Abstract: The present invention relates to a method for production of silane where particulate quartz in a fluidized bed is treated with a gas containing hydrogen at a temperature below 0° C., with the quartz in the fluidized bed subjected to an alternating electric field having a frequency equal to the intrinsic resonant frequency of at least a part of the quartz particles to create vibrational energy in the particles, thereby causing a chemical reaction between quartz and hydrogen to produce silane. The invention also relates to an apparatus for carrying out the method.

Abstract: The present invention relates to a method for production of silane where particulate quartz in a fluidized bed is treated with a gas containing hydrogen at a temperature below 0° C., with the quartz in the fluidized bed subjected to an alternating electric field having a frequency equal to the intrinsic resonant frequency of at least a part of the quartz particles to create vibrational energy in the particles, thereby causing a chemical reaction between quartz and hydrogen to produce silane. The invention also relates to an apparatus for carrying out the method.

Abstract: A gyrocon deflection system can provide circular beam deflection using a single RF coupler, without providing a phase difference between the two beam deflection signals to account for electron beam transit time between the two sets of deflection plates. The two sets of deflection plates are internally connected pairwise together so that both deflection regions are in RF phase, and the midplanes of the two sets are spaced 90.degree. apart electrically at the desired operating voltage and frequency.