Patents by Inventor Tomohisa NAKAZAWA

Tomohisa NAKAZAWA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Foreign substance detection method, foreign substance detection apparatus, exposure method, and method of manufacturing device
    Patent number: 9599903
    Abstract: A foreign substance detection method includes: judging the presence/absence of a foreign substance by measuring a surface condition of a substrate; measuring a surface condition of a second substrate different from the substrate upon replacing the substrate on the chuck with the second substrate, when it is judged in the judging that a foreign substance exists; and determining whether an adhering location of the foreign substance determined to exist in the judging is the substrate, based on a measurement result obtained in the measurement.
    Type: Grant
    Filed: November 5, 2014
    Date of Patent: March 21, 2017
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Tadao Nakamura, Yuji Kosugi, Tomohisa Nakazawa
  • FOREIGN SUBSTANCE DETECTION METHOD, FOREIGN SUBSTANCE DETECTION APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING DEVICE
    Publication number: 20150131065
    Abstract: A foreign substance detection method includes: judging the presence/absence of a foreign substance by measuring a surface condition of a substrate; measuring a surface condition of a second substrate different from the substrate upon replacing the substrate on the chuck with the second substrate, when it is judged in the judging that a foreign substance exists; and determining whether an adhering location of the foreign substance determined to exist in the judging is the substrate, based on a measurement result obtained in the measurement.
    Type: Application
    Filed: November 5, 2014
    Publication date: May 14, 2015
    Inventors: Tadao NAKAMURA, Yuji KOSUGI, Tomohisa NAKAZAWA