Patents by Inventor Tomoaki OBARU

Tomoaki OBARU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE GRIPPING DEVICE
    Publication number: 20240124984
    Abstract: A substrate processing apparatus that supplies a processing liquid to a front surface of a substrate which is rotating, includes: a substrate holder configured to hold the substrate, wherein the substrate holder includes: a gripper configured to come into contact with a periphery of the substrate to grip the substrate; and a base to which the gripper is attached.
    Type: Application
    Filed: October 10, 2023
    Publication date: April 18, 2024
    Inventors: Yusuke HASHIMOTO, Daisuke GOTO, Nobuhiro OGATA, Jiro HIGASHIJIMA, Tomoaki OBARU, Kanta MORI