Abstract: An excimer laser system with a fluorine control having a fixed volume inject bottle in which fluorine is injected prior to it being injected into the laser chamber. A manifold and feedback control system is provided to permit precise injection at rates approaching continuous fluorine injection. The system permits the laser to be operated in a small sweet spot as measured by a narrow range of charging voltage.

Abstract: A reliable, modular, production quality narrow-band KrF excimer laser capable of producing 10 mJ laser pulses at 1000 Hz with a bandwidth of about 0.6 pm or less. The present invention is especially suited to long-term round-the-clock operation in the lithographic production of integrated circuits. Improvements over prior art lasers include a single upstream preionizer tube and acoustic baffles. A preferred embodiment includes reduced fluorine concentration, an anode support bar shaped to reduce aerodynamic reaction forces on blower bearings, a modified pulse power system providing faster pulse rise time, an output coupler with substantially increased reflectivity, a line narrowing module with CaF prism beam expanders, a more accurate wavemeter, a laser computer controller programmed with new and improved pulse energy control algorithm.

Abstract: A training device to assist a player in maintaining proper head position and visual contact with a ball, during a swing of a club, racket, or bat, for example. In the preferred embodiment, the present invention includes a mouth piece which is secured by a person's teeth and a spring loaded attachable mechanism clamped to the person's jersey. A cord connects the mouth piece to the attachable mechanism and provides resistance to any head movements which place the cord in tension. Accordingly, the person maintains better head positioning during the swing.

Abstract: An excimer laser with a laser gas containing fluorine in which the fluorine concentration is maintained continuously at or substantially at desired predetermined levels. A real time or substantially real time fluorine monitor provides a feedback signal to a fluorine flow control system which provides continuous fluorine injection flow into the laser chamber to precisely compensate for fluorine depletion and maintain fluorine concentration precisely at desired levels. In a preferred embodiment, fluorine detector which may be a chemical detector periodically measures the fluorine concentration in laser gas discharged from the laser in order to calibrate the real time or substantially real time fluorine monitor. In a second preferred embodiment, the continuous inlet flow is from two gas sources, one containing fluorine, a noble gas and a buffer gas and the other containing only the noble gas and the buffer gas.

Abstract: A method for aligning reflective surfaces in an unstable laser resonator is provided herein. By providing the outwardly facing side of the front mirror of the resonator with a reflective positioning surface (46) having an optical axis (80) coincident with the optical axis (82) of the front mirror (44), alignment procedures are greatly simplified. The alignment method comprises the steps of fabricating a support surface having a support plate (42) and a front reflective surface (44) on its inner surface, the front reflective surface having a primary optical axis (82). A positioning reflective surface (46) is affixed to an outer surface of the support plate, the positioning reflective surface having a secondary optical axis (80) coincident with the primary optical axis. The support plate also has means for securing the support surface to the laser resonator.

Abstract: A gas stable/unstable resonator laser having a folded internal beam path includes a front reflective surface (25) mounted substantially perpendicular to the electrodes (21(1),21(2)), and a rear reflective surface (24) mounted substantially parallel to the front reflective surface. A lower fold reflective surface (26') is mounted substantially adjacent to and at approximately a 45 degree angle with respect to the front reflective surface (25) and an upper fold reflective surface (28') is mounted at approximately a 90 degree angle with respect to the lower fold reflective surface (26'). Light energy (27) is reflected between the front reflective surface and rear reflective surface and subsequently reflects off the lower fold reflective surface (26'). Light energy is then reflected from the lower fold reflective surface (26') to the upper fold reflective surface (28'), passing the light energy substantially perpendicular to the front reflective surface and rear reflective surface.

Abstract: Disclosed is a laser useful in, e.g., photolithography or medical surgery. In one embodiment, the laser comprises a discharge chamber and heat-generating electronics that are enclosed in a baffled enclosure that requires less cooling air to reliably cool the components in the enclosure than previous unbaffled enclosures. A method of reducing the amount of conditioned air is also provided. In a further embodiment, the laser has a heat-exchange system that acts quickly in response to changes in laser gas temperature by adjusting a flow-proportioning valve regulating water flow through a heat exchanger, thereby providing a continuously variable rate of heat exchange through the heat exchanger to maintain the lasing gas temperature constant. Methods of providing a laser beam and of improving the uniformity of a laser beam are disclosed, as are photolithography methods utilizing a laser and method of this invention.

Abstract: A high voltage pulse power generating circuit capable of providing energy recovery is disclosed. The energy efficient pulse generating circuit source comprises a high voltage charge storing element which is periodically discharged into a compressor circuit. An energy recovery circuit coupled to the compressor circuit reverses the polarity of energy dissipated by the pulse power generating circuit and transfers the waste energy back to the power source. In a preferred embodiment, the pulse power generating circuit of the present invention utilizes an SCR switch for periodically discharging the charge storing element. This embodiment of the present invention provides pulses consistently and will not provide even a single missed pulse.

Abstract: An anode and an a cathode in a gas laser, such as an excimer laser, are spaced in a first direction. A voltage difference between these members produces an electrical discharge which ionizes gasses in the laser to react chemically and produce coherent radiation. First and second tubes made from a dielectric material are designed in contradiction to conventional designs by utilizing a constant, larger tube diameter with thicker tube walls. These first and second tubes extend through the laser in a second direction transverse (preferably perpendicular) to the first direction. The anode, the cathode and the tubes extend through the laser in a direction transverse to the first and second directions. The use of a thicker walled, large tube of constant diameter allows the use of a commercial grade polycrystalline aluminum oxide ceramic, rather than ultra pure ceramics.