Patents by Inventor Tomoya Shitara

Tomoya Shitara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for temperature control of IC device during test
    Patent number: 6549026
    Abstract: An apparatus for controlling the temperature, during testing, of IC devices formed on a wafer includes a chuck for locating the devices during testing and multiple temperature control devices arranged on the chuck to correspond with the arrangement of the devices being tested on the wafer. The chuck itself can be cooled or heated, such as by the flow of a temperature-controlled fluid, and a temperature control device such as a heating element can be associated with each IC device being tested. Alternatively, a separate heat sink can be associated with each temperature control device and its corresponding IC device.
    Type: Grant
    Filed: July 14, 2000
    Date of Patent: April 15, 2003
    Assignee: Delta Design, Inc.
    Inventors: Larry DiBattista, Mark Malinoski, Tomoya Shitara