Abstract: A surface state inspecting system includes a scanning optical system for scanning a surface to be inspected, with first light and simultaneously for scanning a diffraction grating with second light, wherein the first light and the second light have mutually different wavelengths and mutually different polarization directions, a light receiving optical system for receiving scattered light produced sidewardly from the surface and diffraction light produced sidewardly from the diffraction grating, and for superposing the received lights one upon another, and a photoelectric converting device for converting light from the light receiving optical system into an electric signal, wherein the scanning optical system and the light receiving optical system provide an optical system which is telecentric with respect to the surface to be inspected.

Abstract: An inspecting system includes a light source, an irradiating optical system for irradiating a surface of an object such as a reticle or photomask with light from the light source, a detection optical system for detecting scattered light from the surface of the object, and a light blocking device provided substantially parallel to the surface of the object, the light blocking device having a first light transmitting portion for passing light coming from the light source toward the surface of the object and a second light transmitting portion for passing light coming from an irradiated position on the surface of the object toward the detection optical system.

Abstract: Disclosed is an inspection method and apparatus: wherein (i) first light having a first state of polarization and a first wavelength, and (ii) second light having a second state of polarization, different from the first state of polarization, and a second wavelength, different from the first wavelength are produced; at least the first light is projected to a position of inspection; and heterodyne interference light produced on the basis of the second light and light scattered at the inspection position and having its state of polarization changed, by the scattering, from the first state of polarization, is detected.

Abstract: When inspecting the presence of foreign matter on a surface to be inspected by scanning the surface with a light beam from a light source utilizing a scanning system, and receiving scattered light from the surface by a detector, a correlation is utilized between a signal representing first scattered light obtained from the detector when the light beam scans a first line on the surface, and a signal representing second scattered light obtained from the detector when the light beam scans a second line displaced from the first line by a predetermined amount in a direction orthogonal to the direction of the first line.

Abstract: An optical element comprised of a plurality of polarizing beam splitters is provided on the optical path of a two-frequency linearly polarized laser beam source, and the optical element divides a light beam from the two-frequency linearly polarized laser beam source into two light beams, whereafter these two light beams are incident on diffraction gratings provided on a mask and a wafer, respectively. A pair of mirrors are provided vertically above the mask, and a pair of lenses, a pair of polarizing plates and a pair of photoelectric detectors are arranged in succession in the directions of reflection of the pair of mirrors. The outputs of the two photoelectric detectors become beat signals, and the phase difference between these beat signals is measured, whereby the alignment of the mask and wafer is effected. Since the optical element is comprised of a plurality of polarizing beam splitters, leak-in light included in each light beam is reduced.

Abstract: A projection exposing apparatus for detecting a state of focus at two or more places in exposure region of a projection optical system by a focus state detection device. In accordance with the result of the detection of the focus state at the two or more places, the image forming characteristics of the projection optical system are measured by an image forming characteristics measuring device. A first pattern extending in the sagittal direction and a second pattern extending in the meridional direction are formed so that the focus state is measured by light beams transmitted these patterns and therefore the astigmatism, eccentricity or the spherical aberration is obtained so as to be corrected.

Abstract: In an apparatus and a method for evaluating the pattern structure of a fine structure, the presence of foreign particles, or the like, an object having a fine structure is scanned with a light beam, or the spot size of the light beam projected onto the object is changed, and extreme values in light scattered by the object are detected. The fine structure is evaluated according to changes in the positions, the number, the intensities or the like of the extreme values, that is, according to distribution characteristics of the extreme values caused by the scanning or the changes in the spot size of the light beam.

Abstract: In a projection-type optical apparatus in which a projection optical system projects an image of an object upon a substrate, a position detecting sensor mechanically connected to the projection optical system detects the position of the projection optical system relative to the substrate along the optical axis of the projection optical system. A displacement measuring device measures relative displacement between the position detecting sensor and the projection optical system along the optical axis. The substrate is brought into coincidence with an optimum image forming plane of the projection optical system on the basis of the position detected by the position detecting sensor and the displacement measured by the displacement measuring device.

Abstract: A seat back framework of one-piece construction together with a head rest support is made from a single blank of fiber-reinforced plastics. The seat back framework comprises a generally rectangular body having opposite upper and lower walls, a pair of opposite side walls and a connecting wall extending between the side walls in spaced relation to the upper wall with a support space defined therebetween. A pair of guide members for axially adjustably supporting corresponding legs forming a part of the head rest assembly together with a head rest are formed on the rectangular body within the support space.

Abstract: A semiconductor circuit comprising a reactor including a closed magnetic path core of a compression molding which is formed of a mixture of an insulating material and particles of magnetic substance and a conductor magnetically interlinking to the core, and a semiconductor element connected in series with the reactor.

Abstract: A reactor comprising an annular iron core constituting a closed magnetic path and a conductor wound on the iron core. The iron core is formed of particles of iron or an iron-based magnetic material. Each particle is covered with an insulative oxide film which contains 0.3 to 0.8% of oxygen by weight based on the particle.

Abstract: A panel heater with a flat metal sheet of substantially even thickness of from 0.06 to 0.2 mm and having a mesh-like radiation section formed in the central portion of the sheet, the mesh-like radiation section being composed of a plurality of units of wave-like current passageways of uniform width of approximately 2 mm from one end to the other, arranged parallel to each other and connected to each other at the crests of the wave-like current passageways so that the combined width of the passageways at the crests is twice the uniform width. The panel heater also has a pair of heat resistant boards between which the metal sheet is sandwiched; and a frame assembly joining together the heat resistant boards.

Abstract: Red, blue and green color difference signals are supplied to the bases of first, second and third transistors amplifying the tri-color signals of red, blue and green, and a luminance signal is introduced to the emitter of each transistor through a parallel circuit of two resistors. One of the resistors in each parallel circuit is connected through a switch. The switches are associatively operated so that the on-off operation of the switch connected to the emitter of the first transistor is opposite to that of the switches connected to the emitters of the second and the third transistor. By operating the switches, the amplification degree of the first transistor is increased and simultaneously the amplification degrees of the second and third transistors are decreased, and therefore an image with red emphasized can be obtained with no change in luminance.