Patents by Inventor Tomohiro Nakata

Tomohiro Nakata has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9423060
    Abstract: Provided are a fixing device for a lower-stage member which facilitates a leveling operation for making upper surfaces of lower-stage members coplanar, and can further enhance a vibration absorbing effect generated by an elastic member, and a fluid control device which includes the fixing device. A fixing device for a lower-stage member is configured such that respective lower-stage members are fixed once and, thereafter, a desired lower-stage member is moved upwardly against an elastic force so as to finely adjust positions of upper surfaces of a plurality of lower-stage members. The elastic member is formed of an annular body made of rubber or a synthetic resin. A cutout which imparts the elastic deformation by bending when a force in the vertical direction is applied to the elastic member is formed on an upper portion and a lower portion of an inner peripheral surface of the elastic member.
    Type: Grant
    Filed: March 6, 2012
    Date of Patent: August 23, 2016
    Assignee: FUJIKIN INCORPORATED
    Inventors: Tsutomu Shinohara, Takahiro Matsuda, Tomohiro Nakata, Michio Yamaji
  • Patent number: 9371946
    Abstract: A pipe joint includes first and second joint members having fluid channels communicating with each other, an annular gasket to be interposed between abutting end surfaces of the both joint members, and a nut configured to couple the joint members. The nut is provided with an inner surface treated layer. The inner surface treated layer includes a Co (cobalt)-P (phosphorous) alloy metal coating provided on an inner surface of the nut and a fluorine coating provided on the surface of the alloy metal coating.
    Type: Grant
    Filed: October 18, 2013
    Date of Patent: June 21, 2016
    Assignees: Tokyo Electron Limited, Fujikin Incorporated
    Inventors: Tsuneyuki Okabe, Shuji Moriya, Kenichi Sato, Tomohiro Nakata, Tsutomu Shinohara, Michio Yamaji
  • Publication number: 20150252923
    Abstract: An object of the present invention is to provide a fluid coupling, in which a coupling member is readily retained by a retainer and the retainer is readily attached to or detached from the coupling member, and a retainer for such a fluid coupling. A retainer includes an annular gasket retaining portion for retaining a gasket therein and an annular coupling member retaining portion which has an inner diameter greater than that of the gasket retaining portion and retains one coupling member. At an inner circumference of the gasket retaining portion and an inner circumference of the coupling member retaining portion are formed annular grooves, respectively, for holding therein elastic rings, respectively.
    Type: Application
    Filed: May 21, 2015
    Publication date: September 10, 2015
    Inventors: Tomohiro Nakata, Akihiro Harada, Michio Yamaji
  • Publication number: 20150233412
    Abstract: A bolt-locking apparatus includes a plurality of fitting members 2 and 3 which are relatively non-rotatably fitted to heads of a plurality of bolts 5, and an engaging member 4 fitted to the plurality of fitting members 2 and 3 such that the engaging member 4 straddles the fitting members 2 and 3. Outer peripheral surfaces 2b and 3b of the fitting members 2 and 3 are non-circular in shape. The engaging member 4 includes a plurality of engaging holes (non-circular engaging portions) 8a and 8b which correspond to the non-circular outer peripheral surfaces 2b and 3b of the plurality of fitting members 2 and 3.
    Type: Application
    Filed: March 18, 2015
    Publication date: August 20, 2015
    Applicants: TOKYO ELECTRON LIMITED, FUJIKIN INCORPORATED
    Inventors: Norihiko AMIKURA, Satoshi KAGATSUME, Masahiko SATOH, Yukio NAITO, Satoshi MUTO, Tomohiro NAKATA, Tsutomu SHINOHARA, Michio YAMAJI
  • Patent number: 9103366
    Abstract: A bolt-locking apparatus includes a plurality of fitting members 2 and 3 which are relatively non-rotatably fitted to heads of a plurality of bolts 5, and an engaging member 4 fitted to the plurality of fitting members 2 and 3 such that the engaging member 4 straddles the fitting members 2 and 3. Outer peripheral surfaces 2b and 3b of the fitting members 2 and 3 are non-circular in shape. The engaging member 4 includes a plurality of engaging holes (non-circular engaging portions) 8a and 8b which correspond to the non-circular outer peripheral surfaces 2b and 3b of the plurality of fitting members 2 and 3.
    Type: Grant
    Filed: March 7, 2012
    Date of Patent: August 11, 2015
    Assignees: TOKYO ELECTRON LIMITED, FUJIKIN INCORPORATED
    Inventors: Norihiko Amikura, Satoshi Kagatsume, Masahiko Satoh, Yukio Naito, Satoshi Muto, Tomohiro Nakata, Tsutomu Shinohara, Michio Yamaji
  • Patent number: 9068679
    Abstract: Providing a fluid coupling, in which a coupling member is readily retained by a retainer and the retainer can be readily attached to or detached from the coupling member, and a retainer for such a fluid coupling. A retainer includes an annular gasket retaining portion for retaining a gasket therein and an annular coupling member retaining portion which has an inner diameter greater than that of the gasket retaining portion and retains one coupling member. At an inner circumference of the gasket retaining portion and an inner circumference of the coupling member retaining portion are formed annular grooves respectively, for holding therein elastic rings respectively.
    Type: Grant
    Filed: April 21, 2009
    Date of Patent: June 30, 2015
    Assignee: FUJIKIN INCORPORATED
    Inventors: Tomohiro Nakata, Akihiro Harada, Michio Yamaji
  • Publication number: 20140333067
    Abstract: Provided is a joint which can decrease the number of kinds of parts. A bolt 5 has a shaft portion 14 which is constituted of a distal end portion on which male threads 14a are formed and a remaining portion 14b on which male threads are not formed. First and second joint members 2, 3 have the same shape. A shaft insertion hole 15 which is disposed on an abutting end surface side of the joint member and a threaded hole 16 which is communicated with the shaft insertion hole 15 and extends to an end surface of the joint member on a side opposite to an abutting end surface of the joint member are formed in the first and second joint members 2, 3.
    Type: Application
    Filed: September 11, 2012
    Publication date: November 13, 2014
    Applicant: FUJIKIN INCORPORATED
    Inventors: Tsuneyuki Okabe, Shuji Moriya, Kenichi Sato, Tomohiro Nakata, Tsutomu Shinohara, Michio Yamaji
  • Publication number: 20140312617
    Abstract: Provided is a pipe joint which can prevent fine particles generated when a male threaded member and a female threaded member are threadedly engaged with each other from entering a fluid passage thus maintaining a high degree of cleanliness. Joint members 2, 3 are joined to each other by a male threaded member 6 formed on one joint member 2 and a female threaded member 7 formed on the other joint member 3. A cover portion 16 which covers outer peripheral surfaces of abutting portions of both joint members 2, 3 is formed on the male threaded member 6.
    Type: Application
    Filed: September 11, 2012
    Publication date: October 23, 2014
    Applicant: FUJIKIN INCORPORATED
    Inventors: Tsuneyuki Okabe, Shuji Moriya, Kenichi Sato, Tomohiro Nakata, Tsutomu Shinohara, Michio Yamaji
  • Publication number: 20140110937
    Abstract: A pipe joint which does not generate fine particles even though being repeatedly mounted and demounted is provided. A pipe joint includes first and second joint members having fluid channels communicating with each other, an annular gasket to be interposed between abutting end surfaces of the both joint members, and a nut configured to couple the joint members. The nut is provided with an inner surface treated layer. The inner surface treated layer includes a Co (cobalt)-P (phosphorous) alloy metal coating provided on an inner surface of the nut and a fluorine coating provided on the surface of the alloy metal coating.
    Type: Application
    Filed: October 18, 2013
    Publication date: April 24, 2014
    Applicants: FUJIKIN INCORPORATED, TOKYO ELECTRON LIMITED
    Inventors: Tsuneyuki OKABE, Syuji MORIYA, Kenichi SATO, Tomohiro NAKATA, Tsutomu SHINOHARA, Michio YAMAJI
  • Publication number: 20140110936
    Abstract: Provided are a fixing device for a lower-stage member which facilitates a leveling operation for making upper surfaces of lower-stage members coplanar, and can further enhance a vibration absorbing effect generated by an elastic member, and a fluid control device which includes the fixing device. A fixing device for a lower-stage member is configured such that respective lower-stage members are fixed once and, thereafter, a desired lower-stage member is moved upwardly against an elastic force so as to finely adjust positions of upper surfaces of a plurality of lower-stage members. The elastic member is formed of an annular body made of rubber or a synthetic resin. A cutout which imparts the elastic deformation by bending when a force in the vertical direction is applied to the elastic member is formed on an upper portion and a lower portion of an inner peripheral surface of the elastic member.
    Type: Application
    Filed: November 17, 2011
    Publication date: April 24, 2014
    Applicant: FUJIKIN INCORPORATED
    Inventors: Tsutomu Shinohara, Takahiro Matsuda, Tomohiro Nakata, Michio Yamaji
  • Patent number: 8434522
    Abstract: There is provided a fluid control apparatus which can reduce the number of members and can improve the assembling operation efficiency. A pressure indication device 4 to be replaced with a relatively-higher frequency is coupled to a base block 5 existing thereunder through male screw members 17 from above. An on-off valve 6 to be replaced with a relatively-lower frequency has, at its lower portion, a block-shaped main body 6a formed integrally therewith. The main body 6a of the on-off valve 6 is coupled to the base block 5 through male screw members 18 in the forward and rearward directions.
    Type: Grant
    Filed: May 26, 2008
    Date of Patent: May 7, 2013
    Assignees: Tokyo Electron Limited, Fujikin Incorporated
    Inventors: Wataru Okase, Shuji Moriya, Tomohiro Nakata, Tsutomu Shinohara, Michio Yamaji
  • Patent number: 8281816
    Abstract: There is provided a fluid control apparatus which enables reducing widths of lines for further reducing space occupied by the apparatus. Support flow-channel blocks 9 and 10 are constituted by large block portions 25 and 27 which have openings of fluid flow channels 9a and 10a abutted against openings of fluid flow channels 11c and 11d in extended flow-channel blocks 11a and 11b with seal portions 20 interposed therebetween and, also, are abutted against lower surfaces of the extended flow-channel blocks 11a and 11b, and small block portions 26 and 28 which have lower surfaces flushed with the large block portions 25 and 27 and have heights smaller than those of the large block portions. The small block portions 26 and 28 are provided with male-screw-members insertion holes 26a and 28a for mounting the support flow-channel blocks 9 and 10 to a base member 30.
    Type: Grant
    Filed: May 26, 2008
    Date of Patent: October 9, 2012
    Assignee: Fujikin Incorporated
    Inventors: Tomohiro Nakata, Tsutomu Shinohara, Michio Yamaji
  • Publication number: 20120230757
    Abstract: A bolt-locking apparatus includes a plurality of fitting members 2 and 3 which are relatively non-rotatably fitted to heads of a plurality of bolts 5, and an engaging member 4 fitted to the plurality of fitting members 2 and 3 such that the engaging member 4 straddles the fitting members 2 and 3. Outer peripheral surfaces 2b and 3b of the fitting members 2 and 3 are non-circular in shape. The engaging member 4 includes a plurality of engaging holes (non-circular engaging portions) 8a and 8b which correspond to the non-circular outer peripheral surfaces 2b and 3b of the plurality of fitting members 2 and 3.
    Type: Application
    Filed: March 7, 2012
    Publication date: September 13, 2012
    Applicants: FUJIKIN INCORPORATED, TOKYO ELECTRON LIMITED
    Inventors: Norihiko Amikura, Satoshi Kagatsume, Masahiko Satoh, Yukio Naito, Satoshi Muto, Tomohiro Nakata, Tsutomu Shinohara, Michio Yamaji
  • Patent number: 8220495
    Abstract: There is provided a fluid control apparatus which can improve assembling operation efficiency. A screw insertion hole 29 extending in a front and rear direction have a stepped portion 29a which receives a head portion 18a of a male screw member 18, and the stepped portion 29a is positioned at a position closer to an inserted tip end side of a male screw member 28 in the front and rear direction than a position, in the front and rear direction, of male screw members 34 from above. By fastening the male screw member 18 in the front and rear direction at first and then fastening the male screw member 34 from above, it is possible to prevent the male screw member 18 in the front and rear direction and the male screw member 34 from above from interfering with each other.
    Type: Grant
    Filed: May 26, 2008
    Date of Patent: July 17, 2012
    Assignee: Fujikin Incorporated
    Inventors: Tomohiro Nakata, Tsutomu Shinohara, Michio Yamaji
  • Publication number: 20110031745
    Abstract: An object of the present invention is to provide a fluid coupling, even if it has a large diameter, in which a coupling member can be readily retained by a retainer and the retainer can be readily attached to or detached from the coupling member, and a retainer for such a fluid coupling. A retainer 5 includes an annular gasket retaining portion 21 for retaining a gasket 4 therein and an annular coupling member retaining portion 22 which has an inner diameter greater than that of the gasket retaining portion 21 and retains one coupling member 2. At an inner circumference of the gasket retaining portion 21 and an inner circumference of the coupling member retaining portion 22 are formed annular grooves 23 and 24, respectively, for holding therein elastic rings 25 and 26, respectively.
    Type: Application
    Filed: April 21, 2009
    Publication date: February 10, 2011
    Applicant: FUJIKIN INCORPORATED
    Inventors: Tomohiro Nakata, Akihiro Harada, Michio Yamaji
  • Publication number: 20100320408
    Abstract: The present invention provides a fluid controller which enables fine adjustments of low flow rates and enables a user to set desired low flow rates.
    Type: Application
    Filed: January 30, 2008
    Publication date: December 23, 2010
    Applicant: FUJIKIN INCORPORATED
    Inventors: Tomohiro Nakata, Michio Yamaji, Tsutomu Shinohara, Akihiro Harada
  • Publication number: 20100132808
    Abstract: There is provided a fluid control apparatus which can improve assembling operation efficiency. A screw insertion hole 29 extending in a front and rear direction have a stepped portion 29a which receives a head portion 18a of a male screw member 18, and the stepped portion 29a is positioned at a position closer to an inserted tip end side of a male screw member 28 in the front and rear direction than a position, in the front and rear direction, of male screw members 34 from above. By fastening the male screw member 18 in the front and rear direction at first and then fastening the male screw member 34 from above, it is possible to prevent the male screw member 18 in the front and rear direction and the male screw member 34 from above from interfering with each other.
    Type: Application
    Filed: May 26, 2008
    Publication date: June 3, 2010
    Applicant: FUJIKIN INCORPORATED
    Inventors: Tomohiro Nakata, Tsutomu Shinohara, Michio Yamaji
  • Publication number: 20100132819
    Abstract: There is provided a fluid control apparatus which enables reducing widths of lines for further reducing space occupied by the apparatus. Support flow-channel blocks 9 and 10 are constituted by large block portions 25 and 27 which have openings of fluid flow channels 9a and 10a abutted against openings of fluid flow channels 11c and 11d in extended flow-channel blocks 11a and 11b with seal portions 20 interposed therebetween and, also, are abutted against lower surfaces of the extended flow-channel blocks 11a and 11b, and small block portions 26 and 28 which have lower surfaces flushed with the large block portions 25 and 27 and have heights smaller than those of the large block portions. The small block portions 26 and 28 are provided with male-screw-members insertion holes 26a and 28a for mounting the support flow-channel blocks 9 and 10 to a base member 30.
    Type: Application
    Filed: May 26, 2008
    Publication date: June 3, 2010
    Applicant: FUJIKIN INCORPORATED
    Inventors: Tomohiro Nakata, Tsutomu Shinohara, Michio Yamaji
  • Patent number: D752715
    Type: Grant
    Filed: March 30, 2015
    Date of Patent: March 29, 2016
    Assignee: FUJIKIN INCORPORATED
    Inventors: Tadayuki Yakushijin, Yasumasa Yanagida, Keisuke Ishibashi, Tomohiro Nakata, Tsuyoshi Tanikawa, Michio Yamaji
  • Patent number: D757900
    Type: Grant
    Filed: September 28, 2015
    Date of Patent: May 31, 2016
    Assignee: FUJIKIN INCORPORATED
    Inventors: Tadayuki Yakushijin, Yasumasa Yanagida, Keisuke Ishibashi, Tomohiro Nakata, Tsuyoshi Tanikawa, Michio Yamaji