Abstract: Cleaning of MBE vacuum chambers of residue containing a volatile material, such as red phosphorus, is safely achieved by wetting the residue with de-ionized water (37) and depositing the residue in a water bath, formed by the water at the bottom of the chamber, to form a slurry. The slurry is vacuumed (1 & 30) from the chamber and collected (44) within the canister (3) of the vacuum cleaner. The water precludes ignition of the red phosphorus during cleaning of the chamber and during collection within the canister of the vacuum cleaner.

Abstract: A method for cleaning phosphorus from a MBE vacuum chamber by freezing the panel (22) placed within the vacuum chamber (10) onto which excess phosphorus is deposited. The panel is connected to a source of cold nitrogen (24) which cools the panel. Water is introduced after the panels are cooled so as to form a layer of ice on top of the phosphorus. The panel may then be removed for cleaning with ice covering the phosphorus without danger of ignition of the phosphorus.

Abstract: A containment system (1) for use in cleaning of an MBE chamber contains a two part housing in a clam-shell like structure with upper (5) and lower (7) housing sections that are latched together (8) with the walls defining a containment region. The housing is secured to the face of the MBE chamber with the source flange cover of that chamber received through an opening in the rear wall (13 & 19). A closure (28) permits opening or closing a front access opening in the housing through which the containment region may be accessed. The housing includes a exhaust vent tube (11). The containment system includes the means for detecting fire (34) in the confinement region and extinguishing the fires (35) and exhausting any gases through the vent tube.

Abstract: An apparatus is set forth including a forward and rearward support roller orthogonally and rotatably mounted upon spaced rails. The rear support roller includes a rear belt member rotatably mounted therewith and cooperative with a forward pulley. The forward pulley is fixedly mounted to a cylindrical support shaft rotatably mounted within an adapted block mounted between the forward and rear support roller upon the right frame rail. The support shaft includes a mounted bi-polar magnetic cylinder to effect resistance during rotation of the cylinder relative to the right frame rail. The cylinder includes a further cylinder adapter securable thereto to enhance magnetic attraction between the frame rail and the cylinder and further cylinder. Alternatively, a weight member may be mounted to a forward portion of the support shaft.