Patents by Inventor Toshiya Aoyagi

Toshiya Aoyagi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cathode Unit for Magnetron Sputtering Apparatus and Magnetron Sputtering Apparatus
    Publication number: 20230207295
    Abstract: A cathode unit includes first and second magnet units that are driven to rotate around an axis on a side opposed to a sputtering surface of a target. The first magnet unit is configured to cause a first leakage magnetic field to act on a space in front of the sputtering surface including a target center inward. The second magnet unit is configured to cause a second leakage magnetic field to act locally in the space in front of the sputtered surface located between the target center and the outer edge of the target and to enable self-holding discharge under low pressure of plasma confined by the second leakage magnetic field.
    Type: Application
    Filed: March 18, 2022
    Publication date: June 29, 2023
    Applicant: ULVAC, INC.
    Inventors: Toshiya Aoyagi, Makoto Arai, Satoru Takasawa