Abstract: A motor controller which eliminates a positioning operation between a power semiconductor element and a base plate to improve the assembly process is provided. The motor controller has a power semiconductor element closely contacted with a heatsink and mounted in a first base plate, wherein a spacer having an engaging section formed therein as a hole for the power semiconductor element is interposed between the heatsink and the base plate, and the power semiconductor element is positioned in the spacer. Further, the peripheral wall of the hole is arranged so as to shut off a space between a terminal projecting from the side of the power semiconductor element and the heatsink.

Abstract: There is provided a motor controller which eliminates a positioning operation between a power semiconductor element and a base plate to improve assemblability. A motor controller has a power semiconductor element (3) closely contacted with a heatsink (1) and mounted in a first base plate (4), wherein a spacer (2) having an engaging section (2e) formed therein as a hole for the power semiconductor element (3) is interposed between the heatsink (1) and the base plate (4), and the power semiconductor element (3) is positioned in the spacer (2). Further, the peripheral wall of the hole is arranged so as to shut off a space between a terminal projecting from the side of the power semiconductor element (3) and the heatsink (1).

Abstract: In a vacuuming motor used by being attached to a peripheral edge of a motor attaching hole provided at a vacuum chamber, an end portion on a load side of a motor main body is attached with a reduction gear main body having an attaching flange fixed to the motor attaching hole to interpose an O-ring therebetween and the attaching flange is fixed with vacuum seals and constituted by a resin and brought into contact with an output shaft of the reduction gear main body for partitioning an inner space of the reduction gear main body and the motor main body and an inner space of the vacuum chamber.

Abstract: A robot for carrying a substrate in which minimum turning radius is small when the arm is retracted although a plurality of forks are provided and installation area can be minimized. The robot comprises a fixed base, a first turnable arm linked with the fixed base, a second turnable arm linked with the first arm, and a turnable fork linked with the second arm, wherein the fork comprises a plurality of first and second independent forks. The first and second forks are fixed coaxially and vertically in two stages to the forward end part of the second arm such that they can turn independently and first and second fork drive motors are disposed in the second arm.

Abstract: In a vacuuming motor used by being attached to a peripheral edge of a motor attaching hole provided at a vacuum chamber, an end portion on a load side of a motor main body is attached with a reduction gear main body having an attaching flange fixed to the motor attaching hole to interpose an O-ring therebetween and the attaching flange is fixed with vacuum seals and constituted by a resin and brought into contact with an output shaft of the reduction gear main body for partitioning an inner space of the reduction gear main body and the motor main body and an inner space of the vacuum chamber.

Abstract: In order to obtain a manipulator using a plane pulse motor showing advantageous features such that even in a case where a moment of force is applied to the manipulator in a falling direction, the moment can be sustained by magnetic attraction caused by the pulse motor, the weight of the manipulator is reduced, the degree of freedom of the movement can be increased, and a rotating mechanism for a tool itself is eliminated; a plurality of movable members are provided on a stator of the plane pulse motor, a rotatable shaft is provided on each movable member so as to extend vertically, the rotatable shafts are connected with each other through a connecting member, a required tool is secured to the connecting member, and the movements of the movable members are made controllable in a manner correlated with each other. The manipulator using the plane pulse motor of the aforementioned construction is most adapted to be used in combination with an industrial robot and the like.