Patents by Inventor Tram Doan Nguyen

Tram Doan Nguyen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Hydride gas purification for the semiconductor industry
    Patent number: 7510692
    Abstract: A method for hydride gas purification uses materials having at least one lanthanide metal or lanthanide metal oxide. The method reduces contaminants to less than 100 parts per billion (ppb), preferably 10 ppb, more preferably 1 ppb. The material can also include transition metals and transition metal oxides, rare earth elements and other metal oxides. The invention also includes materials for use in the method of the invention.
    Type: Grant
    Filed: July 21, 2004
    Date of Patent: March 31, 2009
    Assignee: Entegris, Inc.
    Inventors: Daniel Alvarez, Jr., Jeffrey J. Spiegelman, Joshua T. Cook, Tram Doan Nguyen, Daniel A. Lev, Troy B. Scoggins