet is connected to an upstream end of the first pumping stage and the second inlet is connected to an upstream end of the second pumping stage; a direction element for preventing a gas flow from a downstream end of the first pumping stage to the second inlet; a conduit having a conduit inlet and a conduit outlet, wherein the conduit inlet is connected to the downstream end of the first pumping stage and the conduit outlet is connected to a location downstream of the second pumping stage; wherein the first inlet and the second inlet of the pump are connected to the same vacuum chamber.

Abstract: A vacuum pump includes at least one vacuum port for releasably connecting the vacuum pump with at least one recipient an elastomeric seal for sealing the vacuum port against atmosphere a diaphragm gland provided on a vacuum side of the vacuum port and at least one of at least one suction channel and at least one suction opening provided between the elastomeric seal and the diaphragm gland.

Abstract: The invention relates to a vacuum pump having at least one molecular pump stage, in particular a Holweck stage, which includes a rotor member which forms the pump-active surface of the molecular pump stage and having at least one side channel pump stage which is arranged downstream of the molecular pump stage and which includes a plurality of rotor elements, wherein the rotor elements of the side channel pump stage are supported by the rotor member of the molecular pump stage. The invention further relates to a vacuum pump having at least one molecular pump stage, in particular a Holweck stage, and having at least one side channel pump stage which is arranged downstream of the molecular pump stage and which includes a plurality of rotor elements, wherein the side channel pump stage is arranged between a pump inlet and the molecular pump stage.

Abstract: A vacuum pump includes a housing having an axial inlet a pumping unit including a stator, a rotor rotatably supported in the stator, and a drive for driving the rotor. At least one housing part which has at least one outlet, is placed on the housing in an axial direction and is connected with the housing.

Abstract: A vacuum pump includes at least one vacuum port for releasably connecting the vacuum pump with at least one recipient an elastomeric seal for sealing the vacuum port against atmosphere a diaphragm gland provided on a vacuum side of the vacuum port and at least one of at least one suction channel and at least one suction opening provided between the elastomeric seal and the diaphragm gland.

Abstract: A vacuum system includes at least one recipient having a housing and at least one outlet opening for evacuating the recipient, a vacuum pump connected with the at least one outlet opening of the at least one recipient for evacuating same, an attachment provided between the vacuum pump and the recipient housing and formed as an intermediate piece, with the attachment being fixedly and vacuum-tightly secured on the recipient, and the vacuum pump being fixedly and releasably secured to the attachment at an end of the attachment opposite the recipient, and at least one O-ring sealing provided between the attachment end opposite the recipient and the vacuum pump for sealing the vacuum pump, with the O-ring sealing being formed as an elastomeric O-ring.

Abstract: A vacuum pump that includes a housing, a control unit including control elements for controlling electronic and electrical components located in the inner chamber of the housing, and a separation member for separating the inner chamber in which an underpressure prevails, from an environment in which the vacuum pump is located and including a printed circuit board having elements for conducting electrical current and voltage in the inner chamber of the pump housing.

Abstract: A pumping system for evacuating gas from a plurality of chambers, includes at least one turbomolecular pump, at least two fore-vacuum pumps, at least one connection conduit extending between the at least two fore-vacuum pumps. and at least one transverse constriction for at least one of reducing and regulating gas flow.

Abstract: A foil shield for covering at least one opening of a suction flange of a vacuum pump includes at least one member formed of a material having a relative permeability ?r greater than 1,000.

Abstract: A vacuum pump includes a housing, a rotor located in the housing and having a shaft and pump-active elements supported on the shaft, a stator having pump-active elements and located in a separate housing part of the housing, for driving the pump, bearings for rotatably supporting the rotor shaft, and at least one vacuum chamber also located in the separate housing part.

Abstract: An arrangement for supporting a shaft of a vacuum pump includes a first bearing for supporting the shaft at one of its end, a second bearing for supporting the shaft at another of its ends and formed as a rolling bearing, a holder for receiving the second bearing and including an oscillating base, a fixation member secured in the vacuum pump housing, metallic connection members for connecting the oscillating base with the fixation member and axial springs arranged between the oscillating base and the fixation member and providing for the axial stiffness of the holder which is greater than its radial stiffness thereof and greater than the axial stiffness of the first bearing.

Abstract: An arrangement for supporting a shaft of a vacuum pump includes a first bearing for supporting the shaft at one of its end, a second bearing for supporting the shaft at another of its ends and formed as a rolling bearing, a holder for receiving the second bearing and including an oscillating base, a fixation member secured in the vacuum pump housing, metallic connection members for connecting the oscillating base with the fixation member and axial springs arranged between the oscillating base and the fixation member and providing for the axial stiffness of the holder which is greater than its radial stiffness thereof and greater than the axial stiffness of the first bearing.

Abstract: A vacuum pump includes a housing, a rotor located in the housing and having a shaft and pump-active elements supported on the shaft, a stator having pump-active elements and located in a separate housing part of the housing, for driving the pump, bearings for rotatably supporting the rotor shaft, and at least one vacuum chamber located in the housing.

Abstract: A vacuum pump that includes a housing, a control unit including control elements for controlling electronic and electrical components located in the inner chamber of the housing, and a separation member for separating the inner chamber in which an underpressure prevails, from an environment in which the vacuum pump is located and including a printed circuit board having elements for conducting electrical current and voltage in the inner chamber of the pump housing.

Abstract: A stator disc for a turbomolecular pump has an inner ring (3), an outer ring (4), and a plurality of vanes (2) formed of a stator disc plane, extending between the inner and outer rings (3, 4), and having, in connection regions of the vanes with the inner and outer rings, respective radial webs (5) a circumferential width (S) of which is smaller than a vane width (T).

Abstract: A foil shield for covering at least one opening of a suction flange of a vacuum pump includes at least one member formed of a material having a relative permeability ?r greater than 1,000.

Abstract: A disc for a turbomolecular pump formed of a plurality of disc elements assembled in an axial direction and each having a support ring, a plurality of vanes supported on the support ring and inclined to a plane of the support ring, and a plurality of radially extending slots provided between the vanes, with the support rings of the disc elements forming the support ring of the disc, the vanes of the disc elements forming the disc vanes, and the radial slots provided between the vanes of the disc elements forming the radially extending slots between the disc vanes, and with the vanes of one of disc elements least partially covering the radially extending slots of an adjacent disc element.