Abstract: A generator control circuit of an ac generator which charges a battery includes a voltage regulator, a comparator which provides a control signal for controlling the voltage regulator when the output voltage of the ac generator is higher than a predetermined voltage and an alarming device which operates when the comparator does not provide the control signal. The predetermined voltage is set higher than voltage of the battery when the battery is open and equal to or lower than a regulation voltage of the ac generator.

Abstract: In an alternator, failure in a power supply line connected to an output terminal of a rectifier is detected. Upon detection of a failure in this power supply line, power generation is suppressed for a predetermined period that is longer than the time constant of a field winding of the alternator. Preferably, a high voltage pulse is detected to discriminate a first condition where a single high voltage pulse is generated when an electrical load connected to the power supply line is cut off and a second condition where a high voltage pulse is repeatedly and frequently generated when a failure occurs in the power supply line. Only when the second condition is discriminated, power generation suppression control of the alternator is conducted.

Abstract: On top of respective areas divided by partition plates, that is, a cassette station, a processing station, and an interface section in a coating and developing processing system, gas supply sections for supplying an inert gas into the respective areas are provided. Exhaust pipes for exhausting atmospheres in the respective areas are provided at the bottom of the respective areas. The atmospheres in the respective areas are maintained in a clean condition by supplying the inert gas not containing impurities such as oxygen and fine particles from the respective gas supply sections into the respective areas and exhausting the atmospheres in the respective areas from the exhaust pipes.

Abstract: A developing unit, a coating unit and a plurality of cooling plates are arranged in a process station which performs a resist coating and so on and a wafer is transferred among them by a substrate transfer device. The temperature of an area to where the wafer is transferred is detected by a temperature/humidity detector and the temperature of the wafer which is cooled by the cooling plates is adjusted accordingly based on a detected value so that the temperature of the wafer when transferred to the coating unit becomes a coating temperature of a processing solution. Thereby, the wafer is transferred to the coating unit while maintaining its temperature with high accuracy to be coated with a resist solution, so that a formation of an uneven processing due to the temperature change can be prevented and a uniform processing can be performed.

Abstract: In a programming supporting method in which based on a dependence file indicative of dependence of a plurality of divisional source programs, said plurality of source program are handled as a series of programs, a description for the registration of a function of a function definition part in all of said plurality of source programs is extracted according to said dependence file, the extracted description is converted into a description in a prototype declaration format to generate an external prototype declaration definition file, a function having a return value is sequentially extracted from among functions described in the external prototype declaration definition file, a function of the same name as that of the extracted function is detected from a calling part of said function in said plurality of source programs according to the dependence file, and a type of return value of the detected function and a type of variable which stores a return value are estimated.

Abstract: In an alternator, failure in a power supply line connected to an output terminal of a rectifier is detected. Upon detection of a failure in this power supply line, power generation is suppressed for a predetermined period that is longer than the time constant of a field winding of the alternator. Preferably, a high voltage pulse is detected to discriminate a first condition where a single high voltage pulse is generated when an electrical load connected to the power supply line is cut off and a second condition where a high voltage pulse is repeatedly and frequently generated when a failure occurs in the power supply line. Only when the second condition is discriminated, power generation suppression control of the alternator is conducted.

Abstract: A developing unit, a coating unit and a plurality of cooling plates are arranged in a process station which performs a resist coating and so on and a wafer is transferred among them by a substrate transfer device. The temperature of an area to where the wafer is transferred is detected by a temperature/humidity detector and the temperature of the wafer which is cooled by the cooling plates is adjusted accordingly based on a detected value so that the temperature of the wafer when transferred to the coating unit becomes a coating temperature of a processing solution. Thereby, the wafer is transferred to the coating unit while maintaining its temperature with high accuracy to be coated with a resist solution, so that a formation of an uneven processing due to the temperature change can be prevented and a uniform processing can be performed.

Abstract: On top of respective areas divided by partition plates, that is, a cassette station, a processing station, and an interface section in a coating and developing processing system, gas supply sections for supplying an inert gas into the respective areas are provided. Exhaust pipes for exhausting atmospheres in the respective areas are provided at the bottom of the respective areas. The atmospheres in the respective areas are maintained in a clean condition by supplying the inert gas not containing impurities such as oxygen and fine particles from the respective gas supply sections into the respective areas and exhausting the atmospheres in the respective areas from the exhaust pipes.

Abstract: In an electronic musical instrument, playing data are produced by depressing a key in a keyboard, and divided into plural groups. At least one of the semi-automatic playing channels processes sound data of a musical piece read out of a memory to generate musical tones in synchronism with the playing data of at least one group. The sound data may be corrected according to sound correcting data before being used to generate musical tones.