Abstract: A substrate processing apparatus according to an embodiment includes a transport block and a plurality of processing blocks. In the transport block, a transport device for transporting a substrate is disposed. The plurality of processing blocks are disposed adjacent to the transport block and process the substrate transported by the transport device. Each processing block includes one liquid processing unit and one drying unit. The liquid processing unit performs a liquid film forming processing so as to form a liquid film on the top surface of the substrate. The drying unit performs a supercritical drying processing in which the substrate is dried by bringing the substrate into contact with the processing fluid in a supercritical state. The liquid processing unit and the drying unit included in the same processing block are disposed on the same side with respect to the movement direction of the transport device of the transport block.

Abstract: Provided is a substrate processing apparatus including a liquid processing unit that performs a liquid processing on a substrate; a drying processing unit that performs a drying processing on the substrate in a wet state; a first conveyance unit that conveys the substrate to the liquid processing unit; a second conveyance unit that conveys the substrate in the wet state from the liquid processing unit to the drying processing unit; and a third conveyance unit that conveys the substrate before the liquid processing in the liquid processing unit and to convey the substrate after the drying processing from the drying processing unit. The first and second conveyance units and the drying processing unit are disposed on a side that faces the third conveyance unit, and the liquid processing unit is disposed on a side that faces the first and second conveyance units and is opposite to the third conveyance unit.

Abstract: A substrate processing apparatus according to an embodiment includes a transport block and a plurality of processing blocks. In the transport block, a transport device for transporting a substrate is disposed. The plurality of processing blocks are disposed adjacent to the transport block and process the substrate transported by the transport device. Each processing block includes one liquid processing unit and one drying unit. The liquid processing unit performs a liquid film forming processing so as to form a liquid film on the top surface of the substrate. The drying unit performs a supercritical drying processing in which the substrate is dried by bringing the substrate into contact with the processing fluid in a supercritical state. The liquid processing unit and the drying unit included in the same processing block are disposed on the same side with respect to the movement direction of the transport device of the transport block.

Abstract: Provided is a substrate processing apparatus including a liquid processing unit that performs a liquid processing on a substrate; a drying processing unit that performs a drying processing on the substrate in a wet state; a first conveyance unit that conveys the substrate to the liquid processing unit; a second conveyance unit that conveys the substrate in the wet state from the liquid processing unit to the drying processing unit; and a third conveyance unit that conveys the substrate before the liquid processing in the liquid processing unit and to convey the substrate after the drying processing from the drying processing unit. The first and second conveyance units and the drying processing unit are disposed on a side that faces the third conveyance unit, and the liquid processing unit is disposed on a side that faces the first and second conveyance units and is opposite to the third conveyance unit.

Abstract: In one embodiment, a clean gas supply mechanism includes a supply path having an upstream end provided with a gas intake port, and a downstream end connected to a treatment chamber. The supply path is provided therein with a fan, and a filter disposed upstream of the fan. A return path branches from the supply path at a first position downstream of the fan and upstream of the treatment chamber and is connected to the supply path at a second position downstream of the filter and upstream of the fan. A switching mechanism selectively switches between a first state where the clean gas flows into the treatment chamber, and a second state where the clean gas returns to the supply path through the return path.

Abstract: A substrate processing apparatus includes: a chamber that accommodates a processing target substrate therein; a gas supply unit that supplies a gas into the chamber; a gas discharge port that exhausts the chamber; an adjustment mechanism that adjusts an exhaust amount discharged from the gas discharge port; a measuring unit that measures an internal pressure of the chamber; and a controller that executes a series of substrate processings according to recipe information indicating contents of substrate processings. The controller performs a feedback control that controls an opening degree of the adjustment mechanism to maintain the internal pressure within a prescribed range based on a measurement result from the measuring unit. When a predetermined event, estimated to change the internal pressure to a level out of the prescribed range, occurs, the controller switches the feedback control to a non-feedback control that controls the opening degree based on a prescribed control value.

Abstract: The invention provides a processing method for upgrading an organic phase substance by removing heavy element species from the organic phase substance originating from a resource substance in mild environmental conditions, and further provides a method for collecting removed heavy element species and a method for collecting other substances.

Abstract: In one embodiment, a clean gas supply mechanism includes a supply path having an upstream end provided with a gas intake port, and a downstream end connected to a treatment chamber. The supply path is provided therein with a fan, and a filter disposed upstream of the fan. A return path branches from the supply path at a first position downstream of the fan and upstream of the treatment chamber and is connected to the supply path at a second position downstream of the filter and upstream of the fan. A switching mechanism selectively switches between a first state where the clean gas flows into the treatment chamber, and a second state where the clean gas returns to the supply path through the return path.

Abstract: A communication system which can automatically construct a network, as well as reducing power consumption of each node in the network is provided. A child node calculates a timing of next receiving broadcast information based on timing information included in broadcast information. It then accepts input of broadcast information transmitted from a management node and transmits a registration request. It further accepts input of broadcast information transmitted from the management node and determines whether or not it is registered in the network based on slot assignment information included in the broadcast information. If the child node determines that it is registered in the network, it calculates a timing for receiving a reply request transmitted from the management node.

Abstract: This invention provides a sensor having such a structure that the area in which a sensor electrode comes into contact with a liquid, a mist or a gas containing an analyte has been previously specified. The sensor comprises at least an electroconductive first electrode, an electroconductive second electrode, electroconductive first and second wirings connected to the first and second electrodes, and an insulating part for insulating the first and second wirings from each other and from a liquid, a mist or a gas containing the analyte. The insulating part is formed of an organic material. In the first and second electrodes, at least the surface, which comes into contact with a liquid, a mist or a gas containing the analyte, is formed of a material which is insoluble in a liquid or a mist containing the analyte, or is not attacked by a gas containing the analyte.

Abstract: This invention provides a sensor having such a structure that the area in which a sensor electrode comes into contact with a liquid, a mist or a gas containing an analyte has been previously specified. The sensor comprises at least an electroconductive first electrode, an electroconductive second electrode, electroconductive first and second wirings connected to the first and second electrodes, and an insulating part for insulating the first and second wirings from each other and from a liquid, a mist or a gas containing the analyte. The insulating part is formed of an organic material. In the first and second electrodes, at least the surface, which comes into contact with a liquid, a mist or a gas containing the analyte, is formed of a material which is insoluble in a liquid or a mist containing the analyte, or is not attacked by a gas containing the analyte.

Abstract: [Problems to be solved by the invention] A method and sensor for detecting the fluorides, chlorides or bromides of hydrocarbons such as C5F8 or C4F6 are provided, which are capable of the detection with quickness and high sensitivity at a room temperature or a temperature closer thereto, not a high temperature, without interference with hindrance gases from fluorine liquids or the like. [Means for solving the problems] A detection agent, detection method, and detection sensor based on an optical change or mass change by a direct reaction with a nitrogen compound having at least two rings at which an amidine backbone is centered, which is represented by the following general formula (I).

Abstract: A communication system which can automatically construct a network, as well as reducing power consumption of each node in the network is provided. A child node calculates a timing of next receiving broadcast information based on timing information included in broadcast information. It then accepts input of broadcast information transmitted from a management node and transmits a registration request. It further accepts input of broadcast information transmitted from the management node and determines whether or not it is registered in the network based on slot assignment information included in the broadcast information. If the child node determines that it is registered in the network, it calculates a timing for receiving a reply request transmitted from the management node.

Abstract: This invention provides a sensor having such a structure that the area in which a sensor electrode comes into contact with a liquid, a mist or a gas containing an analyte has been previously specified. The sensor comprises at least an electroconductive first electrode, an electroconductive second electrode, electroconductive first and second wirings connected to the first and second electrodes, and an insulating part for insulating the first and second wirings from each other and from a liquid, a mist or a gas containing the analyte. The insulating part is formed of an organic material. In the first and second electrodes, at least the surface, which comes into contact with a liquid, a mist or a gas containing the analyte, is formed of a material which is insoluble in a liquid or a mist containing the analyte, or is not attacked by a gas containing the analyte.

Abstract: A polymerizable liquid crystalline composition comprises a side chain liquid crystalline polymer obtained by radical-copolymerizing a (meth)acrylic compound has an optically active site and a (meth)acrylic compound having an oxetanyl group, and a cation generator and thus have no functional group the synthesis of which is difficult, such as an epoxy group. The use of the polymerizable liquid crystalline composition provides a cholesteric liquid crystal film which is excellent in a capability of retaining the orientation after being aligned and fixed in a liquid crystal orientation and in mechanical strength without the necessity of a complicated operation such as photo irradiation under an inert gas atmosphere.

Abstract: A polymerizable liquid crystalline composition comprises a side chain liquid crystalline polymer obtained by radical-copolymerizing a (meth)acrylic compound has an optically active site and a (meth)acrylic compound having an oxetanyl group, and a cation generator and thus have no functional group the synthesis of which is difficult, such as an epoxy group. The use of the polymerizable liquid crystalline composition provides a cholesteric liquid crystal film which is excellent in a capability of retaining the orientation after being aligned and fixed in a liquid crystal orientation and in mechanical strength without the necessity of a complicated operation such as photo irradiation under an inert gas atmosphere.

Abstract: A radio channel assignment judgement method and a radio channel control device in a mobile communication system, capable of preventing a rapid tolerance degradation with respect to the identical frequency interference associated with a degradation of a receiving level of a communication channel that is caused, for example, by a moving of the mobile station, are disclosed.

Abstract: Objects of a cylinder cover for diesel engine is to prevent the interference of mists between a plurality of fuel valves, thereby enhancing the spray efficiency, and to prevent troubles of burning of nozzle caused by the collision of mist sprayed from the adjacent fuel valve and increase in thermal stress caused by local overheat of combustion chamber surface due to the collision of mist. To achieve these objects, fuel valves are mounted in a side wall of the cylinder cover so that the centerline thereof is substantially at right angles to the cylinder centerline. Further, the injection angle of the fuel valve is set so as to be an acute angle not larger than 90.degree. to prevent local collision of mist with the combustion chamber wall surfaces, and the volume of the volume portion at the tip of the fuel valve is decreased to the minimum.

Abstract: An object of the invention is to provide a diesel engine of water injecting type having fuel injecting valves and water injecting valves wherein water mists are adapted to reach high-temperature regions of fuel mists so that the temperature can be reduced to inhibit the generation of NOx. In order to achieve the object, the fuel injecting valves and the water injecting valves are arranged separately in different sites, ones in the top wall of the cylinder cover and the others in the side wall, so that high-temperature regions of fuel mists are mixed with water mists in right angles to each other to lower the combustion temperature thereby reducing the generation of NOx.

Abstract: A hydrocarbon-reforming reactor by a steam reforming reaction and a partial oxidation reaction, which comprises a chamber for feeding oxygen-containing gas, a chamber for feeding a mixture gas of hydrocarbon with steam and a chamber for heat exchange of reformed gas in this order from one side of the reforming reactor, and which further comprises a catalyst layer filled in a space between an inner tube having an opening to the chamber for feeding oxygen-containing gas and a reaction tube being so placed as to position the inner tube in its middle portion and having an opening to the chamber for feeding the mixture gas, anda process for producing reformed gas from hydrocarbon which comprises carrying out a steam reforming reaction in the catalyst layer on the side of the chamber for feeding the mixture gas of hydrocarbon with steam by feeding the mixture gas of hydrocarbon with steam to the catalyst layer from the chamber for feeding the mixture gas, carrying out a partial oxidation reaction and steam reformin