Patents by Inventor Tomohuki Sakoda

Tomohuki Sakoda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Detection of AIOx ears for process control in FeRAM processing
    Patent number: 6767750
    Abstract: The present invention is directed to a method of forming an FeRAM integrated circuit, which includes evaluating the capacitor stack to determine the efficacy of the sidewall diffusion barrier layer deposition. When evaluating the capacitor stack after etching a masking layer portion of the hard mask, if “ears” are seen on top of the stack, the sidewall diffusion barrier layer is sufficiently thick to provide an adequate sidewall barrier. Evaluation may be performed using a standard or tilt scanning electron microscope, for example.
    Type: Grant
    Filed: December 3, 2002
    Date of Patent: July 27, 2004
    Assignees: Texas Instruments Incorporated, Agilent Technologies, Incorporated
    Inventors: Scott R. Summerfelt, Tomohuki Sakoda, Chiu Chi