Abstract: A process gas supply unit has a supply valve for supplying process gas to a semiconductor manufacturing apparatus, a purge valve for supplying inert gas, a check valve provided in a passage between an inert gas source and the purge valve and a common manifold provided with the supply valve, the purge valve and the check valve. Therefore, these parts are mounted on a mass flow controller as a unit and the process gas unit can be made compact and integrated as a whole.

Abstract: A process gas supply unit without conventional pipes. The process gas supply unit may include the components of a mass flow controller, an input valve, an output valve, a purge valve, a vacuum valve, a check valve, a regulator, and a filter. Module blocks are attached to at least one of the components with bolts from a predetermined direction. The module blocks are mounted on base plates with bolts from the same predetermined direction, and the base plates are mounted on a mounting panel with bolts from the same predetermined direction.

Abstract: A process gas supply unit includes an upper module block provided with flow passages, a passage block provided with flow passages connected with the flow passages of the upper module block, and a base block provided with a connection passage connected with the flow passages of the passage block. The upper module block is attached with a component used for the supply of process gas and is down mounted on the passage block by bolts. The base block is mounted underneath the adjacent passage blocks. Accordingly, a sequence of the components are communicated through the flow passages of the upper module block and the passage block, and the connection passage of the base block.

Abstract: A metal gasket excellent in sealing performance and capable of sealing with a small pressing force. The metal gasket comprises at least one metal sheath with C-shaped cross-section and a ring elastic core surrounded by the metal sheath and the metal gasket is served for sealing with aid of the contact with the sealing face tightened by exerting a force in the axis center direction, wherein the metal sheath has the worked portion with a locally thin cross-section over the whole length, and when the metal sheath is exerted with a force and deformed, the deflection in the axis direction of the metal sheath due to concentrated stress on the thin worked portion causes to form projections at the both sides of the deflection which projections are pressed onto the sealing face.

Abstract: A metal gasket excellent in sealing performance and capable of sealing with a small pressing force. The metal gasket comprises at least one metal sheath with a C-shaped cross-section and a ring elastic core surrounded by the metal sheath. The metal gasket provides a seal upon exertion of a force in the axis center direction. The metal sheath has a locally thin cross-section over the whole annular length, and when the metal sheath subject to a force and deformed, the deflection in the axis direction of the metal sheath due to concentrated stress on the thin worked portion causes the formation projections at both sides of the deflection which projections are pressed onto the sealing face to form air-tight seals.