Patents by Inventor Tony Vessa

Tony Vessa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor processing method
    Patent number: 8741071
    Abstract: A process for treating the surface of a substrate in the manufacture of a semiconductor device. The process comprises providing a concentrated acid or base, a peroxide and water, and delivering the acid or base, the peroxide and the water to the surface of the substrate. The acid or base and the water are delivered separately to the surface of the substrate and allowed to mix on the surface, and the water is delivered in pulses. The present invention also provides an apparatus adapted to carry out this process.
    Type: Grant
    Filed: January 9, 2008
    Date of Patent: June 3, 2014
    Assignee: Freescale Semiconductor, Inc.
    Inventor: Tony Vessa
  • SEMICONDUCTOR PROCESSING METHOD
    Publication number: 20100275951
    Abstract: A process for treating the surface of a substrate in the manufacture of a semiconductor device. The process comprises providing a concentrated acid or base, a peroxide and water, and delivering the acid or base, the peroxide and the water to the surface of the substrate. The acid or base and the water are delivered separately to the surface of the substrate and allowed to mix on the surface, and the water is delivered in pulses. The present invention also provides an apparatus adapted to carry out this process.
    Type: Application
    Filed: January 9, 2008
    Publication date: November 4, 2010
    Applicant: Freescale Semiconductor, Inc.
    Inventor: Tony Vessa