Abstract: This invention provides an electrode for a polymer electrolyte fuel cell which fuel cell contains: a solid polymer electrolyte membrane; electrode layers formed respectively on both faces of the electrolyte membrane; two reinforcing members which cover respective outer surfaces of the electrode layers; and a sealing member which covers, extending from respective end faces to respective end parts of the reinforcing members, whole peripheries of the two reinforcing members, wherein the electrolyte membrane, the electrode layers and the reinforcing members are integrally formed by the sealing member.

Abstract: An object of the present invention is to provide a highly durable solid polymer electrolyte that has a deterioration resistance equal to or higher than that of the fluorine-containing solid polymer electrolytes or a deterioration resistance sufficient for practical purposes, and can be produced at a low cost. According to the present invention, there is provided a solid polymer electrolyte comprising a polyether ether sulfone that is used as an electrolyte and has sulfoalkyl groups bonded to its aromatic rings and represented by the general formula —(CH2)n—SO3H.

Abstract: The object of this invention is to provide an electrode for a polymer electrolyte fuel cell, a separator therefor, a polymer electrolyte fuel cell and a generating system, which electrode is simplified in structure, have high handling property, can be transferred precisely to a predetermined position, and enables automation of a production process. This invention provides an electrode for a polymer electrolyte fuel cell which electrode contains: a solid polymer electrolyte membrane; electrode layers formed respectively on both faces of the electrolyte membrane; two reinforcing members which cover respective outer surfaces of the electrode layers; and a sealing member which covers, extending from respective end faces to respective end parts of the reinforcing members, whole peripheries of the two reinforcing members, wherein the electrolyte membrane, the electrode layers and the reinforcing members are integrally formed by the sealing member.

Abstract: The object of this invention is to provide a solid polymer electrolyte which is excellent in durability and of low cost, and membranes, solutions for electrode catalyst coating, membrane/electrode assemblies and fuel cells which use the electrolyte. According to this invention, there can be provided a fuel cell which comprises an electrode assembly having an electrode catalyst membrane formed therein, said catalyst membrane comprising a polymer electrolyte membrane held between an anode on one side of the principal plane of the electrolyte membrane and a cathode on the other side of the principal lane thereof, current collecting plates provided each independently in close contact, to the anode side and the cathode side of the electrode assembly, and electroconductive separators having gas supply passages to the anode and to the cathode provided on the outside surfaces of the current collecting plates.

Abstract: The object of this invention is to provide an electrode for a polymer electrolyte fuel cell, a separator therefor, a polymer electrolyte fuel cell and a generating system, which electrode is simplified in structure, have high handling property, can be transferred precisely to a predetermined position, and enables automation of a production process. This invention provides an electrode for a polymer electrolyte fuel cell which electrode contains: a solid polymer electrolyte membrane; electrode layers formed respectively on both faces of the electrolyte membrane; two reinforcing members which cover respective outer surfaces of the electrode layers; and a sealing member which covers, extending from respective end faces to respective end parts of the reinforcing members, whole peripheries of the two reinforcing members, wherein the electrolyte membrane, the electrode layers and the reinforcing members are integrally formed by the sealing member.

Abstract: The object of this invention is to provide a solid polymer electrolyte which is excellent in durability and of low cost, and membranes, solutions for electrode catalyst coating, membrane/electrode assemblies and fuel cells which use the electrolyte. According to this invention, there can be provided a fuel cell which comprises an electrode assembly having an electrode catalyst membrane formed therein, said catalyst membrane comprising a polymer electrolyte membrane held between an anode on one side of the principal plane of the electrolyte membrane and a cathode on the other side of the principal lane thereof, current collecting plates provided each independently in close contact, to the anode side and the cathode side of the electrode assembly, and electroconductive separators having gas supply passages to the anode and to the cathode provided on the outside surfaces of the current collecting plates.

Abstract: The object of this invention is to provide a solid polymer electrolyte which is excellent in durability and of low cost, and membranes, solutions for electrode catalyst coating, membrane/electrode assemblies and fuel cells which use the electrolyte. According to this invention, there can be provided a fuel cell which comprises an electrode assembly having an electrode catalyst membrane formed therein, said catalyst membrane comprising a polymer electrolyte membrane held between an anode on one side of the principal plane of the electrolyte membrane and a cathode on the other side of the principal lane thereof, current collecting plates provided each independently in close contact, to the anode side and the cathode side of the electrode assembly, and electroconductive separators having gas supply passages to the anode and to the cathode provided on the outside surfaces of the current collecting plates.

Abstract: The object of this invention is to provide a solid polymer electrolyte which is excellent in durability and of low cost, and membranes, solutions for electrode catalyst coating, membrane/electrode assemblies and fuel cells which use the electrolyte. According to this invention, there can be provided a fuel cell which comprises an electrode assembly having an electrode catalyst membrane formed therein, said catalyst membrane comprising a polymer electrolyte membrane held between an anode on one side of the principal plane of the electrolyte membrane and a cathode on the other side of the principal lane thereof, current collecting plates provided each independently in close contact, to the anode side and the cathode side of the electrode assembly, and electroconductive separators having gas supply passages to the anode and to the cathode provided on the outside surfaces of the current collecting plates.

Abstract: An object of the present invention is to provide a highly durable solid polymer electrolyte that has a deterioration resistance equal to or higher than that of the fluorine-containing solid polymer electrolytes or a deterioration resistance sufficient for practical purposes, and can be produced at a low cost. According to the present invention, there is provided a solid polymer electrolyte comprising a polyether ether sulfone that is used as a electrolyte and has sulfoalkyl groups bonded to its aromatic rings and represented by the general formula —(CH2)n—SO3H.

Abstract: Disclosure is concerned with a small type fuel cell for a power source of portable electronic appliances, particularly to a fuel cell using liquid fuel such as methanol etc., an electronic appliance, and a method of doing business. The fuel cell characterized by having a circulating container for supplying liquid fuel of a predetermined concentration to the fuel cell and for recovering and storing the liquid fuel discharged from the fuel cell, wherein the circulating container is replaceable.

Abstract: An object of the present invention is to provide a highly durable solid polymer electrolyte that has a deterioration resistance equal to or higher than that of the fluorine-containing solid polymer electrolytes or a deterioration resistance sufficient for practical purposes, and can be produced at a low cost. According to the present invention, there is provided a solid polymer electrolyte comprising a polyether ether sulfone that is used as an electrolyte and has sulfoalkyl groups bonded to its aromatic rings and represented by the general formula —(CH2)n—SO3H.

Abstract: A method of manufacturing a semiconductor device includes forming a first interlayer insulation film on a semiconductor substrate, depositing a first metal film on the first interlayer insulation film, depositing an antireflection film including a dielectric layer on an upper surface of the first metal film, patterning the first metal film and the antireflection film to form a lower electrode having the antireflection film on an upper surface thereof, forming a second interlayer insulation film on the antireflection film, forming first and second openings in a first region and in a second region in the second interlayer insulation film, respectively, removing a portion of the antireflection film where the second opening is formed, depositing a second metal film on the second interlayer insulation film, and removing the second metal film except in the first and second openings to form an upper electrode in the first opening, and a contact in the second opening.

Abstract: A sample (1) is mounted on a stage (11) with an analysis plate (2) interposed therebetween. A recess (2c) is provided in a main surface (2b) of the analysis plate (2), and a protrusion (2d) functioning as a solid immersion lens is provided on a bottom surface (2ca) of the recess (2c). The protrusion (2d) does not protrude from the main surface (2b) of the analysis plate (2). Because of provision of the analysis plate (2) which includes a solid immersion lens and is separate from the sample (1), an analysis range can be changed. Further, since the protrusion (2d) does not protrude from the main surface (2b) of the analysis plate (2), the sample (1) can be stably mounted on the stage (11) with the analysis plate (2) interposed therebetween.

Abstract: The object of this invention is to provide an electrode for a polymer electrolyte fuel cell, a separator therefor, a polymer electrolyte fuel cell and a generating system, which electrode is simplified in structure, have high handling property, can be transferred precisely to a predetermined position, and enables automation of a production process.

Abstract: The object of this invention is to provide an electrode for a polymer electrolyte fuel cell, a separator therefor, a polymer electrolyte fuel cell and a generating system, which electrode is simplified in structure, have high handling property, can be transferred precisely to a predetermined position, and enables automation of a production process.

Abstract: A processing technique of a semiconductor substrate which can improve a capability of a solid immersion lens in case of processing the semiconductor substrate and forming the solid immersion lens on its surface is provided.

Abstract: A recessed portion 4 is formed on a main surface 3a of a semiconductor substrate 1 of a semiconductor device 10. A convex portion 5 with a partial spherical surface, functioning as solid immersion lens, is formed on a bottom surface of the recessed portion 4. An angle &thgr;1 formed between a side surface 4b of the recessed portion 4 and the main surface 3a of the semiconductor substrate 1 is larger than 90°. This makes it possible to reduce an amount of an analysis light 20 interrupted by the semiconductor substrate 1 when analysis light 20 is used in reverse surface analysis of the semiconductor device 10. Accordingly, the distance between the surface of the convex portion 5 and the side surface 4b of the recessed portion 4 can be reduced, and the time required for machining the semiconductor substrate can be reduced.

Abstract: For the formation of a first aluminum interconnect line (3) serving as a lower electrode of a MIM capacitor element, an antireflection film (4) having a two-layer structure of a TiN layer (41) and a SiON layer (42) is used. The SiON layer (42) of the antireflection film (4) is utilized as-is as a dielectric layer of the MIM capacitor element. An upper electrode (81) and a contact plug (82) are formed by the same process. Since the upper surfaces of the upper electrode (81) and the contact plug (82) are at the same level, an electrical contact can be easily provided between a second aluminum interconnect line (10) and each of the upper electrode (81) and the lower electrode (first aluminum interconnect line (3)) of the MIM capacitor element. Accordingly, the MIM capacitor element and contacts to the upper and lower electrodes of the MIM capacitor element can be formed through simple processes.

Abstract: A scanning probe microscope includes a laser diode (1a) as a light source for emitting light lower in energy level than band gap of semiconductor as a sample. Laser light (2) emitted therefrom should be of wavelength larger in value than a wavelength &lgr; calculated as follows: &lgr;=h·c/Eg where h is Planck's constant, c represents speed of light and Eg represents band gap. When the semiconductor as a sample is silicon, the band gap thereof is 1.12 eV, thus calculating the wavelength &lgr; at 1.107 &mgr;m. The laser diode (1a) should be such that the laser light (2) emitted therefrom is of wavelength larger in value than &lgr;. It is therefore allowed to avoid emission of light higher in energy level than the band gap of silicon as a sample and eventually, avoid generation of photoelectric current in the sample.

Abstract: A failure analysis device and a failure analysis method which enable easily a specification of a position of a failure point which is obtained from a back side upon a wiring pattern image which is obtained from a front side is provided.