Patents by Inventor Tom Karlicek

Tom Karlicek has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8847561
    Abstract: An apparatus, system and method are described that enable an impedance of a plasma load to be matched with a power generator. In some embodiments the apparatus includes a power output adapted to apply power that is utilized to energize a plasma; a sensor adapted to sample power applied at the power output so as to obtain power samples; and an impedance control output configured to provide, responsive to the power samples, an impedance-control signal that enables an impedance matching network connected to the output of the power generator and to the impedance control output to match, responsive to the an impedance-control signal, the impedance of the plasma to the operating impedance of the power generator.
    Type: Grant
    Filed: December 14, 2008
    Date of Patent: September 30, 2014
    Assignee: Advanced Energy Industries, Inc.
    Inventors: Tom Karlicek, Gideon J. van Zyl, Lane Sanford
  • Publication number: 20090278512
    Abstract: An apparatus, system and method are described that enable an impedance of a plasma load to be matched with a power generator. In some embodiments the apparatus includes a power output adapted to apply power that is utilized to energize a plasma; a sensor adapted to sample power applied at the power output so as to obtain power samples; and an impedance control output configured to provide, responsive to the power samples, an impedance-control signal that enables an impedance matching network connected to the output of the power generator and to the impedance control output to match, responsive to the an impedance-control signal, the impedance of the plasma to the operating impedance of the power generator.
    Type: Application
    Filed: December 14, 2008
    Publication date: November 12, 2009
    Inventors: Tom Karlicek, Gideon J. van Zyl, Lane Sanford