Abstract: An alignment device comprising a movable table, a plurality of movable support means for movably supporting the movable table, means for reading a recognition mark, and a control means for controlling the drive of the movable support means based on information from the recognition means, wherein each movable support means comprises means having a pair of support blocks each provided to be able to contact/separate with/from the movable table and a pair of piezoelectric actuators each provided with expansible first, second and third piezoelectric elements connected to a support block and extending in each direction, and being capable of walking operation relative to the movable table by the operations of the respective piezoelectric actuators. An alignment accuracy up to a nanometer level can be attained, and the alignment device itself and therefore the entire apparatus incorporating the alignment device can be significantly reduced in thickness and size.

Abstract: An elliptical vibratory cutting apparatus includes a control mechanism which applies a sinusoidal voltage having a predetermined phase difference to piezoelectric elements. Flexure vibrations are accordingly generated in X and Y directions. The vibrations in the X direction cause interference with the vibrations in the Y direction and vice versa. An amount of interference, caused by vibrations in one direction, with vibrations in another direction, is correctively eliminated by the control mechanism (interference eliminating unit. A workpiece is thus cut by means of a cutting tool through elliptical vibrations with high precision.

Abstract: A workpiece is cut by a cutting tool that is attached to a cylindrical support body vibrated by at least two piezoelectric drive elements. The efficiency of the mechanical vibration is improved by attaching the piezoelectric drive elements to a cylindrical body portion (7,7.1,7.2) of the tool support body (2) and by providing the support body with a plurality of necked-down end sections. At least the cylindrical body portion (7,7.1,7.2) is a cylinder with a substantially circular cross-section or with a circular cross-section to provide a constant or a substantially constant bending rigidity of the cylindrical tool support body.

Abstract: An alignment device comprising a movable table, a plurality of movable support means for movably supporting the movable table, means for reading a recognition mark, and a control means for controlling the drive of the movable support means based on information from the recognition means, wherein each movable support means comprises means having a pair of support blocks each provided to be able to contact/separate with/from the movable table and a pair of piezoelectric actuators each provided with expansible first, second and third piezoelectric elements connected to a support block and extending in each direction, and being capable of walking operation relative to the movable table by the operations of the respective piezoelectric actuators. An alignment accuracy up to a nanometer level can be attained, and the alignment device itself and therefore the entire apparatus incorporating the alignment device can be significantly reduced in thickness and size.

Abstract: A workpiece is cut by a cutting tool that is attached to a cylindrical support body vibrated by at least two piezoelectric drive elements. The efficiency of the mechanical vibration is improved by attaching the piezoelectric drive elements to a cylindrical body portion (7,7.1,7.2) of the tool support body (2) and by providing the support body with a plurality of necked-down end sections. At least the cylindrical body portion (7,7.1,7.2) is a cylinder with a substantially circular cross-section or with a circular cross-section to provide a constant or a substantially constant bending rigidity of the cylindrical tool support body.

Abstract: An elliptical vibratory cutting apparatus includes a control mechanism which applies a sinusoidal voltage having a predetermined phase difference to piezoelectric elements. Flexure vibrations are accordingly generated in X and Y directions. An amount of interference, caused by vibrations in one direction, with vibrations in another direction, is correctively eliminated by the control mechanism (interference eliminating unit 22). A workpiece is thus cut by means of a cutting tool through elliptical vibrations.

Abstract: Herein disclosed is a feed system which comprises: a moving body; a plurality of sets of support blocks arranged at the two sides of the moving body and along the moving direction of the moving body; a plurality of clamping members supported through elastically deformable members by the respective sets of the support blocks to engage with the sides of the moving body; clamping actuators mounted on the individual sets of the support blocks for displacing the clamping members toward the sides of the moving body to clamp the moving body; moving actuators mounted on the individual sets of the support blocks for displacing the clamping members in the moving direction of the movable member; and control means for operating the clamping actuators and the moving actuators with phases offset from each other.