Patents by Inventor Todd Lewis MacEachern

Todd Lewis MacEachern has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Platen support structure
    Patent number: 10032601
    Abstract: A platen support structure adapted to thermally insulate a heated platen portion from a cold base plate while providing substantially leak-free gas transport therebetween and while allowing thermal expansion and contraction of the platen portion. Various examples provide of the support structure provide a tubular flexure having an internal gas conduit, a platen portion mounting tab connected to the flexure and having an internal gas input slot that is in fluid communication with the internal gas conduit of the flexure, the platen portion mounting tab being adapted for connection to a platen portion of a platen, and a base plate mounting tab connected to the flexure and having an internal gas output slot that is in fluid communication with the internal gas conduit of the flexure, the base plate mounting tab being adapted for connection to a base plate of the platen.
    Type: Grant
    Filed: February 21, 2014
    Date of Patent: July 24, 2018
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Roger B. Fish, Steven Anella, Todd Lewis MacEachern
  • PLATEN SUPPORT STRUCTURE
    Publication number: 20150243470
    Abstract: A platen support structure adapted to thermally insulate a heated platen portion from a cold base plate while providing substantially leak-free gas transport therebetween and while allowing thermal expansion and contraction of the platen portion. Various examples provide of the support structure provide a tubular flexure having an internal gas conduit, a platen portion mounting tab connected to the flexure and having an internal gas input slot that is in fluid communication with the internal gas conduit of the flexure, the platen portion mounting tab being adapted for connection to a platen portion of a platen, and a base plate mounting tab connected to the flexure and having an internal gas output slot that is in fluid communication with the internal gas conduit of the flexure, the base plate mounting tab being adapted for connection to a base plate of the platen.
    Type: Application
    Filed: February 21, 2014
    Publication date: August 27, 2015
    Applicant: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Roger B. Fish, Steven Anella, Todd Lewis MacEachern