Patents by Inventor Tomoya INDEN
Tomoya INDEN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11967557Abstract: A semiconductor device includes a substrate. A gate insulating film is formed on the surface of the substrate. A first gate electrode layer is formed on the gate insulating film. A second gate electrode layer is formed on the first gate electrode layer and electrically connected to the first gate electrode layer. A first contact extends through the second gate electrode layer to reach the first gate electrode layer. First and second impurity layers are formed on opposite sides of the first and second gate electrode layers.Type: GrantFiled: March 3, 2022Date of Patent: April 23, 2024Assignee: KIOXIA CORPORATIONInventor: Tomoya Inden
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Publication number: 20230420007Abstract: According to one embodiment, a memory device includes a first silicon substrate, a second silicon substrate, and a memory cell array. A first CMOS circuit is formed on the first silicon substrate. The second silicon substrate is provided above the first silicon substrate in a stacking direction. A second CMOS circuit is formed on the second silicon substrate. The memory cell array is provided above the second silicon substrate in the stacking direction. The memory cell array is connected to the first CMOS circuit and the second CMOS circuit and includes a plurality of memory cells arranged in the stacking direction of the first silicon substrate and the second silicon substrate.Type: ApplicationFiled: March 6, 2023Publication date: December 28, 2023Inventors: Tsuneo UENAKA, Tomoya INDEN, Shigehiro YAMAKITA
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Publication number: 20230411283Abstract: A semiconductor device includes a transistor including a first metallic-layer as a gate electrode above a front face of a substrate. A first wiring layer includes first to third elongate members constituted of the same material as the first metallic layer and extending in a first direction, and first and second connecting members constituted of the same material as the first metallic layer, extending in a second direction, and connecting the first to third elongate members. A second wiring layer is provided above the first metallic layer, and includes fourth to sixth elongate members extending in the first or second direction, and third and fourth connecting members constituted of the same material as that of the fourth to sixth elongate members, extending in the other of the first and second directions, and connecting the fourth to sixth elongate members. The first and second wiring layers are connected to each other.Type: ApplicationFiled: March 16, 2023Publication date: December 21, 2023Applicant: Kioxia CorporationInventor: Tomoya INDEN
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Publication number: 20230225121Abstract: A semiconductor device includes: a semiconductor substrate (10) having a first region (NP1) and a second region (NP2); a first insulating layer (2b); a first gate electrode (3b) having a first semiconductor layer (31b) containing an impurity, a first conductive layer (32b) containing titanium, a second conductive layer (33b) containing nitrogen and either titanium or tungsten, and a third conductive layer (34b) containing tungsten; a second insulating layer (4b) provided on the third conductive layer and containing oxygen and silicon; a third insulating layer (5b) provided on the second insulating layer and containing nitrogen and silicon; a first contact (CS) provided on the first region; a second contact (CS) provided on the second region; and a third contact (C0) provided on the third conductive layer of the first gate electrode and penetrating through the second insulating layer and the third insulating layer.Type: ApplicationFiled: March 8, 2023Publication date: July 13, 2023Applicant: Kioxia CorporationInventor: Tomoya INDEN
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Publication number: 20230207564Abstract: According to one embodiment, a semiconductor device includes: a first well region of N-type and a second well region of P-type; a PMOS transistor provided in the first well region; and an NMOS transistor provided in the second well region. The PMOS transistor includes a first gate insulating layer and a first gate electrode. The NMOS transistor includes a second gate insulating layer and a second gate electrode. The first gate electrode includes a first semiconductor layer of P-type, a first insulating layer, and a first conductive layer. The second gate electrode includes a second semiconductor layer of N-type, a second insulating layer, and a second conductive layer. A film thickness of the first insulating layer is thicker than a film thickness of the second insulating layer.Type: ApplicationFiled: February 17, 2023Publication date: June 29, 2023Applicant: Kioxia CorporationInventor: Tomoya INDEN
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Patent number: 11665906Abstract: A semiconductor memory device includes a substrate, a first conductor layer, and a first insulator layer. The substrate includes a first region on which memory cells are provided, a second region on which a control circuit of the memory cells is provided, and a third region separating the first region and the second region. The first conductor layer is above the second region of the substrate. The first insulator layer is above the second and third regions of the substrate. The first insulator layer includes a first portion that is above the first conductor layer and extends along a surface direction of the substrate, and a second portion that is continuous with the first portion and extends along a thickness direction of the substrate from the first portion toward a surface of the substrate in the third region.Type: GrantFiled: February 19, 2020Date of Patent: May 30, 2023Assignee: Kioxia CorporationInventor: Tomoya Inden
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Patent number: 11616063Abstract: According to one embodiment, a semiconductor device includes: a first well region of N-type and a second well region of P-type; a PMOS transistor provided in the first well region; and an NMOS transistor provided in the second well region. The PMOS transistor includes a first gate insulating layer and a first gate electrode. The NMOS transistor includes a second gate insulating layer and a second gate electrode. The first gate electrode includes a first semiconductor layer of P-type, a first insulating layer, and a first conductive layer. The second gate electrode includes a second semiconductor layer of N-type, a second insulating layer, and a second conductive layer. A film thickness of the first insulating layer is thicker than a film thickness of the second insulating layer.Type: GrantFiled: March 13, 2020Date of Patent: March 28, 2023Assignee: Kioxia CorporationInventor: Tomoya Inden
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Patent number: 11610905Abstract: A semiconductor memory device includes a substrate, first conductor layers, second conductor layers, a third conductor layer, and an insulator layer. The substrate includes a first region, a second region, and a third region separating the first and second regions. The first conductor layers are above the first region. The second conductor layers are above an uppermost one of the first conductor layers. The third conductor layer is above the second region. The insulator layer is above the second and third regions. The insulator layer includes first and second portions. The first portion is above the third conductor layer at a height from the substrate greater than a height of the uppermost one of the first conductor layers and extends along a substrate surface direction. The second portion extends along a substrate thickness direction and contacts a surface of the substrate in the third region.Type: GrantFiled: February 18, 2020Date of Patent: March 21, 2023Assignee: Kioxia CorporationInventor: Tomoya Inden
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Publication number: 20220399276Abstract: A semiconductor device includes a substrate. A gate insulating film is formed on the surface of the substrate. A first gate electrode layer is formed on the gate insulating film. A second gate electrode layer is formed on the first gate electrode layer and electrically connected to the first gate electrode layer. A first contact extends through the second gate electrode layer to reach the first gate electrode layer. First and second impurity layers are formed on opposite sides of the first and second gate electrode layers.Type: ApplicationFiled: March 3, 2022Publication date: December 15, 2022Inventor: Tomoya INDEN
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Patent number: 11380704Abstract: A semiconductor memory device includes a P-type transistor and a first N-type transistor. The P-type transistor includes a first semiconductor layer containing carbon, a P-type second semiconductor layer provided on the first semiconductor layer, a third semiconductor layer provided on the second semiconductor layer and containing carbon. The first N-type transistor includes a fourth semiconductor layer containing carbon, an N-type fifth semiconductor layer provided on the fourth semiconductor layer, a sixth semiconductor layer provided on the fifth semiconductor layer and containing carbon.Type: GrantFiled: August 26, 2020Date of Patent: July 5, 2022Assignee: Kioxia CorporationInventor: Tomoya Inden
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Patent number: 11201219Abstract: An integrated circuit device of an embodiment includes a substrate, a first transistor, an insulation layer, a first contact, a second contact, and a first single crystal portion. The first transistor includes a first gate electrode, and a first drain region, and wherein the first source region and the first drain region are disposed in the substrate. The first contact faces the first gate electrode. The second contact faces a first region that is first one of the first source region and the first drain region. The first single crystal portion is disposed on the first region and convex from a surface of the first region, and is located between the first region and the second contact.Type: GrantFiled: March 12, 2019Date of Patent: December 14, 2021Assignee: Toshiba Memory CorporationInventors: Tomoya Inden, Katsuyuki Kitamoto
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Publication number: 20210296327Abstract: A semiconductor memory device includes a P-type transistor and a first N-type transistor. The P-type transistor includes a first semiconductor layer containing carbon, a P-type second semiconductor layer provided on the first semiconductor layer, a third semiconductor layer provided on the second semiconductor layer and containing carbon. The first N-type transistor includes a fourth semiconductor layer containing carbon, an N-type fifth semiconductor layer provided on the fourth semiconductor layer, a sixth semiconductor layer provided on the fifth semiconductor layer and containing carbon.Type: ApplicationFiled: August 26, 2020Publication date: September 23, 2021Applicant: Kioxia CorporationInventor: Tomoya INDEN
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Publication number: 20210167176Abstract: An integrated circuit device of an embodiment includes a substrate, a first transistor, an insulation layer, a first contact, a second contact, and a first single crystal portion. The first transistor includes a first gate electrode, and a first drain region, and wherein the first source region and the first drain region are disposed in the substrate. The first contact faces the first gate electrode. The second contact faces a first region that is first one of the first source region and the first drain region. The first single crystal portion is disposed on the first region and convex from a surface of the first region, and is located between the first region and the second contact.Type: ApplicationFiled: March 12, 2019Publication date: June 3, 2021Applicant: TOSHIBA MEMORY CORPORATIONInventors: Tomoya INDEN, Katsuyuki KITAMOTO
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Publication number: 20210082916Abstract: According to one embodiment, a semiconductor device includes: a first well region of N-type and a second well region of P-type; a PMOS transistor provided in the first well region; and an NMOS transistor provided in the second well region. The PMOS transistor includes a first gate insulating layer and a first gate electrode. The NMOS transistor includes a second gate insulating layer and a second gate electrode. The first gate electrode includes a first semiconductor layer of P-type, a first insulating layer, and a first conductive layer. The second gate electrode includes a second semiconductor layer of N-type, a second insulating layer, and a second conductive layer. A film thickness of the first insulating layer is thicker than a film thickness of the second insulating layer.Type: ApplicationFiled: March 13, 2020Publication date: March 18, 2021Applicant: Kioxia CorporationInventor: Tomoya INDEN
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Publication number: 20210066325Abstract: A semiconductor memory device includes a substrate, first conductor layers, second conductor layers, a third conductor layer, and an insulator layer. The substrate includes a first region, a second region, and a third region separating the first and second regions. The first conductor layers are above the first region. The second conductor layers are above an uppermost one of the first conductor layers. The third conductor layer is above the second region. The insulator layer is above the second and third regions. The insulator layer includes first and second portions. The first portion is above the third conductor layer at a height from the substrate greater than a height of the uppermost one of the first conductor layers and extends along a substrate surface direction. The second portion extends along a substrate thickness direction and contacts a surface of the substrate in the third region.Type: ApplicationFiled: February 18, 2020Publication date: March 4, 2021Inventor: Tomoya INDEN
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Publication number: 20210066315Abstract: A semiconductor memory device includes a substrate, a first conductor layer, and a first insulator layer. The substrate includes a first region on which memory cells are provided, a second region on which a control circuit of the memory cells is provided, and a third region separating the first region and the second region. The first conductor layer is above the second region of the substrate. The first insulator layer is above the second and third regions of the substrate. The first insulator layer includes a first portion that is above the first conductor layer and extends along a surface direction of the substrate, and a second portion that is continuous with the first portion and extends along a thickness direction of the substrate from the first portion toward a surface of the substrate in the third region.Type: ApplicationFiled: February 19, 2020Publication date: March 4, 2021Inventor: Tomoya INDEN
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Patent number: 9564224Abstract: A semiconductor device according to an embodiment comprises: a field effect transistor comprising a semiconductor layer and a gate electrode; a wiring line layer positioned above the field effect transistor; and a control circuit that adjusts a voltage of a wiring line in the wiring line layer. The wiring line layer comprises: a contact wiring line connected to a source or a drain of the field effect transistor; and a first wiring line facing a position between the gate electrode and the contact wiring line, of the semiconductor layer. The control circuit adjusts the contact wiring line to a certain voltage and sets the first wiring line to a floating state.Type: GrantFiled: September 9, 2015Date of Patent: February 7, 2017Assignee: KABUSHIKI KAISHA TOSHIBAInventors: Tomoya Inden, Kimitoshi Okano, Kiyoshi Okuyama
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Publication number: 20160232976Abstract: A semiconductor device according to an embodiment comprises: a field effect transistor comprising a semiconductor layer and a gate electrode; a wiring line layer positioned above the field effect transistor; and a control circuit that adjusts a voltage of a wiring line in the wiring line layer. The wiring line layer comprises: a contact wiring line connected to a source or a drain of the field effect transistor; and a first wiring line facing a position between the gate electrode and the contact wiring line, of the semiconductor layer. The control circuit adjusts the contact wiring line to a certain voltage and sets the first wiring line to a floating state.Type: ApplicationFiled: September 9, 2015Publication date: August 11, 2016Applicant: Kabushiki Kaisha ToshibaInventors: Tomoya INDEN, Kimitoshi OKANO, Kiyoshi OKUYAMA