Abstract: A probe closely positioned to an information carrier in apparatus to effect information reading and/or input on the information carrier is formed by opposing an electrode to an end portion of the probe to be formed. The distance between probe end portion and the electrode is detected to control the position of the electrode with respect to the probe. A voltage is applied to the probe end portion through the electrode under positioning control to form the probe end portion. The probe end portion is formed and may be reformed to maintain reliable performance of the information reading and/or input apparatus.

Abstract: Disclosed is a position detecting apparatus for detecting a relative position of two objects which are relatively moved. The apparatus includes a probe, a probe driving device, a position detecting device and an object driving device. The probe is provided for the first of the two objects so as to face the surface of the second of the two objects, so as to read information from the surface of the second object. The probe driving device allows the probe to two-dimensionally scan the surface of the second object so that the probe reads the two-dimensional information from the surface of the second object. The position detecting device detects a relative positional relation of the two objects by comparing the two-dimensional information obtained by the two-dimensional scan of the probe by the probe driving device with reference to two-dimensional information.

Abstract: A microprobe is constituted by a single crystal having an apex portion surrounded by facets having specific place directions and having specific crystal faces. The microprobe is provided on a part of a main surface of a substrate or a part of a thin film formed on the main surface. In one embodiment the microprobe is provided with a source electrode, a gate electrode, a drain electrode and a thin resistance, so as to form an MOS transistor for amplifying the microprobe.

Abstract: A probe unit comprises a substrate, a first electrode formed on the substrate, a bridge-shaped flexible member formed on the substrate and insulated by a cavity from the first electrode, and a probe provided in contact with the flexible member. The flexible member is constituted of a laminate comprising a second electrode layer, an insulating layer, and a third electrode layer for applying a voltage to the probe. The first electrode may be included in the flexible member. A piezoelectric layer is between the first electrode and the second electrode.