Abstract: A particle beam irradiation apparatus There is provided a data processing apparatus that displays on a display unit a measured irradiation position value and an irradiation position value error, which is the error of the measured irradiation position relevant value related to the irradiation position of charged particle beam with respect to a desired irradiation position value related to a desired irradiation position, so that the measured irradiation position relevant value and the irradiation position relevant value error correspond to each other.

Abstract: A particle beam irradiation apparatus There is provided a data processing apparatus that displays on a display unit a measured irradiation position value and an irradiation position value error, which is the error of the measured irradiation position relevant value related to the irradiation position of charged particle beam with respect to a desired irradiation position value related to a desired irradiation position, so that the measured irradiation position relevant value and the irradiation position relevant value error correspond to each other.

Abstract: A laser machining device according to the invention is provided with a laser oscillator for generating a laser beam, a main deflecting galvannometer mirror, an F? lens, and a sub-deflecting means arranged in an optical path between the laser oscillator and the main deflecting galvanometer mirror. A means for splitting a laser beam is provided, and the sub-deflecting means is inserted into the optical path of one of the split laser beams. At the same time, both the split laser beams are incident from the same main deflecting galvannometer mirror to the F? lens, and a numerical aperture in the optical system constituted by the main deflecting galvannometer mirror, the F? lens, and an object is set to be not more than 0.08.

Abstract: A laser machining device according to the invention is provided with a laser oscillator for generating a laser beam, a main deflecting galvannometer mirror, an F&thgr; lens, and a sub-deflecting means arranged in an optical path between the laser oscillator and the main deflecting galvanometer mirror. A means for splitting a laser beam is provided, and the sub-deflecting means is inserted into the optical path of one of the split laser beams. At the same time, both the split laser beams are incident from the same main deflecting galvannometer mirror to the F&thgr; lens, and a numerical aperture in the optical system constituted by the main deflecting galvannometer mirror, the F&thgr; lens, and an object is set to be not more than 0.08.

Abstract: In a laser machining apparatus comprising a deflector for changing a direction of a laser beam outputted from a laser oscillator, and a converging lens for refracting the laser beam introduced from the deflector and focusing the laser beam onto a work to be machined, a lens position adjusting unit is provided for changing a relative position between a plurality of lenses constituting the converging lens and the lens position adjusting unit change the relative positions of the lenses so as to cancel a change in refractance of the lenses due to a change in the temperature.

Abstract: A distance detector detects a distance between a focal position and a workpiece by use of a capacitance. A sensing electrode forms the capacitance relative to said workpiece. An input signal generator generates an alternating signal or an input signal that is input into the sensing electrode. A signal detector detects an alternating signal or a detection signal that is generated at the sensing electrode and that has a value varied in accordance with the capacitance. A computing unit receives the input signal from the input signal generator and the detection signal from the signal detector. The computing unit extracts a component having the same frequency as a frequency of the input signal from the detection signal. Thus, it computes the extracted component to generate a distance information output representing the distance between the focal position and the workpiece.