Patents by Inventor Tomas Polakovic

Tomas Polakovic has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of making thin films
    Patent number: 11885009
    Abstract: A method of making a thin film can include bombarding a substrate with first ions supplied from a first ion beam; and sputtering from a metal sputtering target substantially simultaneously with the bombardment to deposit a metal-ion film onto the substrate, wherein the method is performed without applied heat, and the metal sputtering target comprises one or more of a metal, a transition metal, a semi-metal, alloys thereof and combinations thereof.
    Type: Grant
    Filed: February 12, 2019
    Date of Patent: January 30, 2024
    Assignee: UCHICAGO ARGONNE, LLC
    Inventors: Tomas Polakovic, Valentine Novosad
  • METHOD OF MAKING THIN FILMS
    Publication number: 20200255936
    Abstract: A method of making a thin film can include bombarding a substrate with first ions supplied from a first ion beam; and sputtering from a metal sputtering target substantially simultaneously with the bombardment to deposit a metal-ion film onto the substrate, wherein the method is performed without applied heat, and the metal sputtering target comprises one or more of a metal, a transition metal, a semi-metal, alloys thereof and combinations thereof.
    Type: Application
    Filed: February 12, 2019
    Publication date: August 13, 2020
    Inventors: Tomas Polakovic, Valentine Novosad