Patents by Inventor Tom Osterheld

Tom Osterheld has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Combined slurry dispenser and rinse arm
    Patent number: 6280299
    Abstract: The present invention provides a method and apparatus for delivering one or more rinse agents to a surface, such as a polishing pad surface and preferably one or more polishing fluids. The invention also provides a method of cleaning one or more surfaces, such as a polishing pad surface and a substrate surface, by delivering a spray of one or more rinse agents to the surface and, preferably, causing the rinse agent to flow across the surface from a central region to an outer region where unwanted debris and material is collected.
    Type: Grant
    Filed: February 16, 2000
    Date of Patent: August 28, 2001
    Assignee: Applied Materials, Inc.
    Inventors: Daniel Kennedy, Boris Fuksshimov, Victor Belitsky, Boris Fishkin, Kyle Brown, Tom Osterheld, Jeff Beeler, Ginetto Addiego
  • Combined slurry dispenser and rinse arm and method of operation
    Patent number: 6139406
    Abstract: The present invention provides a method and apparatus for delivering one or more rinse agents to a surface, such as a polishing pad surface and preferably one or more polishing fluids. The invention also provides a method of cleaning one or more surfaces, such as a polishing pad surface and a substrate surface, by delivering a spray of one or more rinse agents to the surface and, preferably, causing the rinse agent to flow across the surface from a central region to an outer region where unwanted debris and material is collected.
    Type: Grant
    Filed: June 24, 1997
    Date of Patent: October 31, 2000
    Assignee: Applied Materials, Inc.
    Inventors: Daniel Kennedy, Boris Fuksshimov, Victor Belitsky, Boris Fishkin, Kyle Brown, Tom Osterheld, Jeff Beeler, Ginetto Addiego
  • Polishing pad having a grooved pattern for use in a chemical mechanical polishing system
    Patent number: 5921855
    Abstract: A polishing pad for a chemical mechanical polishing apparatus. The polishing pad includes a plurality of concentric circular grooves uniformly spaced over the polishing surface of the polishing pad.
    Type: Grant
    Filed: May 15, 1997
    Date of Patent: July 13, 1999
    Assignee: Applied Materials, Inc.
    Inventors: Tom Osterheld, Sen-hou Ko