Patents by Inventor Tomoiku Nakano

Tomoiku Nakano has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Exhaust apparatus for epitaxial growth system
    Patent number: 5250092
    Abstract: An exhaust apparatus for an epitaxial growth system includes an exhaust pipe, a dust filter, and a liquid nitrogen trap. The exhaust pipe performs exhaustion of a reaction furnace in which a reaction gas is supplied to grow a thin film on a semiconductor wafer. The dust filter traps reaction products which have not been used for growing the thin film on the semiconductor wafer, and the dust filter is arranged in the exhaust pipe. The liquid nitrogen trap is arranged in the exhaust pipe in series with the dust filter.
    Type: Grant
    Filed: July 30, 1992
    Date of Patent: October 5, 1993
    Assignee: NEC Corporation
    Inventor: Tomoiku Nakano