Patents by Inventor TOUCH MICRO-SYSTEM TECHNOLOGY CORP.

TOUCH MICRO-SYSTEM TECHNOLOGY CORP. has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20130043136
    Abstract: A method of making a planar coil is disclosed in the present invention. First, a substrate having a trench is provided. Then, a barrier and a seed layer are formed on the substrate in sequence. An isolative layer is used for guiding a conductive material to flow into a lower portion of the trench such that accumulation of the conductive material at opening of the trench is prevented before the lower portion of the trench is completely filled up, thereby avoiding gap formation in the trench.
    Type: Application
    Filed: October 15, 2012
    Publication date: February 21, 2013
    Applicant: TOUCH MICRO-SYSTEM TECHNOLOGY CORP.
    Inventor: TOUCH MICRO-SYSTEM TECHNOLOGY CORP.