Patents by Inventor Tom Marivoet

Tom Marivoet has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11912148
    Abstract: A method is provided for managing energy. The method comprises collecting information relating to amounts of energy stored by a plurality of members of a group, and relating to energy requirements of the members. The method further comprises determining a price for distributing energy to a non-member of the group, determining whether to supply energy stored by the members to the non-member at the determined price, and issuing instructions to distribute energy upon determining that energy stored by the plurality of members should be supplied to the non-member.
    Type: Grant
    Filed: June 10, 2015
    Date of Patent: February 27, 2024
    Assignee: SONY CORPORATION
    Inventors: Tom Hostyn, Philip Marivoet, Yoeri Apts, Christopher Rutherford, Vanessa Schelkens, Dimitri Torfs, Francis Van Aeken
  • Patent number: 11892493
    Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.
    Type: Grant
    Filed: October 7, 2020
    Date of Patent: February 6, 2024
    Assignee: KLA Corporation
    Inventors: Tom Marivoet, Carl Truyens, Christophe Wouters
  • Publication number: 20230393185
    Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.
    Type: Application
    Filed: August 14, 2023
    Publication date: December 7, 2023
    Inventors: Tom Marivoet, Carl Truyens, Christophe Wouters
  • Patent number: 11726126
    Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.
    Type: Grant
    Filed: December 10, 2021
    Date of Patent: August 15, 2023
    Assignee: KLA Corporation
    Inventors: Tom Marivoet, Carl Truyens, Christophe Wouters
  • Publication number: 20220099725
    Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.
    Type: Application
    Filed: December 10, 2021
    Publication date: March 31, 2022
    Inventors: Tom Marivoet, Carl Truyens, Christophe Wouters
  • Patent number: 11105839
    Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.
    Type: Grant
    Filed: November 2, 2020
    Date of Patent: August 31, 2021
    Assignee: KLA Corporation
    Inventors: Tom Marivoet, Carl Truyens, Christophe Wouters
  • Patent number: 10935503
    Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.
    Type: Grant
    Filed: June 17, 2019
    Date of Patent: March 2, 2021
    Assignee: KLA Corporation
    Inventors: Tom Marivoet, Carl Truyens, Christophe Wouters
  • Publication number: 20210048396
    Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.
    Type: Application
    Filed: November 2, 2020
    Publication date: February 18, 2021
    Inventors: Tom Marivoet, Carl Truyens, Christophe Wouters
  • Publication number: 20210018450
    Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.
    Type: Application
    Filed: October 7, 2020
    Publication date: January 21, 2021
    Inventors: Tom Marivoet, Carl Truyens, Christophe Wouters
  • Publication number: 20190302033
    Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.
    Type: Application
    Filed: June 17, 2019
    Publication date: October 3, 2019
    Inventors: Tom Marivoet, Carl Truyens, Christophe Wouters
  • Patent number: 10324044
    Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.
    Type: Grant
    Filed: July 1, 2016
    Date of Patent: June 18, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Tom Marivoet, Carl Truyens, Christophe Wouters
  • Patent number: 9638741
    Abstract: A method and apparatus for the inspection of light emitting semiconductor devices. The semiconductor device is illuminated with a light source, wherein at least an area of the light emitting semiconductor is illuminated with a waveband of light. The waveband of light ?A+?B can generate electron-hole pairs in the light emitting semiconductor to be inspected. Through an objective lens at least a part of the light ?C emitted by the light emitting semiconductor is detected. The emitted light is captured with a sensor of a camera that is sensitive to wavelengths of the emitted light, wherein the wavelength of the emitted light is above the width of the waveband. The data of the emitted light, captured with the sensor, are transmitted to a computer system for calculating inspection results of the light emitting semiconductor.
    Type: Grant
    Filed: June 18, 2012
    Date of Patent: May 2, 2017
    Assignee: KLA-Tencor Corporation
    Inventors: Steven Boeykens, Tom Marivoet
  • Publication number: 20160313257
    Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.
    Type: Application
    Filed: July 1, 2016
    Publication date: October 27, 2016
    Inventors: Tom Marivoet, Carl Truyens, Christophe Wouters
  • Publication number: 20130027543
    Abstract: A method and apparatus for the inspection of light emitting semiconductor devices. The semiconductor device is illuminated with a light source, wherein at least an area of the light emitting semiconductor is illuminated with a waveband of light. The waveband of light ?A+?B can generate electron-hole pairs in the light emitting semiconductor to be inspected. Through an objective lens at least a part of the light ?C emitted by the light emitting semiconductor is detected. The emitted light is captured with a sensor of a camera that is sensitive to wavelengths of the emitted light, wherein the wavelength of the emitted light is above the width of the waveband. The data of the emitted light, captured with the sensor, are transmitted to a computer system for calculating inspection results of the light emitting semiconductor.
    Type: Application
    Filed: June 18, 2012
    Publication date: January 31, 2013
    Applicant: KLA-TENCOR CORPORATION
    Inventors: Steven Boeykens, Tom Marivoet