Abstract: An adsorbent in a board conveying hand includes: a pad for adsorbing a board in contact with the board; and an elastic member interposed between the fork and the pad and provided with an adsorption passage for allowing an adsorbing fluid to pass between the fork and the pad, wherein a part of the elastic member is deformed, thus arbitrarily varying a projection amount of the pad from the fork.

Abstract: A substrate transfer hand for unloading and loading a substrate with respect to a cassette and transferring the substrate, includes: a first driven roller configured to be rotated by a drive mechanism provided in the cassette when the hand is coupled to the cassette along a substrate unloading/loading direction. The substrate transfer hand further includes: a flat support bar configured to be coupled to the cassette; a second driven roller provided in the support bar; and a rotation transmitting unit for transmitting rotation of the first driven roller to the second driven roller such that the second driven roller is rotated in the same direction as the first driven roller.

Abstract: An adsorbent in a board conveying hand includes: a pad for adsorbing a board in contact with the board; and an elastic member interposed between the fork and the pad and provided with an adsorption passage for allowing an adsorbing fluid to pass between the fork and the pad, wherein a part of the elastic member is deformed, thus arbitrarily varying a projection amount of the pad from the fork.

Abstract: In an industrial robot including a fixed base, a first arm rotatably attached to the fixed base, a second arm rotatably attached to the front end portion of the first arm, and a wrist portion provided with a wrist base and a movable flange attached to the front end portion of the second arm, determination of the reference position of the wrist portion is carried out individually or independently between the wrist portion and the second arm, and determinations of reference positions of the first and second arms, with respect to the fixed base are carried out by way of a positioning jig attached to the fixed base. Since an approach is employed to individually or independently carry out determination of a reference position or positions of one axis or plural axes including the front end axis of the wrist portion of the industrial robot, determination of reference positions can be carried out in the state where the tool is attached to the wrist front end portion.

Abstract: A wrist mechanism for an industrial robot has a second axis perpendicular to a first axis extending in a length direction of an arm and a third axis perpendicular to the second axis, the wrist mechanism comprising:, first reduction mechanism and second reduction mechanism supported at both sides of the front end portion of an arm having a cut portion so that they can be rotated about the second axis; a wrist frame including a hollow portion fixed the output shaft of the first reduction mechanism; a first bevel gear including a hollow portion provided on the wrist frame and supported so that it can be rotated about the third axis which is perpendicular to the second axis; a second bevel hear rotating about an axis parallel to the second axis and meshing with the first bevel gear (5); toothed wheel (71) integral with the second bevel gear; a toothed wheel fixed at the output shaft of the second reduction mechanism and meshing with the toothed wheel; and a tool fixing portion including a hollow portion, fixed to

Abstract: According to the present invention, there is provided a tool changing device for a robot comprising a piston reciprocating in a cylinder, a supporting block provided at the distal end of a piston rod, a pair of links interconnecting the supporting block to a pair of cramp members cramping a tool mounting plate.Even in a case where the supply of a pressurized fluid is interrupted during the cramped state, and outside uncramping force is applied to the cramp members, a side surface of each cramp member abuts against a side surface of the supporting block, and the cramping members are thereby held in the cramping state.