Abstract: The high vacuum valve includes a valve housing having a valve flow channel provided in an interior thereof, two ports connected to the valve housing so as to be arranged perpendicular relative to each other, and capable of being communicated with each other through the valve flow channel, a valve member housed in the valve flow channel for opening and closing the valve flow channel, a valve shaft received in the valve flow channel for causing the valve member to perform opening/closing operations, and an assembly comprising a tubular member and a welded bellows and hermetically surrounding a periphery of the valve shaft, the assembly being fixed at one end portion thereof to a rear face of the valve member and fixed at the other end portion thereof to a portion of the interior of the valve housing which is opposed to the rear face of the valve member.

Abstract: The two-port valve comprises a main valve part which includes a valve seat disposed in the flow path, a valve element for opening and closing the flow path, and a rod coupled with the valve element and inserted into a through hole of a bonnet, and an operation part for driving the rod. The protection structure is provided in the two-port valve for protecting the rod seal member for the through hole from the fluid containing a depositional material. The protection structure includes ring-shaped abutting seal surfaces disposed in a wide area between a peripheral part of the valve element and an outer periphery of the rod for preventing the invasion of the fluid in a state of opening the valve. A ring-shaped elastic seal member is disposed on an inner end of the abutting seal surface.

Abstract: The high vacuum valve includes a valve housing having a valve flow channel provided in an interior thereof, two ports connected to the valve housing so as to be arranged perpendicular relative to each other, and capable of being communicated with each other through the valve flow channel, a valve member housed in the valve flow channel for opening and closing the valve flow channel, a valve shaft received in the valve flow channel for causing the valve member to perform opening/closing operations, and an assembly comprising a tubular member and a welded bellows and hermetically surrounding a periphery of the valve shaft, the assembly being fixed at one end portion thereof to a rear face of the valve member and fixed at the other end portion thereof to a portion of the interior of the valve housing which is opposed to the rear face of the valve member.

Abstract: A vacuum regulating valve has a poppet type valve element supported so as to be brought into uniformly close contact with a valve seat disposed in a passage connecting two main ports. The valve element is connected to a valve stem by a connecting mechanism that allows the valve element to tilt relative to the valve stem. A piston included in a cylinder actuator moves the valve stem axially.

Abstract: An evacuating valve includes a chamber port structure to be connected to a vacuum vessel in which a plasma is produce to create a plasma atmosphere, a pump port structure to be connected to a vacuum pump; a valve casing defining a passage connecting the chamber port structure and the pump port structure, and a valve mechanism for opening and closing the chamber port structure. At least two expended parts are formed by expanding an end part of the inside surface of the chamber port structure, and the valve element has a large part capable of being pressed against the valve seat with the sealing member held between the large part and the valve seat, and at least two small parts capable of being fitted in the expanded parts of the chamber port structure.

Abstract: The two-port valve comprises a main valve part which includes a valve seat disposed in the flow path, a valve element for opening and closing the flow path, and a rod coupled with the valve element and inserted into a through hole of a bonnet, and an operation part for driving the rod. The protection structure is provided in the two-port valve for protecting the rod seal member for the through hole from the fluid containing a depositional material. The protection structure includes ring-shaped abutting seal surfaces disposed in a wide area between a peripheral part of the valve element and an outer periphery of the rod for preventing the invasion of the fluid in a state of opening the valve. A ring-shaped elastic seal member is disposed on an inner end of the abutting seal surface.

Abstract: A vacuum regulating valve has a poppet type valve element supported so as to be brought into uniformly close contact with a valve seat disposed in a passage connecting two main ports. The valve element is connected to a valve stem by a connecting mechanism that allows the valve element to tilt relative to the valve stem. A piston included in a cylinder actuator moves the valve stem axially.

Abstract: An evacuating valve includes: a chamber port structure to be connected to a vacuum vessel in which a plasma is produce to create a plasma atmosphere, a pump port structure to be connected to a vacuum pump, a valve casing defining a passage connecting the chamber port structure and the pump port structure, and a valve mechanism for opening and closing the chamber port structure. The valve mechanism includes a valve seat placed on an end surface, facing the passage, of the chamber port structure, a valve element capable of moving along an axis of the chamber port structure to close and open the chamber port structure, and a sealing member creating a nonleaking union between the valve seat and the valve element.

Abstract: A poppet valve seal mechanism has a groove to which a seal member is mounted such that a width of an opening of the groove is smaller than a maximum width inside of the groove and a cross section area of the groove is smaller than that of the seal member. A maximum width of a portion of the seal member accommodated in the groove is greater than a width of the opening of the groove. A width of the opening is constant over its entire peripheral. An inner wall forming the inside of the groove is formed with communication holes and which bring the inside of the groove and the outside of the groove into communication with each other.

Abstract: To provide a maintenance-easy two-port valve capable of easily assembling and disassembling a valve body and a bonnet, and preventing the bonnet from being detached from the valve body by an erroneous operation. In a two-port valve 1 having attachment means for detachably attaching a bonnet 21 to a valve body 2, the attachment means includes a plurality of shafts 16 fixedly attached to a valve body 2 and each having an engagement groove 17 on an upper end portion, a handle 31, a plate 41 rotatably provided between an upper end portion of the bonnet 21 and the handle 31 and having an engagement groove 43 engaged to or disengaged from the retaining groove 17 by rotating the plate 41, and an engagement pin 35 engaged with an engagement hole 44 provided in the plate 41 at a push-down position of the handle 31, transmitting the rotation of the handle 31 to the plate 41 and fixedly attached to the handle 31.

Abstract: To constitute a poppet valve with a heater by providing a heater which heats a valve member at a fixed position inside valve casing without attaching the heater to the valve member, a rod or the like which is a movable member as necessary. In a valve casing 1 having main ports 11, 12, a flow path 13 which connects these main ports 11, 12, a valve seat 14 which is provided inside the flow path 13, a valve member 17 which opens/closes the valve seat 14, and a rod 18 which is coupled to the valve member 17, a cylindrical heat transfer body 28 is disposed at a fixed position therein so as to surround the rod 18, and the heat transfer body 28 is caused to house a first heater 31 therein, so that a poppet valve is constituted such that the valve member 17 comes in contact with the heat transfer body 28 at a time of opening of the valve member 17.

Abstract: A heater and a temperature sensor are mounted to a valve member driven for opening and closing through a piston and a rod, primary conductors extending from the heater and the temperature sensor are connected to a terminal block mounted to the piston, a secondary conductor having a spiral portion for expansion and contraction is connected between the terminal block and a connector mounted to a lid body, and displacements of the primary conductors due to opening and closing of the valve member are absorbed by expansion and contraction of the spiral portion.

Abstract: A heater and a temperature sensor are mounted to a valve member driven for opening and closing through a piston and a rod, primary conductors extending from the heater and the temperature sensor are connected to a terminal block mounted to the piston, a secondary conductor having a spiral portion for expansion and contraction is connected between the terminal block and a connector mounted to a lid body, and displacements of the primary conductors due to opening and closing of the valve member are absorbed by expansion and contraction of the spiral portion.

Abstract: To constitute a poppet valve with a heater by providing a heater which heats a valve member at a fixed position inside valve casing without attaching the heater to the valve member, a rod or the like which is a movable member as necessary. In a valve casing 1 having main ports 11, 12, a flow path 13 which connects these main ports 11, 12, a valve seat 14 which is provided inside the flow path 13, a valve member 17 which opens/closes the valve seat 14, and a rod 18 which is coupled to the valve member 17, a cylindrical heat transfer body 28 is disposed at a fixed position therein so as to surround the rod 18, and the heat transfer body 28 is caused to house a first heater 31 therein, so that a poppet valve is constituted such that the valve member 17 comes in contact with the heat transfer body 28 at a time of opening of the valve member 17.

Abstract: To provide a maintenance-easy two-port valve capable of easily assembling and disassembling a valve body and a bonnet, and preventing the bonnet from being detached from the valve body by an erroneous operation. In a two-port valve 1 having attachment means for detachably attaching a bonnet 21 to a valve body 2, the attachment means includes a plurality of shafts 16 fixedly attached to a valve body 2 and each having an engagement groove 17 on an upper end portion, a handle 31, a plate 41 rotatably provided between an upper end portion of the bonnet 21 and the handle 31 and having an engagement groove 43 engaged to or disengaged from the retaining groove 17 by rotating the plate 41, and an engagement pin 35 engaged with an engagement hole 44 provided in the plate 41 at a push-down position of the handle 31, transmitting the rotation of the handle 31 to the plate 41 and fixedly attached to the handle 31.

Abstract: To provide a poppet valve seal mechanism in which a seal member does not fall out from a groove, and the metal touch is not generated. A groove 15 to which a seal member 17 is mounted is formed such that a width of an opening 15a of the groove 15 is smaller than an maximum width of inside of the groove 15 and a cross section area of the groove 15 is smaller than that of the seal member 17. A maximum width of a portion of the seal member 17 accommodated in the groove 15 is greater than a width of the opening of the groove. A width of the opening 15a is constant over its entire peripheral. An inner wall forming the inside of the groove 15 is formed with communication holes 33 and 34 which bring the inside of the groove 15 and the outside of the groove 15 into communication with each other.

Abstract: There is provided a two-port valve in which a deviation of a degree of parallelization of a valve member and a valve seat can be corrected automatically, which has excellent airtightness, and in which assembly and replacement of the valve member are easy.

Abstract: An opening/closing valve has an attachment/detachment mechanism for detachably interconnecting a valve body and a bonnet. The attachment/detachment mechanism comprises a first annular groove provided at a connecting recess of the valve body, a second annular groove provided at a connecting projection of the bonnet, and an elastic semiannular member. The elastic semiannular member is installed to the first annular groove and the second annular groove respectively when the valve body and the bonnet are interconnected.

Abstract: The piezoelectric element laminate 20 which expands due to application of a voltage is disposed between a diaphragm valve 11 applied with elastic force in a valve opening direction and a valve spring mechanism 25, a distortion amount a of the piezoelectric element laminate 20 in expansion is set to be larger than an opening/closing stroke b of the diaphragm valve 11, and a spring seat 28 separates from a second stopper 30 due to a difference c between the distortion amount a and the opening/closing stroke b. As a result, when the piezoelectric element laminate 20 expands to seat the diaphragm valve 11 on a valve seat 10, the valve spring 29 is compressed and repulsing force of the valve spring 29 acts on the diaphragm valve 11 through the piezoelectric element laminate 20 and the diaphragm valve 11 is pressed against the valve seat 10 by the repulsing force.

Abstract: By incorporating two control valves 2A and 2B each including a valve mechanism portion 4A, 4B for opening and closing a fluid flow path 12a by displacement of a diaphragm valve 14 and a cylinder operating portion 5A, 5B for opening and closing the diaphragm valve 14 with a vale rod 25 to which a plurality of pistons 24 are connected into casings 7 and 8 connected to each other, the control valves 2A and 2B are integrated with each other. Flow paths 12b, 12b for connecting the control valves 2A and 2B are provided in the casing 7.