Patents by Inventor Travis Savage

Travis Savage has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Compositions of low-K dielectric sols containing nonmetallic catalysts
    Patent number: 9589789
    Abstract: A sol composition for producing a porous low-k dielectric material is provided. The composition can include at least one silicate ester, a polar solvent, water, an acid catalyst for silicate ester hydrolysis, an amphiphilic block copolymer surfactant, and a nonmetallic catalyst that reduces dielectric constant in the produced material. The composition can further include a metallic ion at a lower parts-per-million concentration than the nonmetallic catalyst, and/or the composition can further include a cosolvent. A method of preparing a thin film on a substrate using the sol composition is also provided.
    Type: Grant
    Filed: December 21, 2015
    Date of Patent: March 7, 2017
    Assignee: SBA Materials, Inc.
    Inventors: Mark L. F. Phillips, Travis Savage
  • COMPOSITIONS OF LOW-K DIELECTRIC SOLS CONTAINING NONMETALLIC CATALYSTS
    Publication number: 20160111275
    Abstract: A sol composition for producing a porous low-k dielectric material is provided. The composition can include at least one silicate ester, a polar solvent, water, an acid catalyst for silicate ester hydrolysis, an amphiphilic block copolymer surfactant, and a nonmetallic catalyst that reduces dielectric constant in the produced material. The composition can further include a metallic ion at a lower parts-per-million concentration than the nonmetallic catalyst, and/or the composition can further include a cosolvent. A method of preparing a thin film on a substrate using the sol composition is also provided.
    Type: Application
    Filed: December 21, 2015
    Publication date: April 21, 2016
    Applicant: SBA Materials, Inc.
    Inventors: Mark L.F. Phillips, Travis Savage
  • COMPOSITIONS OF LOW-K DIELECTRIC SOLS CONTAINING NONMETALLIC CATALYSTS
    Publication number: 20140120739
    Abstract: A sol composition for producing a porous low-k dielectric material is provided. The composition can include at least one silicate ester, a polar solvent, water, an acid catalyst for silicate ester hydrolysis, an amphiphilic block copolymer surfactant, and a nonmetallic catalyst that reduces dielectric constant in the produced material. The composition can further include a metallic ion at a lower parts-per-million concentration than the nonmetallic catalyst, and/or the composition can further include a cosolvent. A method of preparing a thin film on a substrate using the sol composition is also provided.
    Type: Application
    Filed: October 31, 2013
    Publication date: May 1, 2014
    Inventors: Mark L.F. Phillips, Travis Savage