Patents by Inventor Tom Marivoet
Tom Marivoet has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11912148Abstract: A method is provided for managing energy. The method comprises collecting information relating to amounts of energy stored by a plurality of members of a group, and relating to energy requirements of the members. The method further comprises determining a price for distributing energy to a non-member of the group, determining whether to supply energy stored by the members to the non-member at the determined price, and issuing instructions to distribute energy upon determining that energy stored by the plurality of members should be supplied to the non-member.Type: GrantFiled: June 10, 2015Date of Patent: February 27, 2024Assignee: SONY CORPORATIONInventors: Tom Hostyn, Philip Marivoet, Yoeri Apts, Christopher Rutherford, Vanessa Schelkens, Dimitri Torfs, Francis Van Aeken
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Patent number: 11892493Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.Type: GrantFiled: October 7, 2020Date of Patent: February 6, 2024Assignee: KLA CorporationInventors: Tom Marivoet, Carl Truyens, Christophe Wouters
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Publication number: 20230393185Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.Type: ApplicationFiled: August 14, 2023Publication date: December 7, 2023Inventors: Tom Marivoet, Carl Truyens, Christophe Wouters
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Patent number: 11726126Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.Type: GrantFiled: December 10, 2021Date of Patent: August 15, 2023Assignee: KLA CorporationInventors: Tom Marivoet, Carl Truyens, Christophe Wouters
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Publication number: 20220099725Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.Type: ApplicationFiled: December 10, 2021Publication date: March 31, 2022Inventors: Tom Marivoet, Carl Truyens, Christophe Wouters
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Patent number: 11105839Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.Type: GrantFiled: November 2, 2020Date of Patent: August 31, 2021Assignee: KLA CorporationInventors: Tom Marivoet, Carl Truyens, Christophe Wouters
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Patent number: 10935503Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.Type: GrantFiled: June 17, 2019Date of Patent: March 2, 2021Assignee: KLA CorporationInventors: Tom Marivoet, Carl Truyens, Christophe Wouters
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Publication number: 20210048396Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.Type: ApplicationFiled: November 2, 2020Publication date: February 18, 2021Inventors: Tom Marivoet, Carl Truyens, Christophe Wouters
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Publication number: 20210018450Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.Type: ApplicationFiled: October 7, 2020Publication date: January 21, 2021Inventors: Tom Marivoet, Carl Truyens, Christophe Wouters
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Publication number: 20190302033Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.Type: ApplicationFiled: June 17, 2019Publication date: October 3, 2019Inventors: Tom Marivoet, Carl Truyens, Christophe Wouters
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Patent number: 10324044Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.Type: GrantFiled: July 1, 2016Date of Patent: June 18, 2019Assignee: KLA-Tencor CorporationInventors: Tom Marivoet, Carl Truyens, Christophe Wouters
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Patent number: 9638741Abstract: A method and apparatus for the inspection of light emitting semiconductor devices. The semiconductor device is illuminated with a light source, wherein at least an area of the light emitting semiconductor is illuminated with a waveband of light. The waveband of light ?A+?B can generate electron-hole pairs in the light emitting semiconductor to be inspected. Through an objective lens at least a part of the light ?C emitted by the light emitting semiconductor is detected. The emitted light is captured with a sensor of a camera that is sensitive to wavelengths of the emitted light, wherein the wavelength of the emitted light is above the width of the waveband. The data of the emitted light, captured with the sensor, are transmitted to a computer system for calculating inspection results of the light emitting semiconductor.Type: GrantFiled: June 18, 2012Date of Patent: May 2, 2017Assignee: KLA-Tencor CorporationInventors: Steven Boeykens, Tom Marivoet
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Publication number: 20160313257Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.Type: ApplicationFiled: July 1, 2016Publication date: October 27, 2016Inventors: Tom Marivoet, Carl Truyens, Christophe Wouters
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Publication number: 20130027543Abstract: A method and apparatus for the inspection of light emitting semiconductor devices. The semiconductor device is illuminated with a light source, wherein at least an area of the light emitting semiconductor is illuminated with a waveband of light. The waveband of light ?A+?B can generate electron-hole pairs in the light emitting semiconductor to be inspected. Through an objective lens at least a part of the light ?C emitted by the light emitting semiconductor is detected. The emitted light is captured with a sensor of a camera that is sensitive to wavelengths of the emitted light, wherein the wavelength of the emitted light is above the width of the waveband. The data of the emitted light, captured with the sensor, are transmitted to a computer system for calculating inspection results of the light emitting semiconductor.Type: ApplicationFiled: June 18, 2012Publication date: January 31, 2013Applicant: KLA-TENCOR CORPORATIONInventors: Steven Boeykens, Tom Marivoet