Abstract: An exhaust system includes an entrapment vacuum pump equipped with a refrigerator, a master compressor which is driven in a driving frequency band to make constant a pressure difference between gas recovered from the refrigerator via a low-pressure gas recovery pipe and compressed gas supplied to the refrigerator via a high-pressure gas supply pipe, and a first sub-compressor which is driven at a predetermined driving frequency to supply compressed gas at a first gas volume to the refrigerator via a high-pressure gas supply pipe from gas recovered from the refrigerator via a low-pressure gas recovery pipe.

Abstract: A cryotrap which is set in a vacuum vessel, and has an exhaust panel which condenses and exhausts a gas by cooling, and a cooling stage which is connected to a refrigerator and thereby cooled, includes a cooling storage body fixed on a cooling stage while maintaining thermal contact with it, and a mechanism which thermally connects/disconnects the cooling storage body 6 and the exhaust panel. The mechanism which performs thermal connection/disconnection has a movable unit which has a good heat conductivity and can come into contact with and separate from the exhaust panel and the cooling storage body.

Abstract: A cryopump apparatus includes a sensor which detects at least one of the temperature and pressure in a cryopump, a controller which detects a change in at least one of the temperature and pressure in the cryopump on the basis of the detection result obtained by the sensor, thereby determining the connection state between the controller and the cryopump, and a display device which displays an abnormal point for the cryopump estimated from the determination result obtained by the controller.