Abstract: A rotary valve comprising sliding members for supplying treatment gas containing water vapor to a plurality of treatment processes is provided. The rotary valve comprises sliding members (1, 2; 4, 6), through which open flow passages (8, 9, 10), having sliding surfaces slidable to each other and a mechanical seal mechanism for switching the flow passages (8, 9, 10) while sealing fluid by preliminarily pressing the sliding surfaces, wherein the sliding surface of each sliding members (1, 2; 4, 6) is made of hydrophobic material (2, 4) different in hardness from the other.

Abstract: A rotary valve comprising sliding members for supplying treatment gas containing water vapor to a plurality of treatment processes is provided. The rotary valve comprises sliding members (1, 2; 4, 6), through which open flow passages (8, 9, 10), having sliding surfaces slidable to each other and a mechanical seal mechanism for switching the flow passages (8, 9, 10) while sealing fluid by preliminarily pressing the sliding surfaces, wherein the sliding surface of each sliding members (1, 2; 4, 6) is made of hydrophobic material (2, 4) different in hardness from the other.

Abstract: A non-contact-type mechanical seal that keeps a rotary seal ring 6 from vibrating in what is called a pneumatic hammer fashion. For this purpose, an annular space 23 is formed between an outer circumferential surface 21a of the rotary seal ring 6 and an inner circumferential surface 13a of a holder portion 13 of a spring retainer 5. The annular space 23 is sealed by a pair of O rings 22, 22. In addition, seal gas leading passages 24 are provided in the rotary seal ring 6 through which spaces between seal end faces 3a, 6a communicate with the annular space 23. Seal gas 8 is supplied to static pressure generating grooves 15, and led into the annular space 23 through seal gas leading passages 24. The seal gas presses O rings 22, 22 against the outer circumferential surfaces of the rotary seal ring 6 and the inner circumferential surface of the holder portion 13 of the spring retainer 5, thereby firmly holding the rotary seal ring 6.

Abstract: A shaft sealing apparatus 109 comprising a seal case 1 mounted on a tank shell 102 of rotary equipment, a rotary seal ring 3 fixed to the rotary shaft 106 of the rotary equipment, a stationary seal ring 4 held in the seal case 1 opposite to the rotary seal ring 3 and movable in the axial direction, a coil spring 5 to thrust the stationary seal ring 4 against the rotary seal ring 3, a gas feeding channel 6 formed out of a series of gas passages running through the seal case 1 and the stationary seal ring 4 and opening between the two seal end faces 31, 41 of the two seal rings 3, 4, and a gas jetting mechanism to jet, selectively, a seal gas 71 such as nitrogen and a sterilization gas 72 such as steam through the gas feeding channel 6 into between the seal end faces 31, 41.

Abstract: A shaft sealing apparatus 109 comprising a seal case 1 mounted on a tank shell 102 of rotary equipment, a rotary seal ring 3 fixed to the rotary shaft 106 of the rotary equipment, a stationary seal ring 4 held in the seal case 1 opposite to the rotary seal ring 3 and movable in the axial direction, a coil spring 5 to thrust the stationary seal ring 4 against the rotary seal ring 3, a gas feeding channel 6 formed out of a series of gas passages running through the seal case 1 and the stationary seal ring 4 and opening between the two seal end faces 31, 41 of the two seal rings 3, 4, and a gas jetting mechanism to jet, selectively, a seal gas 71 such as nitrogen and a sterilization gas 72 such as steam through the gas feeding channel 6 into between the seal end faces 31, 41.

Abstract: A shaft sealing apparatus capable of preventing gases vaporized from a gas seal or purge fluid from leaking outside before a pressure switch operates due to a pressure rise resulting from a fluid leakage from a mechanical seal. The apparatus comprises a seal casing and a rotary shaft passing through the former and having a mechanical seal A and a dry gas seal B mounted thereon in line with each other to provide purge fluid areas C therebetween. With this arrangement, a purge fluid is supplied to one of the purge fluid areas through a supply line having an orifice OA and the supplied purge fluid and a leaked part of a target fluid to be sealed are released outside from the other purge fluid area through a relief line having an orifice OB. The relief line is provided with a bypass line with an electromagnetic valve and a pressure switch and bypassing the orifice OB.

Abstract: A static pressure-type generating non-contact gas seal in which a diameter d2 of a second outer circumferential portion (42) of a stationary seal ring (4) in contact with a second O-ring (62) is made smaller than the diameter d1 of a first outer circumferential portion (41) of the stationary seal ring (4) in contact with a first O-ring (62). Because of d1>d2, the pressure of a seal gas (8) led to a first closed space (71) produces a force thrusting the stationary seal ring (4) toward a rotary seal ring (2). A second closed space (72) communicates with an inside region (F) through a back pressure lead-in path (45). The inside gas pressure in the second closed space (72) acts as back pressure on the stationary seal ring (4). The groove width b of static pressure generating grooves (9) formed on the seal end face of the stationary seal ring (4) is decided so that a ratio of the groove width d to the radial width, that is, the seal face width B of the stationary seal ring end face (40), i.e. b/B, is 0.05.

Abstract: A non-contacting shaft sealing device comprises an even number of dynamic pressure generating grooves arranged in the peripheral direction on a sealing end face of either the seal case side or the rotary shaft side. Each dynamic pressure generating groove comprises a shallow L-shaped groove of a specific groove width and depth and includes a fluid lead in part extending in the radial direction from a peripheral edge of the high pressure side of the sealing end face and a dynamic pressure generating part extending in the peripheral direction from the end portion thereof. Each groove is symmetrical with respect to one adjacent groove on one side thereof around a first sealing end face diametral line passing between adjacent fluid lead-in parts or symmetrical with respect to a second groove on the other side around a second sealing end face diametral line passing between the dynamic pressure generating grooves. The groove land ratio .theta..sub.1 /.theta..sub.2 in the peripheral direction is 0.5 to 0.

Abstract: A non-contacting shaft sealing device in which an even-number of dynamic pressure generating groove groups are arranged in the peripheral direction thereof on a sealing end face of the seal case side or a sealing end face of the rotary shaft side. Each dynamic pressure generating groove group is composed of one or plural shallow L-shaped grooves of a specific groove width comprising a fluid lead-in part extending in the radial direction from a peripheral edge of high pressure side of said sealing end face and a dynamic pressure generating part extending in the peripheral direction from the end portion thereof. When the dynamic pressure generating groove group is composed of plural L-shaped grooves, those L-shaped grooves are arranged close to each other at an equal pitch without crossing each other such that the end portion of each dynamic pressure generating part is positioned on a fourth sealing end face diametral line.

Abstract: In a non-contacting shaft sealing device of the type wherein a sealing end face of a case seal and a sealing end face of a rotary shaft seal rotate relative to each other in a non-contacting state while being separated by a film of fluid derived from the high pressure region being sealed, one sealing end face is provided with an even number of dynamic pressure generating groove groups arranged in the peripheral direction on the sealing end face. Each dynamic pressure generating groove group has plural approximately L-shaped linear dynamic pressure generating grooves each composed of a fluid lead-in part extending in the radial direction from the peripheral edge of the sealing end face so as to communicate with the high pressure region, and a dynamic pressure generating part extending in the peripheral direction from the end portion of the fluid lead-in part with the dynamic pressure generating grooves not crossing each other and being arranged in the radial direction.

Abstract: A stationary sealing ring (6) surrounds a rotatable shaft (2) and is fitted to, and held by, a cylindrical guide (1a) of a seal case (1). An extremely small clearance is provided between the outer peripheral surface (6b) of the stationary sealing ring and the inner peripheral surface (1c) of the guide. This small clearance prevents radial displacement of the ring but allows the ring to move in the axial direction and permits the passage of a fluid. Because the sealing ring is held without the use of a holding ring or an O-ring, the concentricity and parallelism of the stationary sealing ring to a rotary sealing ring (3) can be continuously maintained despite pressure fluctuations. Clearance between the stationary sealing ring and a holding ring (4) is maintained by an O-ring (9) held in an annular dovetail groove (10) formed in a surface (4c) of the holding ring facing the stationary sealing ring.

Abstract: A shaft seal device comprises two mechanical seals for sealingly separating a sealed fluid region from an atmospheric region. A shaft is rotatable about an axis and extends through a casing from a sealed fluid region to an atmospheric region. The mechanical seals separate the sealed fluid region and the atmospheric region by a purge region formed between the mechanical seals. Each mechanical seal comprises a first seal ring fixed on the shaft and a second seal ring slidable in the axial direction and pressed against the first seal ring. The mechanical seal separating the sealed fluid region from the purge region is a contact type seal so that the fluid pressure of the sealed fluid region acts as a back pressure on the second seal ring. The mechanical seal separating the atmospheric region from the purge region is non-contact type seal so that the fluid pressure of the purge region acts as a back pressure on the second seal ring.

Abstract: A seal device of the non-contact type having seal faces formed by those end faces of a rotating seal ring and a stationary ring which are perpendicular to axes of the two rings, and also having dynamic pressure generating grooves formed in one of the seal faces at a certain interval in the circumferential direction of the seal face each groove having a first spiral groove portion and a second terminal portion being formed continuous from the front end of each of the first spiral groove portions, extending along the circumferential direction of the seal face but across its corresponding first spiral groove portion, and provided with a closed front end. The seal device can be used at high speed and under high pressure and it can correct the tilting of its seal faces, which is caused by pressure and heat added, to prevent them from being contacted with each other.

Abstract: A magnetic fluid seal device, with two or more pole pieces disposed around a magnetic rotating element on both sides of a permanent magnet, each pole piece being formed by alternately joining and first and second magnetic disks differing in inside diameter is related. Tiny gaps are formed between the inner circumference of the magnetic disks having the smaller inside diameter in each pole piece and the outer circumference of the magnetic rotating element, and a magnetic fluid is magnetically captured in these tiny gaps. The magnetic flux density in these gaps is set larger than the saturated magnetization of the magnetic fluid captured in these gaps and the thickness of the first magnetic disks is set somewhare between 0.02 and 0.0 mm.