Abstract: In order to provide a vacuum pump motor which is free from rotation imbalance, there is provided a vacuum pump motor 10 which is connected directly to a pump main shaft 21 of a vacuum pump 20, including a motor rotor 120 which is attached directly or indirectly to the pump main shaft 21 and balance rings 127 which are attached directly or indirectly to the pump main shaft 21 at ends thereof which are spaced apart from end portions of a rotor core 123, wherein the balance rings 127 contain a material having anticorrosion properties.

Abstract: Provided is a canned motor to be coupled to a vacuum pump and used as a rotary driving source for the vacuum pump. The canned motor includes: a stator core; a rotor provided on an inner side of the stator core; and a non-conductive can provided between the stator core and the rotor. The non-conductive can is configured to separate the stator core and the rotor from each other. The non-conductive can is made of resin, ceramic, or composite material thereof. The non-conductive can is bonded to the stator core with an adhesive.

Abstract: A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which one or more abatement parts for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless are attached. The one or more abatement parts are selected, depending on the amount and kind of the exhaust gas discharged from the vacuum pump, from plural kinds of abatement parts which have different treatment types of exhaust gas and/or different treatment amounts of exhaust gas.

Abstract: A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which at least one abatement part for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless is attached. The abatement part is selected from a plurality of abatement parts having different treatment types of exhaust gas and/or different treatment amounts of exhaust gas and/or different treatment performances of exhaust gas.

Abstract: A vacuum pump has an abatement part for treating an exhaust gas discharged from a chamber of a manufacturing apparatus to make the exhaust gas harmless. The vacuum pump includes a heat exchanger configured to heat an inert gas by using heat generated when the exhaust gas is treated to be made harmless in the abatement part. The inert gas heated by the heat exchanger is introduced into the vacuum pump.

Abstract: A vacuum pump includes a vacuum pump having a discharge port to which an abatement part for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless is attached. The vacuum pump includes a cylindrical member having an exhaust gas introduction port for introducing the exhaust gas to be treated and a gas outlet port for discharging gases which have been treated, a plurality of fuel nozzles provided at a circumferential wall of the cylindrical member for ejecting a fuel, and a plurality of air nozzles provided at the circumferential wall of the cylindrical member for ejecting air so as to form a swirling flow of air along an inner circumferential surface of the circumferential wall. The air nozzles are disposed at a plurality of stages spaced in an axial direction of the cylindrical member.

Abstract: In order to provide a motor rotor in which a permanent magnet is prevented from corroding, wherein a motor rotor for use in a motor for driving a pump rotor rotating shaft of a vacuum pump is provided which comprises a rotor core made up of a plurality of steel plates which are laminated in an axial direction and having a through hole, a permanent magnet which is disposed in the through hole, and end plates which are attached individually to axial end portions of the rotor core, wherein an adhesive is applied to a whole surface of each of the plurality of steel plates, and the plurality of steel plates are surface joined to each other and to the end plates via the adhesive.

Abstract: There are provided a vacuum pump self-diagnosis method, a vacuum pump self-diagnosis system, a vacuum pump central monitoring system capable of making self-diagnosis of a dry vacuum pump. A vacuum pump self-diagnosis method decides the occurrence of failure and generates an alarm when a predetermined alarm set value is exceeded by an integrated value or an average value of a current of a motor for rotating a rotor of said vacuum pump. In a vacuum pump self-diagnosis system for making self-diagnosis of a vacuum pump which comprises a casing and a rotor rotatably arranged in the casing for sucking and discharging a gas through rotations of the rotor, the rotor comprises a plurality of stages and a pressure sensor is provided between the rotor stages.

Abstract: In order to provide a vacuum pump motor which is free from rotation imbalance, there is provided a vacuum pump motor 10 which is connected directly to a pump main shaft 21 of a vacuum pump 20, including a motor rotor 120 which is attached directly or indirectly to the pump main shaft 21 and balance rings 127 which are attached directly or indirectly to the pump main shaft 21 at ends thereof which are spaced apart from end portions of a rotor core 123, wherein the balance rings 127 contain a material having anticorrosion properties.

Abstract: To provide a sealing structure for a vacuum pump motor which maintains the sealing properties of the vacuum pump motor in an ensured fashion, there is provided a sealing structure for a vacuum pump motor 100, including a lead wire 151a which is passed through an opening portion 143 formed in a motor frame 140 to be connected to a motor stator 110 and a seal member 145 which seals the opening portion 143, wherein the lead wire 151a includes a core wire portion 154a and a covering portion 155a which covers the core wire portion 154, and a seal portion 153 is formed in at least part of the core wire portion 154a.

Abstract: Provided is a canned motor to be coupled to a vacuum pump and used as a rotary driving source for the vacuum pump. The canned motor includes: a stator core; a rotor provided on an inner side of the stator core; and a non-conductive can provided between the stator core and the rotor. The non-conductive can is configured to separate the stator core and the rotor from each other. The non-conductive can is made of resin, ceramic, or composite material thereof. The non-conductive can is bonded to the stator core with an adhesive.

Abstract: An exhaust system (2) is used for evacuating a chamber of a manufacturing apparatus (1) for manufacturing semiconductor devices, liquid crystal panels, LEDs, or solar cells. The exhaust system (2) includes a vacuum pump apparatus (3) for evacuating the chamber, an exhaust gas treatment apparatus (5) for treating an exhaust gas discharged from the chamber, and a controller (6) for controlling the vacuum pump apparatus (3) and/or the exhaust gas treatment apparatus (5). Information of operation process of the manufacturing apparatus (1), and the kind of gas and the flow rate of the gas supplied to the manufacturing apparatus (1) is inputted into the controller (6) to control the vacuum pump apparatus (3) and/or the exhaust gas treatment apparatus (5).

Abstract: A brushless synchronous motor is provided in a simple configuration and at a low cost. The brushless synchronous motor comprises a rotor having salient magnets arranged in a circumferential direction, a stator having driving magnetic poles arranged in the circumferential direction, and an exciting coil wound around each driving magnetic pole, where the rotor is made in a non-circular profile. For example, the rotor may comprise a cylindrical body which has at least one flat surface perpendicular to one magnetic pole direction of the rotor, or a cylindrical body having an elliptic profile with a longer diameter in one magnetic pole direction of the rotor. A detector circuit is associated with each of a predetermined number of exciting coils for outputting a detection signal indicative of the impedance of the exciting coil in accordance with the distance between the driving magnetic pole and rotor, to detect a rotating angle of the rotor.

Abstract: There are provided a vacuum pump self-diagnosis method, a vacuum pump self-diagnosis system, a vacuum pump central monitoring system capable of making self-diagnosis of a dry vacuum pump. A vacuum pump self-diagnosis method decides the occurrence of failure and generates an alarm when a predetermined alarm set value is exceeded by an integrated value or an average value of a current of a motor for rotating a rotor of said vacuum pump. In a vacuum pump self-diagnosis system for making self-diagnosis of a vacuum pump which comprises a casing and a rotor rotatably arranged in the casing for sucking and discharging a gas through rotations of the rotor, the rotor comprises a plurality of stages and a pressure sensor is provided between the rotor stages.

Abstract: A flowmeter can measure a small flow rate of fluid with high measurement precision, can be made small-sized, can deal with a variety of types of chemicals, and can be produced easily at a low cost. The flowmeter includes: a casing having an enlarged portion and being disposed vertically; and a float enclosed in the enlarged portion of the casing and at least partly having a detection surface. The float is to be pushed up by a fluid flowing from below into the casing and flowing upwardly in the casing. The flowmeter also includes at least one displacement sensor, disposed outside the enlarged portion of the casing, for detecting an axial displacement of the float by magnetizing the detection surface of the float.

Abstract: A brushless synchronous motor is provided in a simple configuration and at a low cost. The brushless synchronous motor comprises a rotor having salient magnets arranged in a circumferential direction, a stator having driving magnetic poles arranged in the circumferential direction, and an exciting coil wound around each driving magnetic pole, where the rotor is made in a non-circular profile. For example, the rotor may comprise a cylindrical body which has at least one flat surface perpendicular to one magnetic pole direction of the rotor, or a cylindrical body having an elliptic profile with a longer diameter in one magnetic pole direction of the rotor. A detector circuit is associated with each of a predetermined number of exciting coils for outputting a detection signal indicative of the impedance of the exciting coil in accordance with the distance between the driving magnetic pole and rotor, to detect a rotating angle of the rotor.

Abstract: A flowmeter can measure a small flow rate of fluid with high measurement precision, can be made small-sized, can deal with a variety of types of chemicals, and can be produced easily at a low cost. The flowmeter including: a casing having an enlarged portion and disposed vertically; a float, enclosed in the enlarged portion of the casing and at least partly having a detection surface, which is to be pushed up by a fluid flowing from below into the casing and flowing upwardly in the casing; and at least one displacement sensor, disposed outside the enlarged portion of the casing, for detecting an axial displacement of the float by magnetizing the detection surface of the float.

Abstract: The present apparatus includes a casing (1) having a gas introduction opening (3) for introducing a gas into the casing and a gas discharge opening (5) for discharging the gas from the casing, a gas circulating tube passage (8) communicating with the casing for effecting circulation of the gas, a circulating fan (11) for effecting circulation of the gas in the casing through the gas circulating tube passage, and a valve (6, 7) switchable between a position for conducting the introducing and discharging of the gas into and from the casing through the gas introduction opening and the gas discharge opening and a position for effecting circulation of the gas in the casing through the gas circulating tube passage. The apparatus further includes a trap (10), a filter (4) and a heat exchanger (9) for conducting a desired treatment with respect to the circulated gas, such as removal of particles.

Abstract: A magnetic bearing control device that can operate a motor with low noise, has a simple system construction and is compact and inexpensive comprises: at least a pair of opposed electromagnets for supporting a suspended unit without contact; a motor M for rotating the suspended unit; and a controller for driving and controlling them. A DC/DC converter 13 supplies a driving power to an inverter 14 for driving the motor M. The inverter 14 for driving the motor M uses both PWM and PAM control schemes to drive and rotate the motor M.

Abstract: An excimer laser apparatus in which deterioration of the laser gas in the laser container can be suppressed, and damage to the magnetic bearings caused by the laser gas can be suppressed, and which can be reduced in size and operated efficiently, and has low power consumption. Each electromagnet (stator) (7-1) of a magnetic bearing (7) for supporting a rotary shaft (4) of a circulation fan 3 includes excitation coils. Each of the coils is arranged as one unit by embedding a coil body in a ceramic or glass type hardened material which is non-magnetic and has corrosion resistance against a laser gas. The excitation coils are attached to magnetic poles. Alternatively, coil wires (108b) of a radial magnetic bearing (108) can be isolated from a corrosive atmosphere by means of a separation wall (124) while projecting portions of cores (108b) extend through the separation wall (124) and are exposed toward a magnetic bearing rotor (108f).