Abstract: A stacked substrate separation loading apparatus includes: a stacked substrate holding holder configured to hold a stacked glass substrate; a cassette configured to load each sheet of glass substrates separated from the stacked glass substrate; a liquid tank in which the stacked substrate holding holder and the cassette are inserted in liquid; a stacked substrate drive unit configured to drive the stacked substrate holding holder; a stacked substrate positioning unit which positions a height position of the uppermost sheet of the stacked glass substrate; a cassette drive unit configured to drive the cassette; a substrate sliding mechanism configured to push out and separate the glass substrates which are the top sheets of the stacked glass substrate; and a cassette position control unit configured to control the cassette drive unit so that a height position of a loading position of the cassette becomes a height position of the glass substrate.

Abstract: A projection exposure apparatus includes an optical element, and projects a pattern formed on a first object onto a second object to be exposed through a projection optical system for correcting imaging characteristics by controlling the optical element. The projection exposure apparatus includes: a displacement measurement unit configured to measure a displacement of the optical element; a storage unit configured to store a measurement criterion of the displacement measurement unit; an imaging characteristics measurement unit configured to measure imaging characteristics of the projection optical system; and a calibration unit configured to calibrate the measurement criterion based on a result of measurement by the imaging characteristics measurement unit.

Abstract: Provided is a photoelectric smoke detector capable of preventing an erroneous alarm from being issued even when steam flows into a smoke detecting unit. The smoke detecting unit includes: an installation section; and a smoke inlet section. The installation section includes: a light emitting element for emitting light to an inside of the installation section; and a light receiving element for receiving the light emitted from the light emitting element. The smoke inlet section includes: a plurality of wall members for preventing external light from entering the smoke inlet section; and a smoke inlet formed between the plurality of wall members. The installation section and the smoke inlet section are arranged so as to overlap each other, with the smoke inlet section being positioned on a lower side of the installation section, and are communicated with each other through an opening.

Abstract: There is provided a plate-shaped member positioning apparatus comprising a conveyor for conveying a plate-shaped member, a positioner for contact with a front end of a conveyed plate-shaped member, a moving unit for moving the positioner along a conveyance direction of the plate-shaped member, and a controller for controlling operations of the conveyor and the moving unit; wherein the controller moves the plate-shaped member in the conveyance direction with the positioner kept in contact with the front end of the plate-shaped member, decelerates an advancing speed of the plate-shaped member and positions the plate-shaped member at a certain standby position.

Abstract: There is provided a plate-shaped member positioning apparatus comprising a conveyor for conveying a plate-shaped member, a positioner for contact with a front end of a conveyed plate-shaped member, a moving unit for moving the positioner along a conveyance direction of the plate-shaped member, and a controller for controlling operations of the conveyor and the moving unit; wherein the controller moves the plate-shaped member in the conveyance direction with the positioner kept in contact with the front end of the plate-shaped member, decelerates an advancing speed of the plate-shaped member and positions the plate-shaped member at a certain standby position.