Abstract: There is provided a technique that includes abnormality detecting by picking up a sound generated from a transfer configured to operate in a vacuum and transport a substrate in a vacuum transfer chamber and compare the sound information with a preset threshold value to detect an abnormality of the transfer. The transfer includes a gas-filled container arranged in the vacuum transfer chamber and filled with a gas and a microphone installed inside the gas-filled container.

Abstract: There is provided a technique that includes: at least one process chamber configured to be capable of processing a substrate; one or more supports configured to be capable of supporting the substrate; a transporter configured to be capable of transporting the one or more supports; a transfer chamber configured to be capable of transferring the substrate; a transport chamber that is adjacent to the transfer chamber and the at least one process chamber and is configured to be capable of moving the transporter; and a delivery chamber that is disposed in the transport chamber and is configured to be capable of delivering the one or more supports.

Abstract: There is provided a technique that includes: at least one process chamber configured to be capable of processing a substrate; one or more supports configured to be capable of supporting the substrate; a transporter configured to be capable of transporting the one or more supports; a transfer chamber configured to be capable of transferring the substrate; a transport chamber that is adjacent to the transfer chamber and the at least one process chamber and is configured to be capable of moving the transporter; and a delivery chamber that is disposed in the transport chamber and is configured to be capable of delivering the one or more supports.

Abstract: There is provided a technique that includes abnormality detecting by picking up a sound generated from a transfer configured to be capable of transporting the substrate and comparing a waveform of sound data with a preset threshold value to detect an abnormality of the transfer; and failure detecting by picking up vibration of the transfer and comparing a waveform of vibration data with a preset threshold value to detect a failure of the transfer.

Abstract: There is provided a technique that includes: at least one process chamber configured to be capable of processing a substrate; one or more supports configured to be capable of supporting the substrate; a transporter configured to be capable of transporting the one or more supports; a transfer chamber configured to be capable of transferring the substrate; a transport chamber that is adjacent to the transfer chamber and the at least one process chamber and is configured to be capable of moving the transporter; and a delivery chamber that is disposed in the transport chamber and is configured to be capable of delivering the one or more supports.

Abstract: There is provided a technique that includes abnormality detecting by picking up a sound generated from a transfer configured to be capable of transporting the substrate and comparing a waveform of sound data with a preset threshold value to detect an abnormality of the transfer; and failure detecting by picking up vibration of the transfer and comparing a waveform of vibration data with a preset threshold value to detect a failure of the transfer.

Abstract: A substrate processing apparatus includes: a process chamber performing film-forming processing to a substrate; a substrate support that is provided in the process chamber and includes a plurality of mounting surfaces on which the substrate is mounted; and a detector that is disposed outside or inside the process chamber and detects a state of a film-forming material adhering to at least one of the plurality of mounting surfaces in a non-contact manner.

Abstract: There is provided an apparatus including a substrate holder to hold substrates including a product substrate and a dummy substrate, a transfer mechanism that loads the substrates into the substrate holder, a storage part to store a device parameter including at least the number of substrates that can be loaded on the substrate holder and the number of product substrates to be loaded on the substrate holder, and a controller to: (1) create substrate transfer data, which includes information indicating an order for transferring the substrates, transfer source information, and transfer destination information, according to the device parameter, (2) read the created substrate transfer data, (3) by transferring the substrates to the transfer mechanism based on the read substrate transfer data, transfer the dummy substrate to a substrate holding region except for a heat equalization region, and transfer the product substrate to the heat equalization region on the substrate holder.

Abstract: There is provided an apparatus including a substrate holder to hold substrates including a product substrate and a dummy substrate, a transfer mechanism that loads the substrates into the substrate holder, a storage part to store a device parameter including at least the number of substrates that can be loaded on the substrate holder and the number of product substrates to be loaded on the substrate holder, and a controller to: (1) create substrate transfer data, which includes information indicating an order for transferring the substrates, transfer source information, and transfer destination information, according to the device parameter, (2) read the created substrate transfer data, (3) by transferring the substrates to the transfer mechanism based on the read substrate transfer data, transfer the dummy substrate to a substrate holding region except for a heat equalization region, and transfer the product substrate to the heat equalization region on the substrate holder.

Abstract: A management apparatus includes: a manipulation & display unit including a user interface for selecting a reference device information, and configured to display: a difference between the device information obtained from the substrate processing device and the reference device information selected via the user interface; a content of the reference device information; and a content of the device information, and further configured to receive a command for modifying the device information; and a control unit configured to modify the device information based on the command received from the manipulation & display unit and configured to transmit a modified device information to the substrate processing device.

Abstract: A management apparatus includes: a manipulation & display unit including a user interface for selecting a reference device information, and configured to display: a difference between the device information obtained from the substrate processing device and the reference device information selected via the user interface; a content of the reference device information; and a content of the device information, and further configured to receive a command for modifying the device information; and a control unit configured to modify the device information based on the command received from the manipulation & display unit and configured to transmit a modified device information to the substrate processing device.

Abstract: A substrate processing system includes a substrate processing apparatus for generating apparatus data on substrate processing and a management apparatus connected to at least one substrate processing apparatus via a network for receiving and storing the apparatus data periodically reported from the substrate processing apparatus. The substrate processing apparatus includes a storage unit for storing the apparatus data a report cycle or the number of reports of the apparatus data to the management apparatus, and a degree of importance of the apparatus data in association with a data type of the apparatus data, and a control unit for, when changing a report cycle of the apparatus data, determining a data type of the report cycle of which is to be changed based on the report cycle or the number of reports and the degree of importance per data type stored in the storage unit.

Abstract: An information managing method for managing information based upon an electronic message containing apparatus information or event information transmitted from a substrate processing apparatus, the information managing method comprising: storing the apparatus information of the substrate processing apparatus at a transmission time of the electronic message in a first apparatus information storage unit; comparing the event information with a condition for accumulating the apparatus information when the electronic message is transmitted; and accumulating the apparatus information in a second apparatus information storage unit by associating the apparatus information with a time stamp of a generation of the event information when the condition is satisfied.

Abstract: An information managing method for managing information, based upon an electronic message containing apparatus information or event information transmitted from a substrate processing apparatus, comprises: storing the apparatus information of the substrate processing apparatus at the transmission time of the electronic message containing the apparatus information in a first apparatus information storage unit; when the electronic message containing the event information is transmitted, comparing conditions for accumulating the event information and the apparatus information; and when the conditions coincide with each other, storing the apparatus information in a second apparatus information storage unit in association with time when the event information has been generated.

Abstract: An operation terminal, which includes an operation terminal, when connected to a group administration apparatus for administering a plurality of substrate processing apparatuses for processing substrates, generates a data acquisition request format that sets forth retrieval conditions and types of display items classified in individual tables for the substrate processing apparatuses, and then transmits it to the group administration apparatus.

Abstract: An operation terminal, which includes an operation terminal, when connected to a group administration apparatus for administering a plurality of substrate processing apparatuses for processing substrates, generates a data acquisition request format that sets forth retrieval conditions and types of display items classified in individual tables for the substrate processing apparatuses, and then transmits it to the group administration apparatus.

Abstract: Even when the number of apparatuses and GUI terminals increase, the load of data retrieval processing does not increase in the group administration apparatus, and hence data retrieval and display onto the GUI terminals are to be performed rapidly. Data pieces transmitted from apparatuses are classified for each group by a group administration apparatus. Thus, for example, when temperature information is to be displayed on a GUI terminal, a temperature information group is set into a retrieval condition for each display item, while a temperature setting value and a temperature monitor value are set into types. Then, these data pieces are transferred to the group administration apparatus. Then, with reference to the retrieval conditions of a plurality of display items acquired from the GUI terminal, the group administration apparatus merges display items of the same condition into one retrieval item.

Abstract: An information managing method for managing information, based upon an electronic message containing apparatus information or event information transmitted from a substrate processing apparatus, comprises: storing the apparatus information of the substrate processing apparatus at the transmission time of the electronic message containing the apparatus information in a first apparatus information storage unit; when the electronic message containing the event information is transmitted, comparing conditions for accumulating the event information and the apparatus information; and when the conditions coincide with each other, storing the apparatus information in a second apparatus information storage unit in association with time when the event information has been generated.

Abstract: Even when the number of apparatuses and GUI terminals increase, the load of data retrieval processing does not increase in the group administration apparatus, and hence data retrieval and display onto the GUI terminals are to be performed rapidly. Data pieces transmitted from apparatuses are classified for each group by a group administration apparatus. Thus, for example, when temperature information is to be displayed on a GUI terminal, a temperature information group is set into a retrieval condition for each display item, while a temperature setting value and a temperature monitor value are set into types. Then, these data pieces are transferred to the group administration apparatus. Then, with reference to the retrieval conditions of a plurality of display items acquired from the GUI terminal, the group administration apparatus merges display items of the same condition into one retrieval item.