Abstract: A device, system and method for administering radiation therapy to a tissue surface of a patient utilizes an applicator capable of controlled movement and repositioning over a selected area of tissue, under the control of a computer or controller. A servo-controlled manipulator can effect a raster scan of the desired area, such as an area of the skin, and this can be in any desired pattern such as serpentine, spiral, parallel but unidirectional, or irregular patterns. Preferably a third direction of control is included, i.e. a depth direction, with an appropriate form of depth sensor, a signal from which can be used to adjust the radiation source so that radiation of the tissue surface is consistent over varied contoured.