Patents by Inventor Toshinao Shinbo
Toshinao Shinbo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 11273642Abstract: A liquid ejecting head including a diaphragm constituting a portion of a wall surface of a pressure chamber that accommodates a liquid, and a piezoelectric element that vibrates the diaphragm. In the liquid ejecting head, the diaphragm includes a plurality of layers, and the plurality of layers include a compressive film that has compressive stress and a tensile film that has tensile stress. The compressive film and the tensile film are two layers adjacent to each other that have a largest tension difference among the plurality of layers, and an absolute value of the tension difference between the compressive film and the tensile film is 400 [N/m] or smaller.Type: GrantFiled: April 15, 2020Date of Patent: March 15, 2022Assignee: Seiko Epson CorporationInventors: Masanori Mikoshiba, Shiro Yazaki, Toshinao Shinbo, Hitoshi Takaai
-
Patent number: 10926538Abstract: A liquid ejecting head including a diaphragm constituting a portion of a wall surface of a pressure chamber that accommodates a liquid, and a piezoelectric element that vibrates the diaphragm. In the liquid ejecting head, the diaphragm includes a plurality of layers, and d/D?0.25 is satisfied where D is a thickness of the diaphragm and d is a distance between a neutral axis of the diaphragm and an interface between two adjacent layers in which a tension difference is the largest in the plurality of layers.Type: GrantFiled: December 17, 2019Date of Patent: February 23, 2021Assignee: Seiko Epson CorporationInventors: Masanori Mikoshiba, Shiro Yazaki, Toshinao Shinbo, Hitoshi Takaai
-
Publication number: 20200331267Abstract: A liquid ejecting head including a diaphragm constituting a portion of a wall surface of a pressure chamber that accommodates a liquid, and a piezoelectric element that vibrates the diaphragm. In the liquid ejecting head, the diaphragm includes a plurality of layers, and the plurality of layers include a compressive film that has compressive stress and a tensile film that has tensile stress. The compressive film and the tensile film are two layers adjacent to each other that have a largest tension difference among the plurality of layers, and an absolute value of the tension difference between the compressive film and the tensile film is 400 [N/m] or smaller.Type: ApplicationFiled: April 15, 2020Publication date: October 22, 2020Inventors: Masanori MIKOSHIBA, Shiro YAZAKI, Toshinao SHINBO, Hitoshi TAKAAI
-
Publication number: 20200198351Abstract: A liquid ejecting head including a diaphragm constituting a portion of a wall surface of a pressure chamber that accommodates a liquid, and a piezoelectric element that vibrates the diaphragm. In the liquid ejecting head, the diaphragm includes a plurality of layers, and d/D?0.25 is satisfied where D is a thickness of the diaphragm and d is a distance between a neutral axis of the diaphragm and an interface between two adjacent layers in which a tension difference is the largest in the plurality of layers.Type: ApplicationFiled: December 17, 2019Publication date: June 25, 2020Inventors: Masanori MIKOSHIBA, Shiro YAZAKI, Toshinao SHINBO, Hitoshi TAKAAI
-
Patent number: 8003161Abstract: A method of manufacturing a dielectric film includes a coating step of coating sol made of an organic metal compound and forming a dielectric precursor film, a drying step of drying the dielectric precursor film, a degreasing step of degreasing the dielectric precursor film, and a baking step of baking the dielectric precursor film to form a dielectric film. The drying step includes a first drying step of drying the dielectric precursor film by heating the dielectric precursor film to a temperature lower than a boiling point of a solvent which is a main solvent of the sol and then holding the dielectric precursor film at the temperature for a predetermined period of time, and a second drying step of drying the dielectric precursor film further by reheating the dielectric precursor film and then holding the dielectric precursor film at the temperature for a predetermined period of time.Type: GrantFiled: April 10, 2008Date of Patent: August 23, 2011Assignee: Seiko Epson CorporationInventors: Akira Kuriki, Hironobu Kazama, Toshinao Shinbo, Koji Sumi
-
Patent number: 7992972Abstract: A method of manufacturing a piezoelectric element includes a piezoelectric layer forming step of sequentially and repeatedly performing a heat treatment step of applying a piezoelectric material containing lead to a lower electrode film at a relative humidity in the range of 30% to 50% Rh and then performing a heat treatment to form a piezoelectric precursor film and a crystallization step of firing the piezoelectric precursor film to form a piezoelectric film on the lower electrode film, thereby forming a piezoelectric layer.Type: GrantFiled: March 17, 2009Date of Patent: August 9, 2011Assignee: Seiko Epson CorporationInventors: Toshinao Shinbo, Kazushige Hakeda, Koji Sumi, Tsutomu Nishiwaki
-
Publication number: 20090262169Abstract: A method of manufacturing a piezoelectric element includes a piezoelectric layer forming step of sequentially and repeatedly performing a heat treatment step of applying a piezoelectric material containing lead to a lower electrode film at a relative humidity in the range of 30% to 50% Rh and then performing a heat treatment to form a piezoelectric precursor film and a crystallization step of firing the piezoelectric precursor film to form a piezoelectric film on the lower electrode film, thereby forming a piezoelectric layer.Type: ApplicationFiled: March 17, 2009Publication date: October 22, 2009Applicant: SEIKO EPSON CORPORATIONInventors: Toshinao Shinbo, Kazushige Hakeda, Koji Sumi, Tsutomu Nishiwaki
-
Patent number: 7579041Abstract: A method of manufacturing a dielectric film includes a coating step of coating sol made of an organic metal compound and forming a dielectric precursor film, a drying step of drying the dielectric precursor film, a degreasing step of degreasing the dielectric precursor film, and a baking step of baking the dielectric precursor film to form a dielectric film. The drying step includes a first drying step of drying the dielectric precursor film by heating the dielectric precursor film to a temperature lower than a boiling point of a solvent which is a main solvent of the sol and then holding the dielectric precursor film at the temperature for a predetermined period of time, and a second drying step of drying the dielectric precursor film further by reheating the dielectric precursor film and then holding the dielectric precursor film at the temperature for a predetermined period of time.Type: GrantFiled: November 29, 2004Date of Patent: August 25, 2009Assignee: Seiko Epson CorporationInventors: Akira Kuriki, Hironobu Kazama, Toshinao Shinbo, Koji Sumi
-
Patent number: 7562451Abstract: A method of manufacturing an actuator device configured to prevent separation of a vibration plate and to enhance durability and reliability, and a liquid-jet apparatus are provided. The method includes the steps of forming a vibration plate on one surface of a substrate, and forming a piezoelectric element having a lower electrode, a piezoelectric layer, and an upper electrode on the vibration plate. The step of forming a vibration plate at least includes an insulation film forming step of forming an insulation film made of zirconium oxide by forming a zirconium layer on the one surface side of the substrate in accordance with a sputtering method and subjecting the zirconium layer to thermal oxidation by inserting the substrate formed with the zirconium layer to a thermal oxidation furnace heated to a temperature greater than or equal to 700° C. at a speed greater than or equal to 200 mm/min.Type: GrantFiled: December 9, 2004Date of Patent: July 21, 2009Assignee: Seiko Epson CorporationInventors: Maki Ito, Masami Murai, Xin-Shan Li, Toshinao Shinbo
-
Publication number: 20080199599Abstract: A method of manufacturing a dielectric film includes a coating step of coating sol made of an organic metal compound and forming a dielectric precursor film, a drying step of drying the dielectric precursor film, a degreasing step of degreasing the dielectric precursor film, and a baking step of baking the dielectric precursor film to form a dielectric film. The drying step includes a first drying step of drying the dielectric precursor film by heating the dielectric precursor film to a temperature lower than a boiling point of a solvent which is a main solvent of the sol and then holding the dielectric precursor film at the temperature for a predetermined period of time, and a second drying step of drying the dielectric precursor film further by reheating the dielectric precursor film and then holding the dielectric precursor film at the temperature for a predetermined period of time.Type: ApplicationFiled: April 10, 2008Publication date: August 21, 2008Applicant: SEIKO EPSON CORPORATIONInventors: Akira Kuriki, Hironobu Kazama, Toshinao Shinbo, Koji Sumi
-
Patent number: 7320163Abstract: A step of forming a vibration plate includes a step of forming an insulation film in order to cause the surface roughness Ra of the insulation film to be in the range of 1 nm to 3 nm: the insulation film being made of zirconia which has been obtained by depositing a zirconium layer, and accordingly by the thermally oxidizing the zirconium layer at a predetermined temperature, and the insulation film constituting the uppermost surface of the vibration plate. In addition, a step of forming a piezoelectric elements includes: a step of applying titanium (Ti) onto a lower electrode by use of a sputtering method, and of forming a seed titanium layer thereon; and a step of forming a piezoelectric precursor film by applying a piezoelectric material onto the seed titanium layer, and of forming a piezoelectric layer by baking, and crystallizing, the piezoelectric precursor layer.Type: GrantFiled: March 10, 2005Date of Patent: January 22, 2008Assignee: Seiko Epson CorporationInventors: Li Xin-Shan, Masami Murai, Toshinao Shinbo, Maki Ito
-
Publication number: 20070084033Abstract: A method of manufacturing an actuator device configured to prevent separation of a vibration plate and to enhance durability and reliability, and a liquid-jet apparatus are provided. The method includes the steps of forming a vibration plate on one surface of a substrate, and forming a piezoelectric element having a lower electrode, a piezoelectric layer, and an upper electrode on the vibration plate. The step of forming a vibration plate at least includes an insulation film forming step of forming an insulation film made of zirconium oxide by forming a zirconium layer on the one surface side of the substrate in accordance with a sputtering method and subjecting the zirconium layer to thermal oxidation by inserting the substrate formed with the zirconium layer to a thermal oxidation furnace heated to a temperature greater than or equal to 700° C. at a speed greater than or equal to 200 mm/min.Type: ApplicationFiled: December 9, 2004Publication date: April 19, 2007Inventors: Maki Ito, Masami Murai, Xin-Shan Li, Toshinao Shinbo
-
Publication number: 20050210645Abstract: An object of the present invention is to provide a method of manufacturing an actuator device, and a liquid jet head, which can improve characteristics of a piezoelectric layer constituting piezoelectric elements and can stabilize the characteristics of the piezoelectric layer. A step of forming a vibration plate includes a step of forming an insulation film in order to cause the surface roughness Ra of the insulation film to be in the range of 1 nm to 3 nm: the insulation film being made of zirconia which has been obtained by depositing a zirconium layer, and accordingly by the thermally oxidizing the zirconium layer at a predetermined temperature, and the insulation film constituting the uppermost surface of the vibration plate.Type: ApplicationFiled: March 10, 2005Publication date: September 29, 2005Inventors: Li Xin-Shan, Masami Murai, Toshinao Shinbo, Maki Ito
-
Publication number: 20050208208Abstract: A method of manufacturing a dielectric film includes a coating step of coating sol made of an organic metal compound and forming a dielectric precursor film, a drying step of drying the dielectric precursor film, a degreasing step of degreasing the dielectric precursor film, and a baking step of baking the dielectric precursor film to form a dielectric film. The drying step includes a first drying step of drying the dielectric precursor film by heating the dielectric precursor film to a temperature lower than a boiling point of a solvent which is a main solvent of the sol and then holding the dielectric precursor film at the temperature for a predetermined period of time, and a second drying step of drying the dielectric precursor film further by reheating the dielectric precursor film and then holding the dielectric precursor film at the temperature for a predetermined period of time.Type: ApplicationFiled: November 29, 2004Publication date: September 22, 2005Inventors: Akira Kuriki, Hironobu Kazama, Toshinao Shinbo, Koji Sumi
-
Silicon wafer break pattern, silicon substrate, and method of generating silicon wafer break pattern
Patent number: 6878609Abstract: In order to provide a silicon wafer break pattern that stabilizes the location and shape of the breaks at weak spots of the break pattern and that reduces waste, the through-holes of the break pattern is disposed along a scribe line, a first group of the through-holes are substantially disposed on only a first side of the scribe line, and a second group of the through-holes are substantially disposed on only a second side of the scribe line.Type: GrantFiled: December 11, 2003Date of Patent: April 12, 2005Assignee: Seiko Epson CorporationInventors: Akihisa Wanibe, Noriaki Okazawa, Yoshinao Miyata, Toshinao Shinbo, Tetsuya Akasu, Hisashi Akachi -
Silicon wafer break pattern, silicon substrate, and method of generating silicon wafer break pattern
Publication number: 20040121560Abstract: In order to provide a silicon wafer break pattern that stabilizes the location and shape of the breaks at weak spots of the break pattern and that reduces waste, the through-holes of the break pattern is disposed along a scribe line, a first group of the through-holes are substantially disposed on only a first side of the scribe line, and a second group of the through-holes are substantially disposed on only a second side of the scribe line.Type: ApplicationFiled: December 11, 2003Publication date: June 24, 2004Applicant: SEIKO EPSON CORPORATIONInventors: Akihisa Wanibe, Noriaki Okazawa, Yoshinao Miyata, Toshinao Shinbo, Tetsuya Akasu, Hisashi Akachi -
Patent number: 6699552Abstract: In order to provide a silicon wafer break pattern that stabilizes the location and shape of the breaks at weak spots of the break pattern and that reduces waste, the through-holes of the break pattern is disposed along a scribe line, a first group of the through-holes are substantially disposed on only a first side of the scribe line, and a second group of the through-holes are substantially disposed on only a second side of the scribe line.Type: GrantFiled: April 16, 2002Date of Patent: March 2, 2004Assignee: Seiko Epson CorporationInventors: Akihisa Wanibe, Noriaki Okazawa, Yoshinao Miyata, Toshinao Shinbo, Tetsuya Akasu, Hisashi Akachi
-
Silicon wafer break pattern, silicon substrate, and method of generating silicon wafer break pattern
Publication number: 20020164874Abstract: In order to provide a silicon wafer break pattern that stabilizes the location and shape of the breaks at weak spots of the break pattern and that reduces waste, the through-holes of the break pattern is disposed along a scribe line, a first group of the through-holes are substantially disposed on only a first side of the scribe line, and a second group of the through-holes are substantially disposed on only a second side of the scribe line.Type: ApplicationFiled: April 16, 2002Publication date: November 7, 2002Applicant: SEIKO EPSON CORPORATIONInventors: Akihisa Wanibe, Noriaki Okazawa, Yoshinao Miyata, Toshinao Shinbo, Tetsuya Akasu, Hisashi Akachi