Patents by Inventor Tobrjörn Sandström

Tobrjörn Sandström has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and device manufacturing method
    Patent number: 7460208
    Abstract: A lithographic apparatus provided with an array of individually controllable elements that is detachably mounted to mounting points on a support frame of the lithographic apparatus.
    Type: Grant
    Filed: February 18, 2005
    Date of Patent: December 2, 2008
    Assignee: ASML Netherlands B.V.
    Inventors: Arno Jan Bleeker, Dominicus Jacobus Petrus Adrianus Franken, Martinus Hendricus Hendricus Hoeks, Lambertus Gerardus Maria Kessels, Tobrjörn Sandström