Abstract: An energy meter apparatus includes a sensing unit including a first temperature sensor configured to measure temperature of the fluid at a first boundary of the system and a processing-reporting unit comprising a second temperature sensor configured to measure temperature of the fluid at a second boundary of the system. One or both of a flow sensor and a pressure sensor is included in one of the sensing unit and the processing-reporting unit, and the pressure sensor is included in one of the sensing units and the processing-reporting unit. The processing-reporting unit is configured to establish and maintain a first wireless communication channel for communication with the sensing unit. The sensing unit is configured to report sensor measurements to the processing-reporting unit via the wireless communication channel.

Abstract: A method comprises providing a semiconductor structure comprising a substrate and a nanowire above the substrate. The nanowire comprises a first semiconductor material and extends in a vertical direction of the substrate. A material layer is formed above the substrate. The material layer annularly encloses the nanowire. A first part of the nanowire is selectively removed relative to the material layer. A second part of the nanowire is not removed. A distal end of the second part of the nanowire distal from the substrate is closer to the substrate than a surface of the material layer so that the semiconductor structure has a recess at the location of the nanowire. The distal end of the nanowire is exposed at the bottom of the recess. The recess is filled with a second semiconductor material. The second semiconductor material is differently doped than the first semiconductor material.