Patents by Inventor Toshiaki Sasai

Toshiaki Sasai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ion source having auxillary ion chamber
    Patent number: 5107170
    Abstract: An ion source having an auxiliary plasma chamber and a main plasma chamber. The auxiliary plasma chamber receives an ionizable gas and is provided with microwaves with sufficient power to create a high frequency discharge and generate a subplasma for sustaining the creation of an ion plasma in the main chamber. Multiple auxiliary plasma chambers may be used and each may be separately regulated. Protective plates, screens, and coatings may be provided to protect the ion plasma of the main chamber from sputtering a facing wall of the auxiliary plasma chamber.
    Type: Grant
    Filed: October 17, 1989
    Date of Patent: April 21, 1992
    Assignee: Nissin Electric Co., Ltd.
    Inventors: Junzo Ishikawa, Yoshio Matsubara, Hideaki Takara, Shuichi Nogawa, Toshiaki Sasai